Linke Jian

Improved patterning quality of SU-8 microstructures by optimizing the exposure parameters

Kun Lian, Zhong Geng Ling, Linke Jian, 2000, Advanced Lithography.

Multilevel microstructures and mold inserts fabricated with planar and oblique x-ray lithography of SU-8 negative photoresist

Jost Goettert, Linke Jian, Yohannes M. Desta, 2001, SPIE MOEMS-MEMS.

SU-8 based deep x-ray lithography/LIGA

Gabi Gruetzner, Jost Goettert, Martin Bednarzik, 2003, SPIE MOEMS-MEMS.

Fabrication of ultra thick, ultra high aspect ratio microcomponents by deep and ultra deep X-ray lithography

Jost Goettert, Martin Bednarzik, Linke Jian, 2003, Proceedings International Conference on MEMS, NANO and Smart Systems.

Borosilicate glass based x-ray masks for LIGA microfabrication

Jost Goettert, Zhengchun Peng, Yoonyoung Jin, 2003, SPIE MOEMS-MEMS.

Cost-effective masks for deep x-ray lithography

Jost Goettert, Linke Jian, Yohannes M. Desta, 2003, SPIE Microtechnologies.