P. Gaikwad

Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer

R. Mukhiya, P. Agarwal, S. Badjatya, 2019, Microsystem Technologies.

Electrical equivalent modeling of MEMS differential capacitive accelerometer

Soumendu Sinha, Ravindra Mukhiya, Ram Gopal, 2020, Microelectron. J..

Design, modelling and system level simulations of DRIE-based MEMS differential capacitive accelerometer

R. Mukhiya, P. Agarwal, S. Badjatya, 2019, Microsystem Technologies.