A. Uranga

发表

Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode

M. Riverola, G. Vidal-Álvarez, G. Sobreviela, 2016, IEEE Sensors Journal.

Analytical and finite-element modeling of a localized-mass sensor

J. Esteve, A. Uranga, N. Barniol, 2008, 2008 IEEE Sensors.

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

G. Abadal, J. Verd, N. Barniol, 2006, IEEE Electron Device Letters.

A 3V CMOS-MEMS oscillator in 0.35μm CMOS technology

A. Uranga, N. Barniol, J. Verd, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

J. L. Muñoz-Gamarra, A. Uranga, N. Barniol, 2013 .

A monolithically integrated torsional CMOS-MEMS relay

Arantxa Uranga, Francesc Torres, Nuria Barniol, 2016 .

Temperature-drift rejection and sensitivity to mismatch of synchronized strongly-coupled M/NEMS resonators

J. Juillard, A. Uranga, N. Barniol, 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

High-frequency sensor technologies for inertial force detection based on thin-film bulk acoustic wave resonators (FBAR)

J. Esteve, J. Plaza, A. Uranga, 2009 .

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

G. Abadal, J. Esteve, A. Boisen, 2005, Journal of Microelectromechanical Systems.

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

G. Abadal, J. Esteve, A. Boisen, 2006 .

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

G. Abadal, J. Esteve, A. Uranga, 2007 .

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

G. Abadal, A. Uranga, F. Torres, 2009 .

Packaged CMOS–MEMS free–free beam oscillator

A. Uranga, N. Barniol, J. Verd, 2013 .

Integration of NEMS resonators in a 65nm CMOS technology

J. L. Muñoz-Gamarra, J. Esteve, A. Uranga, 2013 .

High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters

G. Abadal, J. Verd, N. Barniol, 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

Analytical and Finite-Element Modeling of Localized-Mass Sensitivity of Thin-Film Bulk Acoustic-Wave Resonators (FBAR)

E. Martincic, A. Uranga, P. Nouet, 2009, IEEE Sensors Journal.

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.

J Verd, A. Uranga, N. Barniol, 2011, Lab on a chip.

Proceedings of the Eurosensors XXIII conference VHF band-pass filter based on a single CMOS-MEMS double-ended tuning fork resonator

G. Abadal, A. Uranga, F. Torres, 2009 .

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

M. Riverola, A. Uranga, F. Torres, 2018, Micromachines.

Nanomechanical test structure for optimal alignment in stencil-based lithography

Arantxa Uranga, Julien Arcamone, Gabriel Abadal, 2009, 2009 IEEE International Conference on Microelectronic Test Structures.

9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).

Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).

CMOS Cantilever-based Oscillator for Attogram

G. Abadal, A. Uranga, F. Torres, 2007 .

Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation

G. Abadal, J. Esteve, A. Uranga, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

G. Abadal, J. Esteve, A. Uranga, 2007, IEEE Transactions on Nanotechnology.

Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

G. Abadal, A. Uranga, F. Torres, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Thin-Film Bulk Acoustic Wave Resonator Floating Above CMOS Substrate

J. Esteve, A. Uranga, N. Barniol, 2008, IEEE Electron Device Letters.

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

G. Abadal, J. Esteve, A. Romano-Rodríguez, 2006, 2006 IEEE Ultrasonics Symposium.

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

A. Uranga, N. Barniol, E. Ledesma, 2022, IEEE Electron Device Letters.

NEMS Switches Monolithically Fabricated on CMOS MIM Capacitors

J. L. Muñoz-Gamarra, A. Uranga, N. Barniol, 2014 .

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

A. Uranga, N. Barniol, E. Ledesma, 2022, Microsystems & nanoengineering.

CMOS-MEMS switches based on back-end metal layers

Arantxa Uranga, F. Torres, Nuria Barniol, 2014 .

Noise effects on resonator bias polarization in CMOS-MEMS oscillators

N. Barniol, G. Sobreviela, M. Riverola, 2014, IEEE SENSORS 2014 Proceedings.

Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators

G. Sobreviela, A. Uranga, N. Barniol, 2014, 2014 10th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

G. Abadal, J. Verd, N. Barniol, 2008, IEEE Electron Device Letters.

Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay

Arantxa Uranga, Nuria Barniol, F. Torres, 2018 .

CMOS-MEMS resonators

Arantxa Uranga, Jaume Verd, Nuria Barniol, 2015 .

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2008 .

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2007 .

AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE International Ultrasonics Symposium (IUS).

Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

A. Uranga, N. Barniol, Jesus Yanez, 2021, 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2006 .

High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Arantxa Uranga, Núria Barniol, Eyglis Ledesma, 2021, Sensors.

Double-ended tuning fork resonator in 0.35um CMOS technology for RF applications

G. Abadal, J. Verd, N. Barniol, 2008, 2008 Ph.D. Research in Microelectronics and Electronics.

Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications

Núria Barniol, Arantxa Uranga, Iván Zamora, 2020, IEEE Access.

Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process

A. Uranga, F. Torres, N. Barniol, 2021, Sensors.

AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates

Arantxa Uranga, Francesc Torres, Nuria Barniol, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Monolithical AlN PMUT on Pre-Processed CMOS Substrate

A. Uranga, F. Torres, A. Uranga, 2018, 2018 IEEE International Frequency Control Symposium (IFCS).

Above-IC 300 Mhz AIN SAW oscillator

Arantxa Uranga, Núria Barniol, Eloi Marigó, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Frequency synthesis using on-chip micromechanical resonator

G. Abadal, N. Barniol, A. Uranga, 2005, Research in Microelectronics and Electronics, 2005 PhD.

Mixing in a 220MHz CMOS-MEMS

Núria Barniol, Jaume Esteve, Francesc Torres, 2007, 2007 IEEE International Symposium on Circuits and Systems.

Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography.

Arantxa Uranga, Núria Barniol, Julien Arcamone, 2008, Small.

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

Arantxa Uranga, Núria Barniol, Jose Luis Muñoz-Gamarra, 2016, Micromachines.

Electrode–Tissue Impedance Measurement CMOS ASIC for Functional Electrical Stimulation Neuroprostheses

Arantxa Uranga, Núria Barniol, Jordi Sacristán, 2007, IEEE Transactions on Instrumentation and Measurement.

VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

Arantxa Uranga, Gonzalo Murillo, Gabriel Abadal, 2009 .

Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Arantxa Uranga, Nuria Barniol, J. L. Muñoz-Gamarra, 2014 .

A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array

A. Uranga, F. Torres, N. Barniol, 2023, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).

Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays

Arantxa Uranga, Núria Barniol, Eyglis Ledesma, 2020, Sensors.

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

G. Abadal, J. Esteve, A. Uranga, 2007 .

Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

J. Esteve, A. Uranga, N. Barniol, 2007, 2007 IEEE International Conference on Microelectronic Test Structures.

Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme

A. Uranga, N. Barniol, Jesus Yanez, 2022, Sensors and Actuators A: Physical.

An Integrated Implantable Electrical Sacral Root Stimulator for Bladder Control

N. Barniol, A. Uranga, A. Uranga, 2002, Neuromodulation : journal of the International Neuromodulation Society.

Optimization of the Close-to-Carrier Phase Noise in a CMOS–MEMS Oscillator Using a Phase Tunable Sustaining-Amplifier

Arantxa Uranga, Núria Barniol, Francesc Torres, 2017, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

A 230MHz CMOS-MEMS bulk acoustic wave resonator

Arantxa Uranga, Nuria Barniol, J. Giner, 2012 .

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Arantxa Uranga, Francesc Torres, Guillermo Sobreviela, 2017, IEEE Transactions on Circuits and Systems I: Regular Papers.

Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator

N. Barniol, A. A. Zainuddin, G. Sobreviela, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

Núria Barniol, Francesc Pérez-Murano, Marc Sansa, 2015, Sensors.

Preliminary program

Monday, Omar A. Barrera, S. Sakuma, 1976, Middle East Studies Association Bulletin.