N. Barniol

发表

Dynamic Properties of Three-Terminal Tungsten CMOS-NEM Relays Under Nonlinear Tapping Mode

M. Riverola, G. Vidal-Álvarez, G. Sobreviela, 2016, IEEE Sensors Journal.

Analytical and finite-element modeling of a localized-mass sensor

J. Esteve, A. Uranga, N. Barniol, 2008, 2008 IEEE Sensors.

On the electromechanical modelling of a resonating nano-cantilever-based transducer.

J Verd, G. Abadal, A. Boisen, 2004, Ultramicroscopy.

Integrated CMOS-MEMS with on-chip readout electronics for high-frequency applications

G. Abadal, J. Verd, N. Barniol, 2006, IEEE Electron Device Letters.

A 3V CMOS-MEMS oscillator in 0.35μm CMOS technology

A. Uranga, N. Barniol, J. Verd, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).

Exploitation of non-linearities in CMOS-NEMS electrostatic resonators for mechanical memories

J. L. Muñoz-Gamarra, A. Uranga, N. Barniol, 2013 .

CMOS-NEM relay based on tungsten VIA layer

Francesc Torres, Nuria Barniol, Martin Riverola, 2014, IEEE SENSORS 2014 Proceedings.

A monolithically integrated torsional CMOS-MEMS relay

Arantxa Uranga, Francesc Torres, Nuria Barniol, 2016 .

A platform for monolithic CMOS-MEMS integration on SOI wafers

G. Abadal, J. Esteve, N. Barniol, 2006 .

Ultimate Limits of Differential Resonant MEMS Sensors Based on Two Coupled Linear Resonators

J. Juillard, N. Barniol, P. Prache, 2018, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control.

Impact of output metric on the resolution of mode-localized MEMS resonant sensors

Pietro M. Ferreira, J. Juillard, N. Barniol, 2017, 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC).

Design and characterization of a monolithic CMOS-MEMS mutually injection-locked oscillator for differential resonant sensing

Pietro M. Ferreira, J. Juillard, M. Riverola, 2018 .

Temperature-drift rejection and sensitivity to mismatch of synchronized strongly-coupled M/NEMS resonators

J. Juillard, A. Uranga, N. Barniol, 2016, 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS).

Design, fabrication, and characterization of a submicroelectromechanical resonator with monolithically integrated CMOS readout circuit

G. Abadal, J. Esteve, A. Boisen, 2005, Journal of Microelectromechanical Systems.

System on chip mass sensor based on polysilicon cantilevers arrays for multiple detection

G. Abadal, J. Esteve, A. Boisen, 2006 .

Monolithic mass sensor fabricated using a conventional technology with attogram resolution in air conditions

G. Abadal, J. Esteve, A. Uranga, 2007 .

Integration of RF-MEMS resonators on submicrometric commercial CMOS technologies

G. Abadal, A. Uranga, F. Torres, 2009 .

Packaged CMOS–MEMS free–free beam oscillator

A. Uranga, N. Barniol, J. Verd, 2013 .

Integration of NEMS resonators in a 65nm CMOS technology

J. L. Muñoz-Gamarra, J. Esteve, A. Uranga, 2013 .

Use of Crude Glycerol from Biodiesel Producers and Fatty Materials to Prepare Allyl Esters

N. Barniol, M. Escribà, J. Eras, 2011 .

Improved behavioral and design model of an Nth-order charge pump

G. Palumbo, Nuria Barniol, N. Barniol, 2000 .

Degradation and Breakdown of Gate Oxides in VLSI Devices

Jordi Suñé, Nuria Barniol, X. Aymerich, 1989, February 16.

The influence of the parasitic current on the nonlinear electrical response of capacitively sensed cantilever resonators

O. Gottlieb, G. Vidal-Álvarez, F. Torres, 2015 .

Nanoelectromechanical systems (NEMS)

W. J. Venstra, G. Abadal, N. Barniol, 2015 .

On the breakdown statistics of very thin SiO2 films

Jordi Suñé, Nuria Barniol, X. Aymerich, 1990 .

Gate oxide breakdown statistics in wearout tests of metal-oxide-semiconductor structures

Jordi Suñé, Nuria Barniol, X. Aymerich, 1989 .

Oxide Degradation and Breakdown in Stressed MOS Capacitors

N. Barniol, X. Aymerich, J. Suñé, 1988, ESSDERC '88: 18th European Solid State Device Research Conference.

High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filters

G. Abadal, J. Verd, N. Barniol, 2009, TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.

Ultrasound Pressure Field Of A Resonating Piezoelectric Membrane With Three Excitation Electrodes

F. Torres, N. Barniol, V. Tzanov, 2018 .

Metal microelectromechanical oscillator exhibiting ultra-high water vapor resolution.

J Verd, A. Uranga, N. Barniol, 2011, Lab on a chip.

Proceedings of the Eurosensors XXIII conference VHF band-pass filter based on a single CMOS-MEMS double-ended tuning fork resonator

G. Abadal, A. Uranga, F. Torres, 2009 .

High Performance Seesaw Torsional CMOS-MEMS Relay Using Tungsten VIA Layer

M. Riverola, A. Uranga, F. Torres, 2018, Micromachines.

Nanomechanical test structure for optimal alignment in stencil-based lithography

Arantxa Uranga, Julien Arcamone, Gabriel Abadal, 2009, 2009 IEEE International Conference on Microelectronic Test Structures.

Morphologic and spectroscopic characterization of porous PtGaAs Schottky diodes by scanning tunnelling microscopy

N. Barniol, X. Aymerich, F. Pérez-Murano, 1995 .

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

J. Giérak, E. Bourhis, J. Esteve, 2007 .

9.5 % Scandium Doped ALN PMUT Compatible with Pre-Processed CMOS Substrates

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).

Monolithic PMUT-on-CMOS Ultrasound System for Single Pixel Acoustic Imaging

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS).

Optical vibrometer for mechanical properties characterization of silicalite-only cantilever based sensors

G. Abadal, J. Santamaría, M. Pina, 2010 .

CMOS Cantilever-based Oscillator for Attogram

G. Abadal, A. Uranga, F. Torres, 2007 .

Monolithic 0.35-μm CMOS Cantilever for Mass Sensing in the Attogram Range with Self-Excitation

G. Abadal, J. Esteve, A. Uranga, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Sensor based on arrays of sub-micrometer scale resonant silicon cantilevers integrated monolithically with CMOS circuitry

G. Abadal, J. Esteve, N. Barniol, 2005, Conference on Electron Devices, 2005 Spanish.

Cantilever based MEMS for multiple mass sensing

G. Abadal, J. Esteve, N. Barniol, 2005, Research in Microelectronics and Electronics, 2005 PhD.

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

G. Abadal, J. Esteve, A. Uranga, 2007, IEEE Transactions on Nanotechnology.

Coupling Resonant Micro and Nanocantilevers to Improve Mass Responsivity by Detectability Product

G. Abadal, A. Uranga, F. Torres, 2007, TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference.

Thin-Film Bulk Acoustic Wave Resonator Floating Above CMOS Substrate

J. Esteve, A. Uranga, N. Barniol, 2008, IEEE Electron Device Letters.

P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

G. Abadal, J. Esteve, A. Romano-Rodríguez, 2006, 2006 IEEE Ultrasonics Symposium.

A femtogram resolution mass sensor platform, based on SOI electrostatically driven resonant cantilever. Part I: electromechanical model and parameter extraction.

G. Abadal, F. Torres, N. Barniol, 2006, Ultramicroscopy.

Phased Array Based on AlScN Piezoelectric Micromachined Ultrasound Transducers Monolithically Integrated on CMOS

A. Uranga, N. Barniol, E. Ledesma, 2022, IEEE Electron Device Letters.

NEMS Switches Monolithically Fabricated on CMOS MIM Capacitors

J. L. Muñoz-Gamarra, A. Uranga, N. Barniol, 2014 .

The influence of the parasitic current on the nonlinear electrical response of capacitive sensed cantilever beams

O. Gottlieb, G. Vidal-Álvarez, N. Barniol, 2014, 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP).

Effects of the field dependent occupation of electrical-stress-generated traps on the conduction and breakdown of thin SiO/sub 2/ films

N. Barniol, X. Aymerich, J. Suñé, 1989, Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics.

Breakdown of SiO2 films in VLSI MOS structures

N. Barniol, X. Aymerich, J. Suñé, 1989 .

The Thermal Growth of Very Thin SiO2 Films A Diffusion-Controlled Process

N. Barniol, X. Aymerich, J. Suñé, 1989 .

SiSiO2 interfacial atomic scale roughness caused by inhomogeneous thermal oxidation

N. Barniol, X. Aymerich, J. Suñé, 1989 .

A new method to perform in situ current voltage curves with an electrochemical scanning tunnelling microscope

G. Abadal, N. Barniol, X. Aymerich, 1996 .

Field induced nanomodification on silicon (100) with scanning tunneling microscopy

G. Abadal, N. Barniol, X. Aymerich, 1995 .

Nanomodification of silicon (100) surface with scanning tunnelling microscopy using polysilicon on silicon structure

G. Abadal, C. Cané, N. Barniol, 1995 .

Fabrication of cantilever based mass sensors inteagrated with CMOS using direct write laser lithography on resist

G. Abadal, J. Esteve, A. Boisen, 2004 .

Integrated tunneling sensor for nanoelectromechanical systems

Jaume Esteve, Anja Boisen, G. Abadal, 2006 .

Single-cell system using monolithic PMUTs-on-CMOS to monitor fluid hydrodynamic properties

A. Uranga, N. Barniol, E. Ledesma, 2022, Microsystems & nanoengineering.

CMOS-MEMS switches based on back-end metal layers

Arantxa Uranga, F. Torres, Nuria Barniol, 2014 .

Ultrasensitive mass sensor fully integrated with complementary metal-oxide-semiconductor circuitry

Francesca Campabadal, Anja Boisen, G. Abadal, 2005 .

AFM lithography of aluminum for fabrication of nanomechanical systems.

G. Abadal, O. Hansen, A. Boisen, 2003, Ultramicroscopy.

Simple STM theory

N. Barniol, X. Aymerich, J. Suñé, 1990 .

Noise effects on resonator bias polarization in CMOS-MEMS oscillators

N. Barniol, G. Sobreviela, M. Riverola, 2014, IEEE SENSORS 2014 Proceedings.

Tunable transimpedance sustaining-amplifier for high impedance CMOS-MEMS resonators

G. Sobreviela, A. Uranga, N. Barniol, 2014, 2014 10th Conference on Ph.D. Research in Microelectronics and Electronics (PRIME).

Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range

G. Abadal, J. Verd, N. Barniol, 2008, IEEE Electron Device Letters.

Nonlinear multi-element interactions in an elastically coupled microcantilever array subject to electrodynamic excitation

O. Gottlieb, F. Torres, N. Barniol, 2019, Nonlinear Dynamics.

Fabrication and characterization of a hammer-shaped CMOS/BEOL-embedded nanoelectromechanical (NEM) relay

Arantxa Uranga, Nuria Barniol, F. Torres, 2018 .

CMOS-MEMS resonators

Arantxa Uranga, Jaume Verd, Nuria Barniol, 2015 .

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2008 .

Focused-ion-beam-assisted tuning of thin-film bulk acoustic wave resonators (FBARs)

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2007 .

AlN-based HBAR ultrasonic sensor for fluid detection in microchannels with multi-frequency operation capability over the GHz range

A. Uranga, N. Barniol, E. Ledesma, 2021, 2021 IEEE International Ultrasonics Symposium (IUS).

Multi-Frequency Thin Film HBAR Microsensor for Acoustic Impedance Sensing Over the GHz Range

A. Uranga, N. Barniol, Jesus Yanez, 2021, 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers).

Localized and distributed mass detectors with high sensitivity based on thin-film bulk acoustic resonators

Humberto Campanella, Arantxa Uranga, Jaume Esteve, 2006 .

Electromechanical model of a resonating nano-cantilever-based sensor for high-resolution and high-sensitivity mass detection

Xavier Borrisé, Jaume Esteve, Francesca Campabadal, 2001 .

Modification of HF‐treated silicon (100) surfaces by scanning tunneling microscopy in air under imaging conditions

N. Barniol, F. Pérez-Murano, X. Aymerich, 1992 .

High Accuracy Ultrasound Micro-Distance Measurements with PMUTs under Liquid Operation

Arantxa Uranga, Núria Barniol, Eyglis Ledesma, 2021, Sensors.

Double-ended tuning fork resonator in 0.35um CMOS technology for RF applications

G. Abadal, J. Verd, N. Barniol, 2008, 2008 Ph.D. Research in Microelectronics and Electronics.

Monolithic Single PMUT-on-CMOS Ultrasound System With +17 dB SNR for Imaging Applications

Núria Barniol, Arantxa Uranga, Iván Zamora, 2020, IEEE Access.

On the SiSiO2 interface roughness in VLSIMOS structures

N. Barniol, X. Aymerich, I. Placencia, 1988 .

Enhancing AlN PMUTs’ Acoustic Responsivity within a MEMS-on-CMOS Process

A. Uranga, F. Torres, N. Barniol, 2021, Sensors.

AlN Piezoelectric Micromachined Ultrasonic Transducer Array Monolithically Fabricated on Top of Pre-Processed CMOS Substrates

Arantxa Uranga, Francesc Torres, Nuria Barniol, 2019, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).

Above-IC 300 Mhz AIN SAW oscillator

Arantxa Uranga, Núria Barniol, Eloi Marigó, 2017, 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Frequency synthesis using on-chip micromechanical resonator

G. Abadal, N. Barniol, A. Uranga, 2005, Research in Microelectronics and Electronics, 2005 PhD.

A Compact and Low-Power CMOS Circuit for Fully Integrated NEMS Resonators

Núria Barniol, Julien Arcamone, Bertrand Misischi, 2007, IEEE Transactions on Circuits and Systems II: Express Briefs.

Mixing in a 220MHz CMOS-MEMS

Núria Barniol, Jaume Esteve, Francesc Torres, 2007, 2007 IEEE International Symposium on Circuits and Systems.

Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

G. Abadal, Julien Arcamone, Francesc Pérez-Murano, 2006 .

Electrochemical modifications at the nanometer scale on Si(100) surfaces with Scanning Tunnelling Microscopy

Gabriel Abadal, Francesc Pérez-Murano, Xavier Aymerich, 1998 .

Nanometer‐scale oxidation of Si(100) surfaces by tapping mode atomic force microscopy

G. Abadal, Francesc Pérez-Murano, Xavier Aymerich, 1995 .

Spectroscopic Characterization of Nanoscale Modification of Passivated Si(100) Surface by STM

N. Barniol, X. Aymerich, F. Pérez-Murano, 1994 .

Nanomechanical mass sensor for spatially resolved ultrasensitive monitoring of deposition rates in stencil lithography.

Arantxa Uranga, Núria Barniol, Julien Arcamone, 2008, Small.

CMOS-NEMS Copper Switches Monolithically Integrated Using a 65 nm CMOS Technology

Arantxa Uranga, Núria Barniol, Jose Luis Muñoz-Gamarra, 2016, Micromachines.

Field induced oxidation of silicon by SPM: study of the mechanism at negative sample voltage by STM, ESTM and AFM

G. Abadal, N. Barniol, F. Pérez-Murano, 1998 .

Electrode–Tissue Impedance Measurement CMOS ASIC for Functional Electrical Stimulation Neuroprostheses

Arantxa Uranga, Núria Barniol, Jordi Sacristán, 2007, IEEE Transactions on Instrumentation and Measurement.

Full wafer integration of NEMS on CMOS by nanostencil lithography

G. Abadal, N. Barniol, F. Serra-Graells, 2006, 2006 International Electron Devices Meeting.

VHF band-pass filter based on a single CMOS-MEMS doubleended tuning fork resonator

Arantxa Uranga, Gonzalo Murillo, Gabriel Abadal, 2009 .

Nanomechanical switches based on metal-insulator-metal capacitors from a standard complementary-metal-oxide semiconductor technology

Arantxa Uranga, Nuria Barniol, J. L. Muñoz-Gamarra, 2014 .

A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array

A. Uranga, F. Torres, N. Barniol, 2023, 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).

Miniaturized 0.13-μm CMOS Front-End Analog for AlN PMUT Arrays

Arantxa Uranga, Núria Barniol, Eyglis Ledesma, 2020, Sensors.

AFM lithography for the definition of nanometre scale gaps: application to the fabrication of a cantilever-based sensor with electrochemical current detection

Jaume Esteve, Anja Boisen, Francesc Pérez-Murano, 2004 .

Novel SU-8 based vacuum wafer-level packaging for MEMS devices

Anja Boisen, Gonzalo Murillo, Gabriel Abadal, 2010 .

A femtogram resolution mass sensor platform based on SOI electrostatically driven resonant cantilever. Part II: sensor calibration and glycerine evaporation rate measurement.

G. Abadal, F. Torres, N. Barniol, 2006, Ultramicroscopy.

Nanometer scale gaps for capacitive transduction improvement on RF-MEMS resonators

G. Abadal, J. Esteve, A. Uranga, 2007 .

Automated on-wafer characterization in micro-machined resonators: towards an integrated test vehicle for bulk acoustic wave resonators (FBAR)

J. Esteve, A. Uranga, N. Barniol, 2007, 2007 IEEE International Conference on Microelectronic Test Structures.

Fluid compressional properties sensing at microscale using a longitudinal bulk acoustic wave transducer operated in a pulse-echo scheme

A. Uranga, N. Barniol, Jesus Yanez, 2022, Sensors and Actuators A: Physical.

Resonators with integrated CMOS circuitry for mass sensing applications, fabricated by electron beam lithography

Jaume Esteve, Francesca Campabadal, Anja Boisen, 2004 .

Scanning near-field optical microscope for the characterization of optical integrated waveguides

N. Barniol, X. Aymerich, F. Pérez-Murano, 2000, Journal of Lightwave Technology.

Optical Integrated Waveguides Characterization by Scanning Near Field Optical Microscope

G. Abadal, N. Barniol, X. Aymerich, 1999 .

An Integrated Implantable Electrical Sacral Root Stimulator for Bladder Control

N. Barniol, A. Uranga, A. Uranga, 2002, Neuromodulation : journal of the International Neuromodulation Society.

On the three‐dimensional scanning tunneling microscopy formalism

N. Barniol, X. Aymerich, F. Pérez, 1991 .

Optimization of the Close-to-Carrier Phase Noise in a CMOS–MEMS Oscillator Using a Phase Tunable Sustaining-Amplifier

Arantxa Uranga, Núria Barniol, Francesc Torres, 2017, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

A 230MHz CMOS-MEMS bulk acoustic wave resonator

Arantxa Uranga, Nuria Barniol, J. Giner, 2012 .

High Mass and Spatial Resolution Mass Sensor based on Resonating Nano-Cantilevers Integrated with CMOS

G. Abadal, O. Hansen, J. Esteve, 2001 .

Phase-Noise Reduction in a CMOS-MEMS Oscillator Under Nonlinear MEMS Operation

Arantxa Uranga, Francesc Torres, Guillermo Sobreviela, 2017, IEEE Transactions on Circuits and Systems I: Regular Papers.

Dual-clock with single and monolithical 0-level vacuum packaged MEMS-on-CMOS resonator

N. Barniol, A. A. Zainuddin, G. Sobreviela, 2015, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).

Nondestructive multiple breakdown events in very thin SiO2 films

Jordi Suñé, Xavier Aymerich, Nuria Barniol, 1989 .

Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

F. Torres, N. Barniol, J. Llobet, 2020, Nanomaterials.

Top-Down CMOS-NEMS Polysilicon Nanowire with Piezoresistive Transduction

Núria Barniol, Francesc Pérez-Murano, Marc Sansa, 2015, Sensors.

Multi-frequency silicon nanofractal resonator

F. Torres, N. Barniol, F. Pérez-Murano, 2018, 2018 IEEE Micro Electro Mechanical Systems (MEMS).

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Núria Barniol, Jordi Llobet, Francesc Torres, 2015, Nanotechnology.

Compact CMOS current conveyor for integrated NEMS resonators

Núria Barniol, Julien Arcamone, Bertrand Misischi, 2008, IET Circuits Devices Syst..

Preliminary program

Monday, Omar A. Barrera, S. Sakuma, 1999 .