J. Arnold
发表
Yayi Wei,
Markus Brink,
Sebastian Engelmann,
2011,
Advanced Lithography.
J. Arnold,
H. Sawin,
1991
.
Brian P. Osborn,
S. Holmes,
K. Petrillo,
2011,
ASMC 2011.
Jeffrey Shearer,
John Arnold,
Nelson Felix,
2018,
Advanced Lithography.
D. Corliss,
T. Standaert,
R. Wong,
2017,
2017 Symposium on VLSI Technology.
D. C. Gray,
J. Arnold,
H. Sawin,
1993
.
J. Arnold,
H. Sawin,
A. Labun,
1995
.
Stephan A. Cohen,
E. T. Ryan,
C. Dimitrakopoulos,
2008
.
A. Simon,
D. Edelstein,
C. Cabral,
2010,
2010 International Electron Devices Meeting.
S. Bent,
N. Fuller,
M. Worsley,
2008
.
D. Corliss,
J. Arnold,
H. Sawin,
1993
.
Lei Sun,
Andrew Metz,
Matthew E. Colburn,
2016,
SPIE Advanced Lithography.
J. Arnold,
1995
.
Jane P. Chang,
J. Arnold,
H. Sawin,
1997
.
J. Arnold,
H. Sawin,
S. Hamaguchi,
1994
.
Akiteru Ko,
Nelson Felix,
Mark Somervell,
2016,
SPIE Advanced Lithography.
J. Arnold,
P. Biolsi,
Y. Mignot,
2022,
Advanced Etch Technology and Process Integration for Nanopatterning XI.
Akiteru Ko,
John Arnold,
Nelson Felix,
2017,
Advanced Lithography.
P. Oldiges,
C. Park,
N. Loubet,
2016,
2016 IEEE International Electron Devices Meeting (IEDM).
John C. Arnold,
Terry A. Spooner,
Satyavolu S. Papa Rao,
2009
.
Yongan Xu,
John Arnold,
Nelson Felix,
2017,
Advanced Lithography.
Nelson Felix,
Kafai Lai,
Martha I. Sanchez,
2016,
SPIE Advanced Lithography.
F. Mont,
T. Spooner,
X. Zhang,
2016,
2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference (IITC/AMC).
John Arnold,
Lei Sun,
Dominik Metzler,
2018,
Advanced Lithography.