S. Raoux

发表

A hybrid life cycle inventory of nano-scale semiconductor manufacturing.

Nikhil Krishnan, David Dornfeld, Daniel Clark, 2008, Environmental science & technology.

Remote microwave plasma source for cleaning chemical vapor deposition chambers: Technology for reducing global warming gas emissions

S. Raoux, Tsutomu Tanaka, M. Bhan, 1999 .

UC Berkeley Green Manufacturing and Sustainable Manufacturing Partnership Title Quantifying the Environmental Footprint of Semiconductor Equipment Using the Environmental Value Systems Analysis ( EnV-S ) Permalink

D. Dornfeld, N. Krishnan, S. Raoux, 2004 .

Basis for developing a methodology to estimate fluorinated GHG emissions from the fluorinated treatment of textile, carpet, leather, and paper

S. Raoux, A. Zille, 2019 .

Formation of metal oxides by cathodic arc deposition

S. Raoux, F. Kong, A. Anders, 1995 .

Growth, trapping and abatement of dielectric particles in PECVD systems

S. Raoux, D. Cheung, K. Fairbairn, 1997 .

A Plasma Reactor for Solid Waste Treatment on Pecvd Production Systems

S. Raoux, D. Cheung, K. Fairbairn, 1996 .

Possible approaches for estimating fluorinated compounds emissions from textile, carpet, leather and paper industries: basis for future methodological development

S. Raoux, A. Zille, 2019 .

PLASMA DISTRIBUTION OF CATHODIC ARC DEPOSITION SYSTEMS

S. Raoux, K. Krishnan, I. Brown, 1996 .

Heteroepitaxial growth and characterization of SrF2/(100)InP

S. Raoux, A. Barrière, H. Guegan, 1992 .

Low temperature luminescence studies of Ca1−xErxF2+x thin films epitaxially grown on silicon substrates

S. Raoux, L. Hirsch, A. Barrière, 1996 .

Intra‐4f‐shell transitions at room temperature of Er3+ ions in Ca1−xErxF2+x thin films grown on Si(100)

S. Raoux, S. Raoux, Albert-Serge Barriere, 1994 .

Characterization of Ca1−xErxF2+x solid solution thin films grown on Si(100) substrates

S. Raoux, A. Barrière, D. Moutonnet, 1993 .

Modification of cathodic arc deposition profiles by magnetic multicusps

S. Raoux, I. Brown, S. Anders, 1996, Proceedings of 17th International Symposium on Discharges and Electrical Insulation in Vacuum.

Luminescent Sr1−xErxF2+x thin films grown on InP(100) substrates. II. Optical properties

S. Raoux, L. Hirsch, A. Barrière, 1995 .

Luminescent Sr1−xErxF2+x thin films grown on InP(100) substrates. I. Growth and physico‐chemical characterizations

S. Raoux, A. Barrière, B. Y. Kim, 1995 .

Study of Sr l−x Er x F 2+x Luminescent Thin Films Epitaxially Grown on InP (100).

S. Raoux, B. Y. Kim, B. Mombelli, 1993 .

Alternatives to reduce perfluorinated compound (PFC) emissions from semiconductor dielectric etch processes: meeting environmental commitments while minimizing costs

David Dornfeld, Nikhil Krishnan, S. Raoux, 2003, IEEE International Symposium on Electronics and the Environment, 2003..