Dekong Zeng

Virtual metrology modeling for plasma etch operations

C. Spanos, Dekong Zeng, Yajing Tan, 2008, 2008 International Symposium on Semiconductor Manufacturing (ISSM).

Statistical Methods for Enhanced Metrology in Semiconductor/Photovoltaic Manufacturing

Dekong Zeng, Dekong Zeng, 2012 .

Dimensionality reduction methods in virtual metrology

Costas J. Spanos, Dekong Zeng, Yajing Tan, 2008, SPIE Advanced Lithography.