J. Berenschot

发表

Silicon micromachined hollow microneedles for transdermal liquid transfer

A. van den Berg, J. Gardeniers, J. Berenschot, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

M.J. de Boer, J. Gardeniers, J. Berenschot, 2005, Journal of Microelectromechanical Systems.

Micromachined palladium silver alloy membranes for hydrogen separation

J. Gardeniers, J. Berenschot, H. Tong, 2002 .

Fiber-top atomic force microscope

D. Iannuzzi, J. Berenschot, M. Elwenspoek, 2006 .

Sidewall patterning—a new wafer-scale method for accurate patterning of vertical silicon structures

J. Gardeniers, J. Berenschot, J. Huskens, 2017 .

Design and fabrication of in-plane AFM probes with sharp silicon nitride tips based on refilling of anisotropically etched silicon moulds

J. Berenschot, L. Abelmann, E. Sarajlic, 2014 .

Etching methodologies in -oriented silicon wafers

R. E. Oosterbroek, A. J. Nijdam, A. Berg, 2000 .

Etching methodologies in <111>-oriented silicon wafers

R. E. Oosterbroek, A. J. Nijdam, A. van den Berg, 2000, Journal of Microelectromechanical Systems.

Micromachining of buried micro channels in silicon

A. van den Berg, J. Gardeniers, J. Berenschot, 2000, Journal of Microelectromechanical Systems.

Nanofluidic bubble pump using surface tension directed gas injection.

A. van den Berg, J. Berenschot, M. Elwenspoek, 2002, Analytical chemistry.

Micromachined fountain pen for atomic force microscope-based nanopatterning

Gijsbertus J.M. Krijnen, Miko Elwenspoek, Szabolcs Deladi, 2004 .

Fabrication of micromachined fountain pen with in situ characterization possibility of nanoscale surface modification

Gijsbertus J.M. Krijnen, Miko Elwenspoek, Szabolcs Deladi, 2005 .

Fabrication of multi-layer substrates for high aspect ratio single crystalline microstructures

J. Gardeniers, J. Berenschot, M. Elwenspoek, 1998 .

Fabrication of a high-temperature microreactor with integrated heater and sensor patterns on an ultrathin silicon membrane

R. E. Oosterbroek, A. Berg, J. Gardeniers, 2005 .

Capillary origami of micro-machined micro-objects

N. R. Tas, L. Abelmann, J. W. Berenschot, 2014, 1410.1768.

Fabrication and characterization of high-temperature microreactors with thin film heater and sensor patterns in silicon nitride tubes.

R. E. Oosterbroek, A. van den Berg, J. Gardeniers, 2005, Lab on a chip.

Characterization of platinum lift off technique

J. Berenschot, H. Tong, G. Krijnen, 2000 .

Designing, realization and characterization of a novel capacitive pressure/flow sensor

R. E. Oosterbroek, A. van den Berg, J. Berenschot, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

A versatile surface channel concept for microfluidic applications

Remco J. Wiegerink, Miko Elwenspoek, Theodorus S.J. Lammerink, 2007 .

DESIGN, FABRICATION AND CHARACTERIZATION OF AN IN-PLANE AFM PROBE WITH ULTRA-SHARP SILICON NITRIDE TIP

J. Berenschot, L. Abelmann, E. Sarajlic, 2010 .

Micromachining of high-contrast optical waveguides in [111] silicon wafers

O. Parriaux, G. Pandraud, A. J. Nijdam, 2000, IEEE Photonics Technology Letters.

Fabrication of millimeter-long structures in sapphire using femtosecond infrared laser pulses and selective etching

J. Berenschot, R. Tiggelaar, G. Römer, 2020 .

Chemically anisotropic single-crystalline silicon nanotetrahedra

J. Berenschot, M. Elwenspoek, H. Jansen, 2009, Nanotechnology.

Etching of silicon in alkaline solutions: a critical look at the {111} minimum

A. J. Nijdam, J. Gardeniers, J. Berenschot, 1999 .

Fabrication of thick silicon nitride blocks embedded in low-resistivity silicon substrates for radio frequency applications

J. Berenschot, H. Jansen, M. Elwenspoek, 2006 .

Controllable elastocapillary folding of three-dimensional micro-objects by through-wafer filling

J. Berenschot, L. Abelmann, N. Tas, 2014 .

Electrospray deposition from fountain pen AFM probes

J. Berenschot, L. Abelmann, E. Sarajlic, 2012 .

Selective Wafer Bonding by Surface Roughness Control

R. E. Oosterbroek, A. Berg, J. Berenschot, 2001 .

Highly uniform sieving structure by corner lithography and silicon wet etching

J. Berenschot, R. Luttge, R. Tiggelaar, 2015 .

In-plane oriented fluid control components, fabricated with new etching techniques

Miko Elwenspoek, A. van den Berg, Johan W. Berenschot, 1998 .

Fabrication of thick silicon nitride blocks for integration of RF devices

J. Berenschot, M. Elwenspoek, J. Sesé, 2005 .

In situ characterization technique for nanotribological investigations

J. Berenschot, G. Krijnen, M. Elwenspoek, 2005 .

Fabrication and characterization of MEMS based wafer-scale palladium-silver alloy membranes for hydrogen separation and hydrogenation/dehydrogenation reactions

J. Gardeniers, J. Berenschot, M. D. de Boer, 2002, Technical Digest. MEMS 2002 IEEE International Conference. Fifteenth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.02CH37266).

Bonding and etching techniques for precision frabrication of reliable microvalves

R. E. Oosterbroek, A. Berg, J. Berenschot, 2000 .

A Simple Selfpriming Bubble-Tolerant Peristaltic Micropump

T. T. Veenstra, A. Berg, J. Gardeniers, 2001 .

Wafer-scale fabrication of periodic Au-hollow nanopillars for SERS applications

J. Gardeniers, J. Berenschot, N. Tas, 2020 .

Micromachining of {111} plates in [001] oriented silicon

R. E. Oosterbroek, J. Berenschot, M. Elwenspoek, 1998 .

Elastocapillary fabrication of three-dimensional microstructures

Remco G.P. Sanders, Michael Curt Elwenspoek, Johan W. Berenschot, 2010 .

Microfabrication of palladium-silver alloy membranes for hydrogen separation

J. Gardeniers, J. Berenschot, M. Elwenspoek, 2003 .

Atom sharp needles, the missing link in microneedle drug delivery

J. Berenschot, N. Tas, J. Wissink, 2008 .

Atom sharp microneedles , the missing link in microneedle drug delivery ?

J. Berenschot, N. Tas, J. Wissink, 2008 .

A wafer-scale fabrication method for three-dimensional plasmonic hollow nanopillars

J. Gardeniers, J. Berenschot, N. Tas, 2021, Nanoscale advances.

Capillarity Induced Negative Pressure of Water Plugs in Nanochannels

Albert van den Berg, Johan W. Berenschot, Niels Roelof Tas, 2003 .

Fabrication of superficial neuromast inspired capacitive flow sensors

Johan W. Berenschot, Meint J. de Boer, N. Izadi, 2010 .

Fabrication of microstructures in the bulk and on the surface of sapphire by anisotropic selective wet etching of laser-affected volumes

J. Berenschot, M. Feinaeugle, N. Tas, 2022, Journal of Micromechanics and Microengineering.

Resistless patterning of sub-micron structures by evaporation through nanostencils

Miko Elwenspoek, Johan W. Berenschot, Jürgen Brugger, 2000 .

Novel integration of a microchannel with a silicon light emitting diode antifuse

A. van den Berg, Johan W. Berenschot, Niels Roelof Tas, 2003 .

Monolithic Integration of a Novel Microfluidic Device with Silicon Light Emitting Diode-Antifuse and Photodetector

J. Holleman, P. LeMinh, A. van den Berg, 2002, 32nd European Solid-State Device Research Conference.

Fabrication of functional structures on thin silicon nitride membranes

J. Berenschot, J. Brugger, G. Krijnen, 2003 .

Advanced sacrificial poly-Si technology for fluidic systems

Miko Elwenspoek, Johan W. Berenschot, Theodorus S.J. Lammerink, 2001 .

Characterization of MEMS-on-tube assembly: reflow bonding of borosilicate glass (Duran®) tubes to silicon substrates

Michael Curt Elwenspoek, Johan W. Berenschot, H.J.M. ter Brake, 2009 .

Micromachined hydraulic astable multivibrator

Jan H. J. Fluitman, Miko Elwenspoek, Johan W. Berenschot, 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

Morphology of single picosecond pulse subsurface laser-induced modifications of sapphire and subsequent selective etching.

J. Gardeniers, J. Berenschot, R. Pohl, 2018, Optics express.

Electrospray deposition from AFM probes with nanoscale apertures

R. G. P. Sanders, N. R. Tas, E. Sarajlic, 2014, 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS).

High resolution powder blast micromachining

Miko Elwenspoek, Henri V. Jansen, Johan W. Berenschot, 2000, Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.00CH36308).

Spreading of thin-film metal patterns deposited on nonplanar surfaces using a shadow mask micromachined in Si (110)

Miko Elwenspoek, Johannes G.E. Gardeniers, Johan W. Berenschot, 2007 .

Micro-assembly of three dimensional tetrahedra by capillary forces

J. W. Berenschot, J. W. van Honschoten, A. Legrain, 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

Elastocapillary folding of three dimensional micro-structures using water pumped through the wafer via a silicon nitride tube

J. Berenschot, L. Abelmann, N. Tas, 2011 .

Designing, simulation and realization of in-plane operating micro-valves, using new etching techniques

Gijsbertus J.M. Krijnen, Miko Elwenspoek, Johan W. Berenschot, 1999 .

Modeling and Validation of Fluid Structure Interactions in Passive Micro Valves

Miko Elwenspoek, Johan W. Berenschot, A. van den Berg, 1998 .

Nanomechanical optical devices fabricated with aligned wafer bonding

P. Lambeck, J. Gardeniers, J. Berenschot, 1998, Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.

Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers

Miko Elwenspoek, Henri V. Jansen, A. van den Berg, 2001 .

High-performance ceramic EOF pump realized by massively parallel sacrificial silicon nano-pillar moulding

J. Eijkel, J. Berenschot, N. Tas, 2020 .

Wafer-scale nanostructure formation inside vertical nano-pores

Edin Sarajlic, J. W. Berenschot, X. Sun, 2017, 2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).

High-resolution shadow-mask patterning in deep holes and its application to an electrical wafer feed-through

Jan H. J. Fluitman, Satomitsu Imai, Johan W. Berenschot, 1996 .

Mask materials for powder blasting

Michael Curt Elwenspoek, Johan W. Berenschot, H. Wensink, 2000 .

Self-Assembled Three-Dimensional Non-Volatile Memories

Leon Abelmann, Miko Elwenspoek, J. W. Berenschot, 2009, Micromachines.

Fabrication and interfacing of nanochannel devices for single-molecule studies

Michael Curt Elwenspoek, Johan W. Berenschot, Niels Roelof Tas, 2009 .

Selective fusion bonding by surface roughness control

R. E. Oosterbroek, A. Berg, J. Berenschot, 1999 .

New design methodologies in (111)-oriented silicon wafers

J. W. Berenschot, Albert van den Berg, Gregory Pandraud, 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Micromachining of \lbrace111\rbrace plates in oriented silicon

Michael Curt Elwenspoek, Johan W. Berenschot, Theodorus S.J. Lammerink, 1998 .

Fibre-top cantilevers: design, fabrication and applications

Remco G.P. Sanders, Szabolcs Deladi, Michael Curt Elwenspoek, 2007 .

3D-fabrication of tunable and high-density arrays of crystalline silicon nanostructures

W. G. van der Wiel, J. Berenschot, N. Tas, 2018 .

A new technique for accurately defined deposition of catalyst thin films in deep flow channels of high-temperature gas microreactors

J.W. Berenschot, M.C. Elwenspoek, R. E. Oosterbroek, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

The electrostatic shuffle motor

Jan H. J. Fluitman, Michael Curt Elwenspoek, Johan W. Berenschot, 1995 .

High aspect ratio single crystalline silicon microstructures fabricated with multi layer substrates

J.W. Berenschot, M. Elwenspoek, C. Gui, 1997, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97).

Experimental investigation of anisotropy in isotropic silicon etching

Michael Curt Elwenspoek, Johan W. Berenschot, J. Berenschot, 2007 .

New applications of R.F.-sputtered glass films as protection and bonding layers in silicon micromachining

Johannes G.E. Gardeniers, Michael Curt Elwenspoek, Johan W. Berenschot, 1994 .

Planarization and fabrication of bridges across deep grooves or holes in silicon using a dry film photoresist followed by an etch back

J. Berenschot, M. Elwenspoek, V. Spiering, 1995 .

Sacrificial wafer bonding for planarization after very deep etching

Jan H. J. Fluitman, Michael Curt Elwenspoek, Johan W. Berenschot, 1995 .

Low temperature sacrificial wafer bonding for planarization after very deep etching

J. Fluitman, J. Berenschot, V. Spiering, 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

Micromachined fountain pen as a tool for atomic force microscope-based nanoelectrochemical metal deposition

J. Berenschot, M. D. de Boer, G. Krijnen, 2005, 18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005..

An AFM-based device for in-situ characterization of nano-wear

M.J. de Boer, S. Deladi, J. Berenschot, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Fiber-top refractometer

Michael Curt Elwenspoek, Johan W. Berenschot, C. J. Alberts, 2009 .

Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections

Miko Elwenspoek, Johannes G.E. Gardeniers, A. van den Berg, 2001 .

Use of Selective Anodic Bonding to Create Micropump Chambers with Virtually No Dead Volume

Miko Elwenspoek, Johannes G.E. Gardeniers, Remco G.P. Sanders, 2001 .

Microfluidics within a Swagelok®: A MEMS-on-Tube Assembly

B. Mogulkoc, J. Berenschot, M. Elwenspoek, 2009, 2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems.

Low-drift U-shaped thermopile flow sensor

M. Dijkstra, T.S.J. Lammerink, M.J. de Boer, 2008, 2008 IEEE Sensors.

Etching of silicon in alkaline solutions : a critical look at the M 1 1 1 N minimum

A. J. Nijdam, J. Gardeniers, J. Berenschot, 1999 .