O. Vatel

Kelvin probe force microscopy for potential distribution measurement of semiconductor devices

O. Vatel, M. Tanimoto, 1995 .

Nanometer‐scale imaging of potential profiles in optically excited n‐i‐p‐i heterostructure using Kelvin probe force microscopy

A. Chavez-Pirson, O. Vatel, M. Tanimoto, 1995 .

Self‐organized growth of regular nanometer‐scale InAs dots on GaAs

J. M. Moison, O. Vatel, F. Houzay, 1994 .

Quantitative Microroughness Analysis down to the Nanometer Scale

O. Vatel, P. Dumas, C. Amra, 1993 .

SILICON ROUGHNESS INDUCED BY PLASMA ETCHING

Philippe Dumas, R. Petri, Pascal Brault, 1994 .

Atomic Force Microscopy and Infrared Spectroscopy Studies of Hydrogen Baked Si Surfaces

H. Bender, M. Caymax, O. Vatel, 1993 .

Kelvin probe force microscopy for characterization of semiconductor devices and processes

O. Vatel, M. Tanimoto, Olivier Vatel, 1996 .

Experimental investigation and manufacturing solution of the rapid thermal process induced overlay residue

O. Vatel, P. Benyon, B. Krishnan, 2012, 2012 SEMI Advanced Semiconductor Manufacturing Conference.