U. Lindberg

Anisotropic etching of Z-cut quartz

J. Soderkvist, C. Hedlund, U. Lindberg, 1993 .

Characteristics of quasi-buckling

J. Söderkvist, U. Lindberg, 1993 .

FABRICATION AND CHARACTERIZATION OF A SILICON MICROVALVE

B. Hök, U. Lindberg, J. Roeraade, 1992 .

Adhension quantification methods for wafer bonding

Ulf Lindberg, Kerstin Jonsson, Örjan Vallin, 2005 .

Attomole detection of proteins by matrix-assisted laser desorption/ionization mass spectrometry with the use of picolitre vials

U. Lindberg, J. Roeraade, F. Hillenkamp, 1994 .

Picoliter vials : a new sample handling technique for matrix-assisted laser desorption/ionization mass spectrometry

U. Lindberg, J. Roeraade, J. Greef, 1996 .

Micro vials on a silicon wafer for sample introduction in capillary electrophoreses

B. Hök, U. Lindberg, J. Roeraade, 1992 .

A planar polymer microfluidic electrocapture device for bead immobilization

U. Lindberg, Mats Jönsson, 2006 .

Wet chemical etching mechanism of silicon

Leif Smith, Michael Curt Elwenspoek, Ulf Lindberg, 1994, Proceedings IEEE Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines and Robotic Systems.

Quartz crystal microbalance sensor design : I. Experimental study of sensor response and performance

Lars Vestling, Ulf Lindberg, Mats Jönsson, 2007 .

Wetting properties of silicon surfaces

U. Lindberg, B. Hok, K. Hermansson, 1991, TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.

Quasi-buckling of micromachined beams

J. Soderkvist, U. Lindberg, M. Elwenspoek, 1993 .

Polishing of Quartz by Rapid Etching in Ammonium Bifluoride

G. Thornell, U. Lindberg, O. Vallin, 2007, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.