Yuzuru Tanaka

发表

Reducing off Hydrocarbon Contaminants for EUVL

Yuzuru Tanaka, K. Hamamoto, H. Tsubakino, 2005 .

Actinic Mask Inspection Using an EUV Microscope –Preparation of a Mirau Interferometer for Phase-Defect Detection–

Yuzuru Tanaka, K. Hamamoto, Takeo Watanabe, 2005 .

Phase Defect Observation Using Extreme Ultraviolet Microscope

Yuzuru Tanaka, K. Hamamoto, Takeo Watanabe, 2006 .

Outgassing Characteristics of Structural Materials and the Removal of Contaminants from EUVL Masks using 172-nm Radiation

Yuzuru Tanaka, K. Hamamoto, Takeo Watanabe, 2004 .

Development of Nanometer Resolution Focus Detector in Vacuum for Extreme Ultraviolet Microscope

Hiroo Kinoshita, Kazuhiro Hamamoto, Takeo Watanabe, 2006 .