H. Grange

CO2 measurement using an AlN/SI SAW sensor

S. Fanget, H. Grange, F. Palancade, 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

Thin SQI NEMS accelerometers compatible with In-IC integration

H. Grange, P. Robert, F. Marchi, 2006, 2006 5th IEEE Conference on Sensors.

NEMS Devices for Accelerometers Compatible with Thin SOI Technology

H. Grange, P. Robert, F. Marchi, 2007, 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensors

J. Hammond, F. de Crécy, H. Grange, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Polymer-based capacitive humidity sensor: characteristics and experimental results

Gilles Delapierre, H. Grange, Bernard Chambaz, 1983 .

A capacitive humidity sensor with every fast response time and very low hysteresis

H. Grange, H. Grange, H. Boucher, 1987 .

NEMS Devices forAccelerometers Compatible withThinSOITechnology

H. Grange, F. Marchi, L. Duraffourg, 2007 .