P. Surbled

Effect of the composition and thermal annealing on the transformation temperatures of sputtered TiNi shape memory alloy thin films

H. Fujita, M. Ataka, P. Surbled, 2001 .

Improvement of a classical electrodeposition process for electrostatic variable-capacitance, side-drive micromotor fabrication

P. Surbled, J. Grandchamp, A. Bosseboeuf, 1996 .

RIBE of thick aluminum films for microelectromechanical devices

P. Surbled, J. Grandchamp, E. Dufour-Gergam, 1997 .

High volume fabrication of customised nanopore membrane chips

Helmut Schift, Laura J. Heyderman, Louis Tiefenauer, 2003 .

Design, implementation, and functional validation of a new generation of microneedle 3D high-density CMOS multi-electrode array for brain tissue and spheroids

E. D’Angelo, M. Tedesco, M. Marcoli, 2022, bioRxiv.