S. Sugiyama
发表
O. Tabata,
R. Asahi,
H. Funabashi,
1991,
TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers.
S. Sugiyama,
K. Kawahata,
O. Tabata,
1989,
IEEE Micro Electro Mechanical Systems, , Proceedings, 'An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots'.
K. J. Gabriel,
H. Fujita,
O. Tabata,
1992,
[1992] Proceedings IEEE Micro Electro Mechanical Systems.
Susumu Sugiyama,
Osamu Tabata,
Keiichi Shimaoka,
1994,
Proceedings of 1994 IEEE International Electron Devices Meeting.