M.S.-C. Lu

A CMOS Micromachined Capacitive Tactile Sensor With High-Frequency Output

C. Ko, S. Tseng, M.S.-C. Lu, 2006, Journal of Microelectromechanical Systems.

Position control of parallel-plate microactuators for probe-based data storage

G. Fedder, M.S.-C. Lu, 2004, Journal of Microelectromechanical Systems.

CMOS Capacitive Sensors With Sub- $\mu$m Microelectrodes for Biosensing Applications

M.S.-C. Lu, Shi-Wei Wang, 2010, IEEE Sensors Journal.

CMOS micromachined capacitive cantilevers for EFM-based mass data storage

M.S.-C. Lu, Shi-Wei Wang, Shi-Jie Hung, 2008, 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

A CMOS Bulk-Micromachined Thermal Imager

M.S.-C. Lu, D. Yao, D. Liu, 2006, 2006 International Symposium on VLSI Technology, Systems, and Applications.

Laminated high-aspect-ratio microstructures in a conventional CMOS process

G. Fedder, S. Santhanam, M. L. Reed, 1996, Proceedings of Ninth International Workshop on Micro Electromechanical Systems.

A Large-Displacement CMOS-Micromachined Thermal Actuator with Capacitive Position Sensing

M.S.-C. Lu, M.S.-C. Lu, Li-Sheng Zheng, 2005, 2005 IEEE Asian Solid-State Circuits Conference.