M. Sugawara
发表
Germain Fenger,
Vicky Philipsen,
Eric Hendrickx,
2014,
Advanced Lithography.
I. Nishiyama,
M. Sugawara,
A. Chiba,
2003
.
I. Nishiyama,
M. Sugawara,
M. Takai,
2005
.
I. Nishiyama,
M. Sugawara,
M. Takai,
2005
.
I. Nishiyama,
M. Sugawara,
M. Takai,
2004
.
I. Nishiyama,
M. Sugawara,
M. Takai,
2004,
Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004..
I. Nishiyama,
M. Sugawara,
2007
.
Masaaki Ito,
S. Okazaki,
M. Sugawara,
2003
.
M. Sugawara,
T. Ohte,
1991
.
S. Okazaki,
M. Sugawara,
A. Chiba,
2003
.
Impact of Slanted Absorber Side Walls on Critical Dimension Error in Extreme Ultraviolet Lithography
Iwao Nishiyama,
Minoru Sugawara,
I. Nishiyama,
2007
.
Akira Chiba,
Minoru Sugawara,
Masaaki Ito,
2002,
SPIE Advanced Lithography.
M. Sugawara,
H. Nagasawa,
Y. Yamaguchi,
1991
.
M. Sugawara,
T. Okada,
1995
.
M. Sugawara,
C. J. Chen,
1970
.
I. Nishiyama,
M. Sugawara,
A. Chiba,
2003
.
M. Sugawara,
Y. Kondoh,
Taichi Fukuda,
1996
.
M. Sugawara,
Y. Kobayashi,
T. Okada,
1986
.
M. Sugawara,
H. Baba,
T. Takemura,
1986
.
M. Sugawara,
T. Okada,
1993
.
M. Sugawara,
T. Okada,
2002
.
M. Sugawara,
1967
.
Kazuhide Yamashiro,
Minoru Sugawara,
M. Sugawara,
1990
.
M. Sugawara,
T. Watari,
A. Ogata,
1976
.
Yoshio Kobayashi,
M. Sugawara,
T. Ohte,
1989
.
R. Kumazawa,
S. Okamura,
M. Sugawara,
1982
.
M. Sugawara,
T. Watari,
A. Ogata,
1975
.
M. Sugawara,
1966
.
M. Sugawara,
M. Sugawara,
1998
.
M. Sugawara,
Y. Hatta,
1965
.
N. Sato,
M. Sugawara,
S. Ono,
1998
.
Iwao Nishiyama,
Minoru Sugawara,
I. Nishiyama,
2006,
SPIE Advanced Lithography.
M. Sugawara,
1967
.
M. Sugawara,
S. Handa,
1966
.
M. Sugawara,
Y. Hatta,
1965
.
M. Sugawara,
Y. Hatta,
1963
.