K. Kodera

发表

Reactive ion etching challenges for half-pitch sub-10-nm line-and-space pattern fabrication using directed self-assembly lithography

Hitoshi Kubota, Katsuyoshi Kodera, Tsukasa Azuma, 2016, SPIE Advanced Lithography.

Electrical yield verification of half-pitch 15 nm patterns using directed self-assembly of polystyrene-block-poly(methyl methacrylate)

Y. Kasahara, Yuriko Seino, Hironobu Sato, 2015 .

Characterization of half-pitch 15-nm metal wire circuit fabricated by directed self-assembly of polystyrene-block-poly(methyl methacrylate)

Y. Kasahara, Yuriko Seino, Hironobu Sato, 2016 .

A Simulation Study on Defectivity in Directed Self-assembly Lithography

Y. Kasahara, Yuriko Seino, Hironobu Sato, 2015 .

Simulation study on defect annihilation dynamics in directed self-assembly lithography

Y. Kasahara, Yuriko Seino, Hironobu Sato, 2015 .

Dispersive lineshape of the resistively-detected NMR in the vicinity of Landau level filling ν = 1

A. Endo, S. Katsumoto, Y. Iye, 2006 .

Sub-10-nm patterning process using directed self-assembly with high χ block copolymers

Katsuyoshi Kodera, Tomoharu Fujiwara, Tsukasa Azuma, 2015 .

A Challenge to the Micro-phase Separation Limit of PS-b-PMMA by Doping with Hydrophilic Materials

Y. Kasahara, Hironobu Sato, H. Kubota, 2015 .

Temperature scaling of quantum Hall plateau transition in bilayer systems

A. Endo, S. Katsumoto, Y. Iye, 2006 .

Magnetoresistance anomalies at level crossing in double layer quantum Hall systems

A. Endo, S. Katsumoto, Y. Iye, 2004 .

Direct Self-Assembly for Non-Periodic Designs

H. Kanai, Katsutoshi Kobayashi, K. Kodera, 2016 .

Control of morphological defects at the boundary between the periodic and non-periodic patterns in directed self-assembly process

Katsuyoshi Kodera, Simon Maeda, Masahiro Ohshima, 2016, SPIE Advanced Lithography.

Process Evaluation of Directed Self-assembly Lithography using Simulation Method based on Self-consistent Field Theory

Y. Kasahara, Hironobu Sato, H. Kanai, 2014 .