W. Barth

Design and fabrication of an electrostatically driven microgripper for blood vessel manipulation

P. Dario, M. Carrozza, A. Menciassi, 2006 .

Evaluation and fabrication of AFM array for ESA-Midas/Rosetta space mission

Teodor Gotszalk, Ivo W. Rangelow, Piotr Grabiec, 2001 .

A high-resolution optical study of cantilever heterostructure layer geometries

W. Barth, T. Debski, F. Römer, 2006 .

An overview of stress free polishing of Cu with ultra low-k(k<2.0) films

W. Barth, M. Lu, S. Lakshminarayanan, 2003, Proceedings of the IEEE 2003 International Interconnect Technology Conference (Cat. No.03TH8695).

Gated field emitter arrays

L. G. Il’chenko, I. Rangelow, W. Barth, 2001 .

Field emission cathode array with self-aligned gate electrode fabricated by silicon micromachining

L. G. Il’chenko, I. Rangelow, W. Barth, 2000 .