G. Xiao

Affordable and process window increasing full chip ILT masks

David Kim, Guangming Xiao, Isao Aburatani, 2010, Photomask Technology.

Anomalous ion channeling in InGaAs/GaAs strained heterojunction

G. Xiao, Jiarui Liu, S. Yin, 1990 .

Low-temperature MFM studies of CMR manganites

G. Xiao, D. Naugle, J. H. Ross, 2000 .

Curvilinear mask solutions for full-chip EUV lithography

K. Lucas, G. Xiao, Kevin Hooker, 2022, Advanced Lithography.

Considering MEEF in inverse lithography technology (ILT) and source mask optimization (SMO)

Vikram Tolani, Guangming Xiao, Bob Gleason, 2008, Photomask Technology.

Microstructure reconstruction of porous copper foams based on deep convolutional generative adversarial networks with physical characteristics of materials

G. Xiao, Bo Li, Hui Zhang, 2022, International Journal of Data Science and Analytics.

Optimization from design rules, source and mask, to full chip with a single computational lithography framework: level-set-methods-based inverse lithography technology (ILT)

Vikram Tolani, Guangming Xiao, Bob Gleason, 2010, Advanced Lithography.