C. Herrmann

发表

Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers

David C. Miller, H. Maier, K. Gall, 2007 .

Biocompatibility of atomic layer-deposited alumina thin films.

C. Herrmann, S. George, R. Mahajan, 2007, Journal of biomedical materials research. Part A.

Probing Repulsive Interactions on the Si(100)-2 × 1 Surface by Local Tip-Induced Excitation

J. Boland, C. Herrmann, 1999 .

Conformal hydrophobic coatings prepared using atomic layer deposition seed layers and non-chlorinated hydrophobic precursors

V. Bright, C. Herrmann, S. George, 2005 .

Hydrophobic coatings using atomic layer deposition and non-chlorinated precursors

V. Bright, C. Herrmann, S. George, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

The mechanical properties of atomic layer deposited alumina for use in micro- and nano-electromechanical systems

Victor M. Bright, Christofer Hierold, Steven M. George, 2006 .

Thermomechanical behavior and reliability of Au/Si MEMS structures

K. Gall, C. Herrmann, S. George, 2004, 2004 IEEE International Reliability Physics Symposium. Proceedings.

A novel method for fabricating capacitive micromachined ultrasonic transducers with ultra-thin membranes

V. Bright, C. Herrmann, S. George, 2004, IEEE Ultrasonics Symposium, 2004.

Multilayer and Functional Coatings on Carbon Nanotubes using Atomic Layer Deposition

C. Herrmann, S. George, D. Finch, 2005 .

Low stress atomic layer deposited alumina for nano electro mechanical systems

C. Hierold, C. Stampfer, V. Bright, 2005, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..

Ultra-thin multilayer nanomembranes for short wavelength deformable optics

V. Bright, C. Herrmann, S. George, 2004, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.

Morphology and Microstructure Evolution of Multilayer Au/Cr/Si Thin Films Subject to Annealing

David B. Miller, H. Maier, K. Gall, 2004 .

Thermo-mechanical evolution of multilayer thin films: Part II. Microstructure evolution in Au/Cr/Si microcantilevers

Steven M. George, Ken Gall, David C. Miller, 2007 .

Alternative dielectric films for rf MEMS capacitive switches deposited using atomic layer deposited Al2O3/ZnO alloys

Victor M. Bright, Kevin D. Leedy, Steven M. George, 2007 .

Intrinsic stress development and microstructure evolution of Au/Cr/Si multilayer thin films subject to annealing

Ken Gall, David C. Miller, Hans Jürgen Maier, 2005 .

Spontaneous roughening: fundamental limits in Si(100) halogen etch processing.

J. Boland, C. Herrmann, Dongxue Chen, 2002, Physical review letters.

Vacancy dynamics and reorganization on bromine-etched Si(100)-(2 x 1) surfaces.

J. Boland, C. Herrmann, 2001, Physical Review Letters.

The role of repulsive interactions in molecular bromine adsorption and patterning of Si(100)-2×1

J. Boland, C. Herrmann, 2000 .

Properties of atomic-layer-deposited Al2O3/ZnO dielectric films grown at low temperature for RF MEMS

Victor M. Bright, Cari F. Herrmann, Frank W. DelRio, 2005, SPIE MOEMS-MEMS.

Multilayer coating method for x-ray reflectivity enhancement of polysilicon micro-mirrors at 1.54-Å wavelength

Victor M. Bright, Cari F. Herrmann, Steven M. George, 2005, SPIE MOEMS-MEMS.