M. Engelhardt
发表
Comprehensive study of the resistivity of copper wires with lateral dimensions of 100 nm and smaller
W. Steinhögl,
G. Schindler,
G. Steinlesberger,
2005
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W. Steinhögl,
G. Schindler,
G. Steinlesberger,
2002
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W. Pamler,
M. Kleiner,
S. Kuhn,
1997,
European Workshop Materials for Advanced Metallization,.
Manfred Engelhardt,
Gernot Steinlesberger,
Günther Schindler,
2004
.
C. Dehm,
C. Mazure,
N. Nagel,
1998
.
G. Schindler,
M. Traving,
M. Engelhardt,
2006
.
Manfred Engelhardt,
G. Steinlesberger,
Emmerich Bertagnolli,
2002
.
Manfred Engelhardt,
Gernot Steinlesberger,
G. Scheinbacher,
2005
.
M. Engelhardt,
S. Schwarzl,
1987
.
W. Steinhögl,
G. Schindler,
M. Traving,
2005
.
Manfred Engelhardt,
Gernot Steinlesberger,
Günther Schindler,
2003
.
Manfred Engelhardt,
G. Steinlesberger,
Günther Schindler,
2002
.
W. Steinhögl,
G. Schindler,
G. Steinlesberger,
2004
.
Manfred Engelhardt,
G. Steinlesberger,
Emmerich Bertagnolli,
2003
.
G. Schindler,
G. Steinlesberger,
G. Schindler,
2003,
International Conference on Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003..