J. Maes
发表
T. Schram,
N. Horiguchi,
A. Thean,
2016,
2016 IEEE Symposium on VLSI Technology.
Roger Loo,
Andriy Hikavyy,
Sandeep Mehta,
2015
.
K. Wostyn,
J. Geypen,
H. Bender,
2016,
2016 IEEE International Electron Devices Meeting (IEDM).
Aaron Thean,
Jacopo Franco,
Stefan De Gendt,
2014
.
J. Raskin,
A. Thean,
N. Collaert,
2015
.
M. Jurczak,
J. Kittl,
C. Adelmann,
2010
.
J. Maes,
P. Roksnoer,
M. Keijser,
1989
.
N. Horiguchi,
N. Jourdan,
J. Maes,
2022,
2022 IEEE International Interconnect Technology Conference (IITC).
A. Stesmans,
M. Caymax,
J. Maes,
2005
.
A. Stesmans,
M. Caymax,
J. Maes,
2005
.
T. Schram,
O. Richard,
G. Pourtois,
2009
.
D. Mocuta,
A. Thean,
N. Collaert,
2018,
Advances in Science, Technology and Engineering Systems Journal.
L. Molenkamp,
J. Maes,
P. Roksnoer,
1989
.
J. Haisma,
J. Maes,
A. D. Jong,
1990
.
J. Swerts,
M. Caymax,
A. Delabie,
2010
.
K. Opsomer,
D. Wouters,
J. Kittl,
2010
.
D. Wouters,
J. Maes,
O. Biest,
2000
.
H. Bender,
K. Opsomer,
G. Pourtois,
2009
.
J. Maes,
P. Zalm,
P. Roksnoer,
1991
.
J. Maes,
P. Roksnoer,
A. T. Vink,
1991
.
J. Maes,
D. Gravesteijn,
P. Zalm,
1992
.
Christoph Adelmann,
Ben Kaczer,
Dirk Wouters,
2009
.
M. Ritala,
M. Leskelä,
T. Aaltonen,
2004
.
G. Pourtois,
J. Swerts,
L. Ragnarsson,
2007
.
J. Swerts,
E. Tois,
A. Delabie,
2007
.
G. Ottaviani,
J. Maes,
S. Santucci,
2002
.
Roel Gronheid,
Arjun Singh,
Boon Teik Chan,
2015,
Advanced Lithography.
A. Hikavyy,
K. Wostyn,
G. Mannaert,
2014
.
T. Schram,
J. Swerts,
T. Witters,
2006
.
Impact of Precursor Chemistry and Process Conditions on the Scalability of ALD HfO2 Gate Dielectrics
Stefan De Gendt,
Laura Nyns,
Annelies Delabie,
2010
.
A. Thean,
N. Collaert,
J. Franco,
2017,
IEEE Electron Device Letters.
J. Swerts,
P. Räisänen,
A. Delabie,
2011
.
R. Degraeve,
L. Goux,
B. Govoreanu,
2014,
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.
Hari Pathangi,
Roel Gronheid,
Boon Teik Chan,
2016,
SPIE Advanced Lithography.
Yasuhiro Shimamoto,
Osamu Tonomura,
Matty Caymax,
2005
.
R. Ritzenthaler,
A. Hikavyy,
G. Mannaert,
2012,
2012 International Electron Devices Meeting.
M. Caymax,
K. Torii,
S. Kimura,
2002
.
J. Maes,
F. Martin,
R. Gassilloud,
2013
.
J. Swerts,
L. Ragnarsson,
A. Delabie,
2007
.
K. Opsomer,
D. Wouters,
J. Kittl,
2009
.
M. Caymax,
M. Heyns,
J. Maes,
1998
.
O. Richard,
E. Cartier,
M. Caymax,
2002
.
H. Mertens,
K. Devriendt,
J. Geypen,
2021,
2021 IEEE International Electron Devices Meeting (IEDM).
N. Horiguchi,
N. Jourdan,
N. Heylen,
2022,
International Interconnect Technology Conference.
N. Collaert,
D. Linten,
B. Kaczer,
2020
.
C. Merckling,
N. Waldron,
N. Collaert,
2016,
2016 IEEE Symposium on VLSI Technology.
J. Maes,
G. Wilk,
M. Verghese,
2012
.
A. Vais,
C. Merckling,
N. Waldron,
2015,
2015 IEEE International Electron Devices Meeting (IEDM).
A. Hikavyy,
H. Dekkers,
B. Douhard,
2013
.
J. Maes,
M. Verheijen,
A. Bol,
2023,
Advanced Materials Interfaces.
E. Deloffre,
J. Swerts,
M. Gros-Jean,
2007,
2007 IEEE/SEMI Advanced Semiconductor Manufacturing Conference.
H. Bender,
K. Opsomer,
R. Degraeve,
2009
.