J. Shearer
发表
Jeffrey Shearer,
John Arnold,
Nelson Felix,
2018,
Advanced Lithography.
D. Corliss,
T. Standaert,
R. Wong,
2017,
2017 Symposium on VLSI Technology.
F. Chafik,
S. Jain,
N. Loubet,
2016,
2016 IEEE Symposium on VLSI Technology.
B. Lherron,
D. Chanemougame,
P. Oldiges,
2014,
2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers.
P. Oldiges,
C. Park,
N. Loubet,
2016,
2016 IEEE International Electron Devices Meeting (IEDM).
Jeffrey Shearer,
Ravi Bonam,
Raja Muthinti,
2017,
Advanced Lithography.
Jeffrey Shearer,
Ravi Bonam,
Raja Muthinti,
2017,
Advanced Lithography.
Particle reduction in back end of line plasma-etching process: CFM: Contamination free manufacturing
S. Skordas,
J. Shearer,
V. Pai,
2018,
2018 29th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC).
Jie Yang,
Terence B. Hook,
Andreas Knorr,
2016,
2016 IEEE International Electron Devices Meeting (IEDM).