Akiko Kai

Defect detection strategies and process partitioning for SE EUV patterning

Jeffrey Shearer, John Arnold, Nelson Felix, 2018, Advanced Lithography.

The Effect of Refractory Elements on Microstructure and Mechanical Properties of Ni3(Si,Ti) Intermetallic Alloys

Akiko Kai, Y. Kaneno, T. Takasugi, 2010 .