L. Tai
发表
A. Simon,
D. Edelstein,
A. Uedono,
2012,
2012 International Electron Devices Meeting.
James B. Macdougall,
W. Tseng,
L. Tai,
2015,
2015 International Conference on Planarization/CMP Technology (ICPT).
S. Grunow,
N. Lustig,
M. Chudzik,
2013,
IEEE Transactions on Semiconductor Manufacturing.
S. Grunow,
M. Chudzik,
W. Tseng,
2013,
ASMC 2013 SEMI Advanced Semiconductor Manufacturing Conference.
A. Simon,
D. Edelstein,
C. Cabral,
2010,
2010 International Electron Devices Meeting.
S. Bent,
N. Fuller,
M. Worsley,
2008
.
Yiping Yao,
Xin Zhou,
Richard A. Conti,
2014
.
L. Economikos,
Jianping Zheng,
J. Muncy,
2012,
2012 SEMI Advanced Semiconductor Manufacturing Conference.
A. Simon,
D. Edelstein,
C. Cabral,
2010,
2010 IEEE International Interconnect Technology Conference.
M. Takayanagi,
V. Paruchuri,
R. Iijima,
2011
.
S. Narasimha,
J. Johnson,
M. Khare,
2015,
Symposium on VLSI Technology.