T. Cotler

Large‐signal time‐domain modeling of low‐pressure rf glow discharges

M. Elta, M. Barnes, T. Cotler, 1987 .

A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure RF glow discharges

M. Elta, M. Barnes, T. Cotler, 1988 .

A Monte Carlo microtopography model for investigating plasma/reactive ion etch profile evolution

Michael E. Elta, M. Elta, M. Barnes, 1988 .

High Quality Plasma‐Enhanced Chemical Vapor Deposited Silicon Nitride Films

T. Cotler, J. Chapple‐Sokol, 1993 .