C. Bark
发表
C. Bark,
T. Binnenbose,
G. Vogele,
1998,
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176.
R. Schraft,
C. Bark,
T. Weisener,
1997
.
Rolf Dieter Schraft,
Axel Bertholds,
Andreas Braunschweiler,
1996,
Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.