Matthias Müller

Atomic layer deposition of Al2O3 on S-passivated Ge

M. Caymax, B. Beckhoff, S. Sioncke, 2011 .

An efficient X-ray spectrometer based on thin mosaic crystal films and its application in various fields of X-ray spectroscopy

Vladimir A. Arkadiev, Birgit Kanngießer, Burkhard Beckhoff, 2009 .

EUV damage threshold measurements of Mo/Si multilayer mirrors

Matthias Müller, K. Mann, T. Feigl, 2012 .

Short-wavelength ablation of polymers in the high-fluence regime

T. Mocek, J. Rocca, A. Endo, 2014 .

Emission properties of ns and ps laser-induced soft x-ray sources using pulsed gas jets.

Matthias Müller, K. Mann, P. Grossmann, 2013, Optics express.