B. V. Drieenhuizen

Novel interconnection technologies for integrated microfluidic systems

K. R. Williams, G. Kovacs, N. Maluf, 1998 .

Optocoupler based on the avalanche light emission in silicon

Reinoud F. Wolffenbuttel, R. Wolffenbuttel, B. V. Drieenhuizen, 1992 .

Comparison of techniques for measuring both compressive and tensile stress in thin films

Reinoud F. Wolffenbuttel, P. J. French, Johannes F. L. Goosen, 1993 .

SLM device for 193nm lithographic applications

Luc Haspeslagh, Luoqi Chen, Ann Witvrouw, 2009 .

The development of a low-stress polysilicon process compatible with standard device processing

Pasqualina M. Sarro, Reinoud F. Wolffenbuttel, Patrick J. French, 1996 .