I. Ohlídal

发表

Ellipsometric Parameters of Rough Surfaces and of a System Substrate-Thin Film with Rough Boundaries

I. Ohlídal, F. Lukes̆, I. Ohlídal, 1972 .

IV: Scattering of Light from Multilayer Systems With Rough Boundaries

Miloslav Ohlídal, Ivan Ohlídal, Karel Navrátil, 1995 .

Approximate formulas for the reflectance, transmittance and scattering losses of nonabsorbing multilayer systems with randomly rough boundaries

I. Ohlídal, 1993 .

Ellipsometry of Layered Systems

I. Ohlídal, D. Franta, M. Cermák, 2018 .

3 - Ellipsometry of Thin Film Systems

Daniel Franta, Ivan Ohlídal, I. Ohlídal, 2000 .

Theoretical analysis of the atomic force microscopy characterization of columnar thin films.

Petr Klapetek, Ivan Ohlídal, I. Ohlídal, 2003, Ultramicroscopy.

Optical analysis of thin gold films by combined reflection and transmission ellipsometry

I. Ohlídal, F. Lukes̆, 1981 .

Complete optical analysis of a non-absorbing thin film on an absorbing substrate by a new method of immersion spectroscopic reflectometry

I. Ohlídal, K. Navrátil, 1987 .

The optical analysis of non-absorbing thin films with randomly rough boundaries by means of immersion spectrophotometry☆

I. Ohlídal, F. Lukes̆, K. Navrátil, 1979 .

Simultaneous determination of dispersion model parameters and local thickness of thin films by imaging spectrophotometry

I. Ohlídal, A. Majumdar, M. Ohlídal, 2015 .

Ellipsometric parameters of randomly rough surfaces

I. Ohlídal, F. Lukes̆, I. Ohlídal, 1972 .

Immersion ellipsometry of semiconductor surfaces

I. Ohlídal, M. Líbezný, 1990 .

Optical quantities of multi-layer systems with randomly rough boundaries calculated using the exact approach of the Rayleigh–Rice theory

I. Ohlídal, D. Franta, M. Cermák, 2018, Journal of Modern Optics.

Analysis of inhomogeneous thin films of ZrO2 by the combined optical method and atomic force microscopy

P. Pokorný, I. Ohlídal, M. Ohlídal, 2001 .

Influence of technological conditions on mechanical stresses inside diamond-like carbon films

I. Ohlídal, M. Ohlídal, V. Buršíková, 2005 .

A model of oxide film originating at thermal oxidation of GaAs

I. Ohlídal, F. Lukes̆, K. Navrátil, 1977 .

Measurement of the thickness distribution and optical constants of non-uniform thin films

I. Ohlídal, M. Ohlídal, D. Nečas, 2011 .

Optical properties of NiO thin films prepared by pulsed laser deposition technique

M. Guyot, L. Thomas, I. Ohlídal, 2005 .

Spectroscopic ellipsometry of inhomogeneous thin films exhibiting thickness non-uniformity and transition layers.

I. Ohlídal, V. Buršíková, D. Franta, 2020, Optics express.

Combination of spectroscopic ellipsometry and spectroscopic reflectometry with including light scattering in the optical characterization of randomly rough silicon surfaces covered by native oxide layers

I. Ohlídal, D. Franta, J. Vohánka, 2019, Surface Topography: Metrology and Properties.

Different theoretical approaches at optical characterization of randomly rough silicon surfaces covered with native oxide layers

I. Ohlídal, D. Franta, J. Mistrík, 2018 .

Multiple angle of incidence ellipsometric analysis of non-absorbing two-layer and three-layer systems

I. Ohlídal, A. Paneva, 1986 .

Temperature dependent dispersion models applicable in solid state physics

I. Ohlídal, D. Franta, J. Vohánka, 2019, Journal of Electrical Engineering.

Combined method of spectroscopic ellipsometry and photometry as an efficient tool for the optical characterisation of chalcogenide thin films

I. Ohlídal, M. Ohlídal, D. Nečas, 2009 .

Atomic force microscopy studies of cross-sections of columnar thin films

I. Ohlídal, P. Klapetek, J. Buršík, 2007 .

Optical characterization of TiO2 thin films by the combined method of spectroscopic ellipsometry and spectroscopic photometry

I. Ohlídal, D. Franta, D. Petrýdes, 2005 .

Determination of the optical parameters and packing density of non-absorbing columnar thin films by means of immersion reflectometry: Application to LiF thin films

I. Ohlídal, K. Navrátil, 1980 .

Immersion spectroscopic reflectometry of multilayer systems. II.

I. Ohlídal, K. Navrátil, V. Holý, 1988 .

Simple method for the complete optical analysis of very thick and weakly absorbing films

Ivan Ohlídal, I. Ohlídal, K. Navrátil, 1982 .

Broadening of dielectric response and sum rule conservation

I. Ohlídal, L. Zajíčková, D. Nečas, 2014 .

Complete Characterization of Rough Polymorphous Silicon Films by Atomic Force Microscopy and the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry

I. Ohlídal, P. Cabarrocas, P. Klapetek, 2004 .

Plasma-enhanced chemical vapour deposition of thin films from tetraethoxysilane and methanol: optical properties and XPS analyses

I. Ohlídal, J. Janca, L. Zajíčková, 1996 .

Colour properties of detuned alternating multilayer systems

I. Ohlídal, E. Schmidt, P. Strelec, 1992 .

Utilization of the sum rule for construction of advanced dispersion model of crystalline silicon containing interstitial oxygen

I. Ohlídal, L. Zajíčková, D. Nečas, 2014 .

Optical Characterization of Non-Stoichiometric Silicon Nitride Films Exhibiting Combined Defects

I. Ohlídal, P. Vašina, D. Franta, 2019, Coatings.

Optical properties of ZnTe films prepared by molecular beam epitaxy

I. Ohlídal, H. Sitter, P. Klapetek, 2004 .

Optical characterization of HfO2 thin films

Pavel Pokorný, David Nečas, Daniel Franta, 2011 .

Optical Characterization of Thin Films Exhibiting Defects

I. Ohlídal, J. Vohánka, M. Čermák, 2018 .

Optical characterization of randomly microrough surfaces covered with very thin overlayers using effective medium approximation and Rayleigh–Rice theory

I. Ohlídal, D. Franta, J. Vohánka, 2017 .

Optical properties of rough LaNiO3 thin films studied by spectroscopic ellipsometry and reflectometry

N. Dai, I. Ohlídal, G. Hu, 2005 .

Influence of overlayers on determination of the optical constants of ZnSe thin films

Petr Klapetek, Helmut Sitter, Daniel Franta, 2002 .

Thorium Fluoride (ThF4)

I. Ohlídal, K. Navrátil, 1991 .

Rough silicon surfaces studied by optical methods

I. Ohlídal, F. Lukes̆, K. Navrátil, 1974 .

Temperature-dependent dispersion model of float zone crystalline silicon

A. Giglia, I. Ohlídal, D. Franta, 2017 .

Determining shape of thickness non-uniformity using variable-angle spectroscopic ellipsometry

I. Ohlídal, V. Buršíková, D. Franta, 2020 .

Optics of Inhomogeneous Thin Films with Defects: Application to Optical Characterization

I. Ohlídal, J. Vohánka, M. Čermák, 2020, Coatings.

Ellipsometric characterization of inhomogeneous thin films with complicated thickness non-uniformity: application to inhomogeneous polymer-like thin films.

I. Ohlídal, V. Buršíková, J. Vohánka, 2020, Optics express.

Analysis of semiconductor surfaces with very thin native oxide layers by combined immersion and multiple angle of incidence ellipsometry

I. Ohlídal, F. Lukes̆, 1988 .

Influence of shadowing on ellipsometric quantities of randomly rough surfaces and thin films

I. Ohlídal, D. Nečas, 2008 .

Influence of the properties of thin films on the determination of the relative reflectance of a randomly rough surface

I. Ohlídal, K. Navrátil, 1976 .

Complete unambiguous optical characterization of double layers consisting of two strongly absorbing thin films by combined reflection and transmission ellipsometry.

I. Ohlídal, E. Schmidt, M. Líbezný, 1990, Applied optics.

Materials Pushing the Application Limits of Wire Grid Polarizers further into the Deep Ultraviolet Spectral Range

Adriana Szeghalmi, Ernst-Bernhard Kley, Kay Dietrich, 2016, 1607.04866.

Ellipsometric studies of polished silicon surfaces

I. Ohlídal, F. Lukes̆, M. Ohlídal, 1976 .

Influence of the atomic force microscope tip on the multifractal analysis of rough surfaces.

I. Ohlídal, P. Klapetek, J. Bílek, 2004, Ultramicroscopy.

Immersion spectroscopic reflectometry of multilayer systems. I. Theory

I. Ohlídal, 1988 .

Optical characterization of sol-gel deposited PZT thin films by spectroscopic ellipsometry and reflectometry in near-UV and visible regions

N. Dai, I. Ohlídal, G. Hu, 2005 .

Characterization of optical thin films exhibiting defects

Daniel Franta, Ivan Ohlídal, I. Ohlídal, 2005, SPIE Optical Systems Design.

Atomic Force Microscopy Analysis of Statistical Roughness of GaAs Surfaces Originated by Thermal Oxidation

I. Ohlídal, K. Navrátil, P. Klapetek, 2004 .

Characterization of the boundaries of thin films of TiO2 by atomic force microscopy and optical methods

I. Ohlídal, P. Klapetek, D. Franta, 2002 .

Optical characterization of diamond-like carbon films using multi-sample modification of variable angle spectroscopic ellipsometry

I. Ohlídal, J. Janca, L. Zajíčková, 2002 .

Ellipsometric parameters and reflectances of thin films with slightly rough boundaries

I. Ohlídal, D. Franta, 1998 .

Optical analysis of absorbing double layers by combined reflection and transmission ellipsometry

I. Ohlídal, F. Lukes̆, 1984 .

Approximations of reflection and transmission coefficients of inhomogeneous thin films based on multiple-beam interference model

I. Ohlídal, D. Franta, J. Mistrík, 2019 .

Approximate methods for the optical characterization of inhomogeneous thin films: Applications to silicon nitride films

I. Ohlídal, P. Vašina, D. Franta, 2019, Journal of Electrical Engineering.

Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

I. Ohlídal, V. Buršíková, D. Nečas, 2009 .

Optical characterization of non-stoichiometric silicon nitride films

J. Zemek, I. Ohlídal, D. Nečas, 2008 .

Comparison of dispersion models in the optical characterization of As–S chalcogenide thin films

I. Ohlídal, D. Franta, M. Šiler, 2006 .

Optical characterization of non-uniform thin films using imaging spectrophotometry

Petr Klapetek, Vladimir Cudek, Miloslav Ohlídal, 2005, SPIE Optical Systems Design.

New Method for the Complete Optical Analysis of Thin Films Nonuniform in Optical Parameters

I. Ohlídal, P. Klapetek, M. Eliás, 2003 .

Calculation of the optical quantities characterizing inhomogeneous thin films using a new mathematical procedure based on the matrix formalism and Drude approximation

Ivan Ohlidal, Daniel Franta, I. Ohlídal, 2001, Polish-Slovak-Czech Optical Conference on Wave and Quantum Aspects of Contemporary Optics.

Optical characterization of inhomogeneous thin films of ZrO2 by spectroscopic ellipsometry and spectroscopic reflectometry

Daniel Franta, Ivan Ohlídal, I. Ohlídal, 2000 .

Matrix formalism for imperfect thin films

Daniel Franta, Ivan Ohlídal, I. Ohlídal, 2000 .

Complete optical characterization of the SiO2/Si system by spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy

Emil Pinčík, Daniel Franta, Miloslav Ohlídal, 1999 .

Influence of defects of thin films on determining their thickness by the method based on white light interference

I. Ohlídal, J. Musilová, 1992 .

Possibilities and limitations of the film thickness determination method based on white light interference

I. Ohlídal, J. Musilová, 1990 .

Reflectance of multilayer systems with randomly rough boundaries

I. Ohlídal, 1989 .

Ellipsometric analysis of thin NiCr films

I. Ohlídal, I. Novotný, E. Schmidt, 1989 .

Optical analysis of inhomogeneous weakly absorbing thin films by spectroscopic reflectometry: Application to carbon films

I. Ohlídal, K. Navrátil, 1988 .

General formulae for the optical characterization of single layers with spectroscopic reflectometry

I. Ohlídal, 1988 .

A new method for the complete optical analysis of weakly absorbing thin films: application to polycrystalline silicon films

I. Ohlídal, K. Navrátil, J. Musilová, 1985 .

Optical analysis of non-absorbing double layers by means of immersion reflectometry II: Solid state immersion method

I. Ohlídal, K. Navrátil, 1980 .

Dispersion models describing interband electronic transitions combining Tauc's law and Lorentz model

I. Ohlídal, D. Franta, J. Vohánka, 2017 .

Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry

I. Ohlídal, V. Buršíková, D. Nečas, 2008 .

Expression for the reflectance of randomly rough surfaces derived with the Fresnel approximation.

I. Ohlídal, 1980, Applied optics.

Optical metrology of binary arrays of holes in semiconductor media using microspot spectroscopic ellipsometry

Ivan Ohlidal, Masahiro Horie, Tomuo Yamaguchi, 2005, SPIE Optical Systems Design.

Spectroscopic ellipsometry on sinusoidal surface-relief gratings

I. Ohlídal, R. Antoš, P. Klapetek, 2005 .

Specular spectroscopic ellipsometry for the critical dimension monitoring of gratings fabricated on a thick transparent plate

I. Ohlídal, K. Postava, R. Antoš, 2005 .

Correlation of thermal stability of the mechanical and optical properties of diamond-like carbon films

I. Ohlídal, P. Sťahel, V. Buršíková, 2007 .

Thermal stability of the optical properties of plasma deposited diamond-like carbon thin films

I. Ohlídal, V. Buršíková, L. Zajíčková, 2005 .

Spectroscopic ellipsometry on lamellar gratings

K. Murakami, I. Ohlídal, R. Antoš, 2005 .

Ellipsometric characterization of highly non-uniform thin films with the shape of thickness non-uniformity modeled by polynomials.

I. Ohlídal, V. Buršíková, D. Franta, 2020, Optics express.

Ellipsometric characterization of inhomogeneous non‐stoichiometric silicon nitride films

David Nečas, Daniel Franta, Ivan Ohlídal, 2013 .

Optical properties of diamond-like carbon films

Jan Janča, Ivan Ohlídal, I. Ohlídal, 1990 .

Optical measurement of mechanical stresses in diamond-like carbon films

Miloslav Ohlidal, Petr Klapetek, Ivan Ohlidal, 2005, Other Conferences.

Application of sum rule to the dispersion model of hydrogenated amorphous silicon

J. Stuchlík, I. Ohlídal, D. Chvostová, 2013 .

Optical Properties of Diamond-Like Carbon Films Containing SiOx Studied by the Combined Method of Spectroscopic Ellipsometry and Spectroscopic Reflectometry

I. Ohlídal, V. Buršíková, L. Zajíčková, 2004 .

Analysis of the basic statistical properties of randomly rough curved surfaces by shearing interferometry.

I. Ohlídal, K. Navrátil, 1985, Applied optics.

Ellipsometric and reflectometric characterization of thin films exhibiting thickness non-uniformity and boundary roughness

I. Ohlídal, D. Nečas, D. Franta, 2017 .

Simultaneous determination of optical constants, local thickness and roughness of ZnSe thin films by imaging spectroscopic reflectometry

I. Ohlídal, D. Nečas, D. Franta, 2015 .

Analysis of Slightly Rough Thin Films by Optical Methods and AFM

Petr Klapetek, Daniel Franta, Ivan Ohlídal, 2000, Microchimica Acta.

Comparison of effective medium approximation and Rayleigh–Rice theory concerning ellipsometric characterization of rough surfaces

Daniel Franta, Ivan Ohlídal, I. Ohlídal, 2005 .

Applications of scanning thermal microscopy in the analysis of the geometry of patterned structures

I. Ohlídal, J. Buršík, P. Klapetek, 2006 .

Optical characterization of thin films non‐uniform in thickness by a multiple‐wavelength reflectance method

Daniel Franta, Tomáš Králík, Miloslav Ohlídal, 2002 .

Characterization of non-uniform diamond-like carbon films by spectroscopic ellipsometry

I. Ohlídal, V. Buršíková, D. Nečas, 2009 .

Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films

I. Ohlídal, R. Antoš, M. Aoyama, 2005 .

Optical characterization of nonabsorbing and weakly absorbing thin films with the wavelengths related to extrema in spectral reflectances.

I. Ohlídal, K. Navrátil, D. Franta, 2001, Applied optics.

Determination of thicknesses and spectral dependences of refractive indices of non-absorbing and weakly absorbing thin films using the wavelengths related to extrema in spectral reflectances

I. Ohlídal, K. Navrátil, D. Franta, 2001 .

Universal dispersion model for characterization of optical thin films over a wide spectral range: application to hafnia.

David Nečas, Daniel Franta, Ivan Ohlídal, 2015, Applied optics.

Rubidium Iodide (RbI)

I. Ohlídal, D. Franta, 1997 .

Optical characterization of hafnia films deposited by ALD on copper cold-rolled sheets by difference ellipsometry

I. Ohlídal, D. Franta, M. Kotilainen, 2017 .

Expression of the optical constants of chalcogenide thin films using the new parameterization dispersion model

I. Ohlídal, D. Franta, M. Frumar, 2003 .

Possibilities and limitations of imaging spectroscopic reflectometry in optical characterization of thin films

Pavel Nádaský, Ivan Ohlidal, David Nečas, 2015, SPIE Optical Systems Design.

Assessment of non-uniform thin films using spectroscopic ellipsometry and imaging spectroscopic reflectometry

I. Ohlídal, L. Zajíčková, D. Nečas, 2014 .

Measurement of thickness distribution, optical constants, and roughness parameters of rough nonuniform ZnSe thin films.

I. Ohlídal, D. Nečas, D. Franta, 2014, Applied optics.

Optical characterisation of SiOxCyHz thin films non-uniform in thickness using spectroscopic ellipsometry, spectroscopic reflectometry and spectroscopic imaging reflectometry

I. Ohlídal, V. Buršíková, D. Nečas, 2011 .

Characterization of thin films nonuniform in optical parameters by spectroscopic digital reflectometry

Miloslav Ohlidal, Petr Klapetek, Ivan Ohlidal, 2004, SPIE Optics + Photonics.

Improved combination of scalar diffraction theory and Rayleigh–Rice theory and its application to spectroscopic ellipsometry of randomly rough surfaces

I. Ohlídal, D. Nečas, D. Franta, 2014 .

Advanced modeling for optical characterization of amorphous hydrogenated silicon films

J. Stuchlík, I. Ohlídal, L. Zajíčková, 2013 .

Optical characterization of thin films with randomly rough boundaries using the photovoltage method

I. Ohlídal, H. Sitter, D. Franta, 2000 .

OPTICAL PARAMETER ANALYSIS OF THIN ABSORBING FILMS MEASURED BY THE PHOTOVOLTAGE METHOD

I. Ohlídal, H. Sitter, J. Hlávka, 1998 .

New technique of measurement of optical parameters of thin films

I. Ohlídal, H. Sitter, J. Hlávka, 1996 .

Dispersion model of two-phonon absorption: application to c-Si

I. Ohlídal, L. Zajíčková, D. Nečas, 2014 .

Atomic Force Microscopy Characterization of ZnTe Epitaxial Thin Films

I. Ohlídal, H. Sitter, P. Klapetek, 2003 .

Mechanical stresses studied by optical methods in diamond-like carbon films containing Si and O

Martin Siler, Miloslav Ohlidal, Ivan Ohlidal, 2004, SPIE Optics + Photonics.

Consolidated series for efficient calculation of the reflection and transmission in rough multilayers.

I. Ohlídal, D. Nečas, 2014, Optics express.

Use of the Richardson extrapolation in optics of inhomogeneous layers: Application to optical characterization

I. Ohlídal, P. Vašina, D. Franta, 2018, Surface and Interface Analysis.

Reflection of Light by a System of Nonabsorbing Isotropic Film–Nonabsorbing Isotropic Substrate with Randomly Rough Boundaries

I. Ohlídal, F. Lukes̆, K. Navrátil, 1971 .

Reflection of light on a system of non-absorbing isotropic film-non-absorbing isotropic substrate with rough boundaries

I. Ohlídal, F. Lukes̆, K. Navrátil, 1971 .