C. T. Hsuan

A novel decomposition of source kernel for OPC modeling

Chih-Yuan Lu, C. T. Hsuan, T. S. Wu, 2010, Advanced Lithography.

Multiple-step process window aware OPC for hyper-NA lithography

Chih-Yuan Lu, C. T. Hsuan, Fred Lo, 2013, Advanced Lithography.

Adaptive OPC approach based on pattern grouping algorithm

Chih-Yuan Lu, C. T. Hsuan, Fred Lo, 2014, Advanced Lithography.