Richard Tiberio

Cross-sectional imaging of directed self-assembly block copolymers

Hon-Sum Philip Wong, He Yi, Roel Gronheid, 2015, Advanced Lithography.

Design strategy of small topographical guiding templates for sub-15nm integrated circuits contact hole patterns using block copolymer directed self assembly

H.-S. Philip Wong, He Yi, Richard Tiberio, 2013, Advanced Lithography.

Contact-hole patterning for random logic circuits using block copolymer directed self-assembly

H.-S. Philip Wong, Jie Zhang, He Yi, 2012, Advanced Lithography.

A general design strategy for block copolymer directed self-assembly patterning of integrated circuits contact holes using an alphabet approach.

Richard Tiberio, H. Wong, X. Bao, 2015, Nano letters.

Standard test targets for high-resolution light microscopy

Andreas Stemmer, Richard Tiberio, Rudolf Oldenbourg, 2008 .

Template Patterning: Flexible Control of Block Copolymer Directed Self-Assembly using Small, Topographical Templates: Potential Lithography Solution for Integrated Circuit Contact Hole Patterning (Adv. Mater. 23/2012)

H.-S. Philip Wong, Huixiong Dai, Yongmei Chen, 2012 .