Y. Suzuki

发表

Micromachined High-Aspect-Ratio Parylene Spring and Its Application to Low-Frequency Accelerometers

Y. Tai, Y. Suzuki, Y.-C. Tai, 2006, Journal of Microelectromechanical Systems.

A high aspect ratio MEMS process with surface micromachined polysilicon for high accuracy inertial sensing

A. Geisberger, Y. Suzuki, S. Schroeder, 2013, 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).