O. Shimada

Fabrication of mold master for spiral micro-coil utilizing X-ray lithography of synchrotron radiation

T. Hattori, H. Mekaru, S. Kusumi, 2003, Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference.

High‐density Multichip Module by Chip‐on‐Wafer Technology

T. Sudo, Takeshi Miyagi, T. Miyagi, 1988 .

Crystallographic investigation of aluminium nitride thin films on stainless steel foil for highly efficient piezoelectric vibration energy harvesters

N. Moriwaki, O. Shimada, L. Minh, 2016 .

On the Doping Efficiency of Ga or Sb into Silicon Epitaxial Films grown by Part Ionized Vapor Deposition

O. Shimada, T. Itoh, T. Sugiyama, 1978 .

Fabrication of a spiral microcoil using a 3D-LIGA process

T. Hattori, H. Mekaru, S. Kusumi, 2006 .