J. Baborowski

发表

Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films

Paul Muralt, J. Baborowski, P. Muralt, 2004 .

Study of PZT coated membrane structures for micromachined ultrasonic transducers [medical imaging]

W. Steichen, J. Baborowski, A. Bosseboeuf, 2001, 2001 IEEE Ultrasonics Symposium. Proceedings. An International Symposium (Cat. No.01CH37263).

Piezoelectric Micromachined Ultrasonic Transducers Based on PZT Films

Nicolas Ledermann, Paul Muralt, J. Baborowski, 2002 .

Piezoelectric micromachined transducers (PMUT's) based on PZT thin films

Nicolas Ledermann, Paul Muralt, J. Baborowski, 2002, 2002 IEEE Ultrasonics Symposium, 2002. Proceedings..

Piezoelectric Pb(Zrx, Ti1−x)O3 thin film cantilever and bridge acoustic sensors for miniaturized photoacoustic gas detectors

Nicolas Ledermann, Paul Muralt, J. Baborowski, 2004 .

Microfabrication of Piezoelectric MEMS

J. Baborowski, 2004 .

Size-Effect in Mesoscopic Epitaxial Ferroelectric Structures: Increase of Piezoelectric Response with Decreasing Feature-Size

P. Muralt, J. Baborowski, B. Dwir, 2002 .

{1 0 0}-Textured, piezoelectric Pb(Zrx, Ti1−x)O3 thin films for MEMS: integration, deposition and properties

Nicolas Ledermann, Paul Muralt, Nava Setter, 2003 .

Wafer level packaging technology for silicon resonators

R. J. James, J. Baborowski, A. Pezous, 2009 .

A miniature timing microsystem using two silicon resonators

K. Zoschke, J. Baborowski, T. Pensala, 2013, 2013 Joint European Frequency and Time Forum & International Frequency Control Symposium (EFTF/IFC).

Microfabrication of Piezoelectric MEMS

J. Baborowski, 2004 .

Integration of Piezoelectric Pb(ZrxTi1-x)O3 (PZT) Thin Films into Micromachined Sensors and Actuators

P. Muralt, J. Baborowski, S. Gentil, 2002 .

Smart skin for tactile prosthetics

C. Enz, J. Baborowski, C. Antfolk, 2012, 2012 6th International Symposium on Medical Information and Communication Technology (ISMICT).

Effect of the nature of the working gas on the d.c. magnetron sputter deposition of chromium nitride and oxi-nitride thin films on steel substrates

J. Baborowski, M. Charbonnier, M. Romand, 1996 .

Size effect in mesoscopic epitaxial ferroelectric structures: Increase of piezoelectric response with decreasing feature size

Paul Muralt, Benjamin Dwir, J. Baborowski, 2002 .

Sputtered silicon carbide thin films as protective coating for MEMS applications

Nicolas Ledermann, Paul Muralt, J. Baborowski, 2000 .

Active isolation of electronic micro-components with piezoelectrically transduced silicon MEMS devices

Manuel Collet, Paul Muralt, Thierry Verdot, 2007 .

Downscaling of Pb(Zr,Ti)O3 film thickness for low-voltage ferroelectric capacitors: Effect of charge relaxation at the interfaces

A. Tagantsev, N. Setter, I. Stolichnov, 2000 .

Building Blocks for an Ultra Low-Power MEMS-based Radio

D. Ruffieux, J. Chabloz, C.C. Enz, 2007, 2007 IEEE International Workshop on Radio-Frequency Integration Technology.

Ultra low-power MEMS-based radio for wireless sensor networks

Martin Kucera, Claude Müller, Jérémie Chabloz, 2007, 2007 18th European Conference on Circuit Theory and Design.

Ultra Low-Power MEMS-based Radio for Wireless Sensor Networks (Invited Paper)

Christian Enz, Jacek Baborowski, Martin Kucera, 2007 .

The effect of bottom electrode on the performance of thin film based capacitors in the gigahertz region

N. Setter, P. Muralt, J. Baborowski, 1999 .

Mechanisms of Pb(zr0.53Ti0.47)O3 thin film etching with ECR/RF reactor

Nicolas Ledermann, Paul Muralt, Nava Setter, 2000 .

Simulation And Characterization Of Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) Based On Pzt/Soi Membranes

Jacek Baborowski, Nicolas Ledermann, Paul Muralt, 2003, Int. J. Comput. Eng. Sci..

PZT coated membrane structures for micromachined ultrasonic transducers

J. Baborowski, A. Bosseboeuf, P. Gaucher, 2002, Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002..

Piezoelectric cantilever microphone for photoacoustic gas detector

Nicolas Ledermann, Paul Muralt, Nava Setter, 2001 .

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

A. Barzegar, A. Bosseboeuf, P. Muralt, 2005, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.

Local growth of sol-gel films by means of microhotplates

Jacek Baborowski, Nicolas Ledermann, Paul Muralt, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

Evaluation of silicon tuning fork resonators under mechanical loads and space-relevant radiation conditions

Herbert Shea, Jacek Baborowski, Alex Dommann, 2014 .

Evaluation of silicon tuning-fork resonators under space-relevant radiation conditions

Herbert Shea, Alex Dommann, A. Neels, 2014, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

Optimization of the fabrication of sealed capacitive transducers using surface micromachining

Paul Muralt, Daniel Alquier, J. Baborowski, 2004 .

Processing optimization of solution derived PbZr1−xTixO3 thin films for piezoelectric applications

Nicolas Ledermann, Paul Muralt, Nava Setter, 2001 .