Karen D. Badger
发表
Richard Wistrom,
Shinpei Kondo,
Kazunori Seki,
2010,
Photomask Technology.
Emily Gallagher,
Mark Lawliss,
Karen D. Badger,
2008,
Photomask Technology.
Evaluation of non-actinic EUV mask inspection and defect printability on multiple EUV mask absorbers
Kazunori Seki,
Emily Gallagher,
Toshio Konishi,
2013,
Photomask and Next Generation Lithography Mask Technology.
Take a byte out of MEEF: VAMPIRE: Vehicle for Advanced Mask Pattern Inspection Readiness Evaluations
Kazunori Seki,
Christina Turley,
Dan J. Dechene,
2016,
Photomask Technology.
Hongqin Zhang,
Emily Gallagher,
Mark Lawliss,
2008,
Photomask Technology.
Yasutaka Kikuchi,
Emily Gallagher,
Hidehiro Ikeda,
2007,
Photomask Japan.
Kazunori Seki,
Ian Stobert,
Dan J. Dechene,
2013,
Photomask Technology.
Kazunori Seki,
Shinji Akima,
Dan J. Dechene,
2016,
Photomask Technology.
Richard Wistrom,
Yoshifumi Sakamoto,
Takeshi Isogawa,
2016,
Photomask Japan.
Kazunori Seki,
Trent Hutchinson,
Karen D. Badger,
2015,
SPIE Photomask Technology.
Scott Halle,
Ravi Bonam,
Fei Wang,
2016,
SPIE Advanced Lithography.
Takeshi Isogawa,
Kazunori Seki,
Toshio Konishi,
2018
.
Ian Stobert,
Gek Soon Chua,
Karen D. Badger,
2019
.
Kazunori Seki,
Karen D. Badger,
2011,
Photomask Technology.
Karen D. Badger,
Brian J. Grenon,
Michael J. Trybendis,
1992,
Other Conferences.
Takeshi Isogawa,
Kazunori Seki,
Toshio Konishi,
2018,
Photomask Japan.
Richard Wistrom,
Kazunori Seki,
Tom Faure,
2011,
Photomask Technology.
Andrew J. Watts,
Tom Faure,
Karen D. Badger,
2005,
SPIE Advanced Lithography.
Kazunori Seki,
Emily Gallagher,
Toshio Konishi,
2013,
Photomask Technology.
Takeshi Isogawa,
Masayuki Kagawa,
Karen D. Badger,
2018,
Photomask Technology.