G. Zschaetzsch

FinFETs and Their Futures

N. Horiguchi, N. Collaert, A. Veloso, 2011 .

Atom Probe Tomography for 3D-dopant analysis in FinFET devices

N. Horiguchi, M. Togo, W. Vandervorst, 2012, 2012 Symposium on VLSI Technology (VLSIT).

Direct imaging of 3D atomic-scale dopant-defect clustering processes in ion-implanted silicon.

O. Richard, H. Bender, W. Vandervorst, 2013, Nano letters.