R. Silver

发表

Richard M. Silver, Theodore V. Vorburger, Boris Brodmann, 2011 .

Combining model-based measurement results of critical dimensions from multiple tools

Bryan M. Barnes, Richard M. Silver, Nien Fan Zhang, 2017 .

Assessing Form-Dependent Optical Scattering at Vacuum- and Extreme-Ultraviolet Wavelengths of Nanostructures with Two-Dimensional Periodicity

R. Silver, B. Barnes, Hui Zhou, 2019, Physical Review Applied.

Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy.

R. Silver, B. Barnes, M. Sohn, 2018, Optik.

Dependence of morphology on miscut angle for Si(111) etched in NH4F

Satoshi Gonda, Richard M. Silver, Hui Zhou, 2003 .

Time-resolved kinetic monte-carlo simulation study on Si (111) etching

Richard M. Silver, Hui Zhou, Joseph Fu, 2007 .

Linewidth measurement technique using through-focus optical images.

R. Silver, R. Dixson, R. Attota, 2008, Applied optics.

The study of silicon stepped surfaces as atomic force microscope calibration standards with a calibrated AFM at NIST

T. Vorburger, Joseph Fu, R. Silver, 1998 .

High Accuracy Overlay Measurements | NIST

James E. Potzick, Richard M. Silver, Robert D. Larrabee, 1996 .

Use of Bayesian Statistics to Improve Optical Measurement Uncertainty by Combined Multi-Tool Metrology

Hui Zhou, Bryan M. Barnes, Richard M. Silver, 2015 .

Metrology, Inspection, and Process Control for Microlithography XVIII

Richard M. Silver, R. Silver, 2005 .

Optimizing the nanoscale quantitative optical imaging of subfield scattering targets.

Mark-Alexander Henn, Hui Zhou, Bryan M Barnes, 2016, Optics letters.

Controlled formation of atomic step morphology on micropatterned Si (100)

G. Stan, Joseph Fu, R. Silver, 2011 .

Sputter deposition of YBa2Cu3O7−y thin films

J. Talvacchio, R. Silver, A. D. Lozanne, 1987 .

Development of large aperture projection scatterometry for catalyst loading evaluation in proton exchange membrane fuel cells

R. Silver, B. Barnes, M. Sohn, 2017 .

Nanoparticle size and shape evaluation using the TSOM optical microscopy method

A. Vladár, R. Silver, R. Attota, 2010 .

Nanofabrication and characterization using a scanning tunneling microscope

J. Dagata, R. Silver, J. Schneir, 1993 .

Experimental realization of an extended Fermi-Hubbard model using a 2D lattice of dopant-based quantum dots

R. Silver, G. Bryant, E. Khatami, 2021, Nature Communications.

Measurement sensitivity of DUV scatterfield microscopy parameterized with partial coherence for duty ratio-varied periodic nanofeatures

R. Silver, B. Barnes, M. Sohn, 2022, Optics and Lasers in Engineering.

Enhanced Atomic Precision Fabrication by Adsorption of Phosphine into Engineered Dangling Bonds on H-Si Using STM and DFT.

R. Silver, Pradeep Namboodiri, R. Kashid, 2021, ACS nano.

Quantifying atom-scale dopant movement and electrical activation in Si:P monolayers.

C. Richter, R. Silver, R. Murray, 2017, Nanoscale.

Spatially resolved scanning tunneling spectroscopy of single-layer steps on Si(100) surfaces

R. Silver, Pradeep Namboodiri, Xiao Deng, 2016 .

As-deposited superconducting Y-Ba-Cu-O thin films on Si, Al2O3, and SrTiO3 substrates

R. Silver, A. D. Lozanne, A. B. Berezin, 1988 .

Electron-electron interactions in low-dimensional Si:P delta layers

C. Richter, R. Silver, S. Schmucker, 2020 .

High resolution thickness measurements of ultrathin Si:P monolayers using weak localization

C. Richter, R. Silver, R. Murray, 2018 .

Atomically Traceable Nanostructure Fabrication.

W. R. Owen, D. Jaeger, Y. Chabal, 2015, Journal of visualized experiments : JoVE.

Pattern transfer of hydrogen depassivation lithography patterns into silicon with atomically traceable placement and size control

Kai Li, Robert M. Wallace, Richard M. Silver, 2014 .

Multiple-order imaging for optical critical dimension metrology using microscope characterization

Hui Zhou, Jing Qin, Bryan M. Barnes, 2012, Other Conferences.

Quantitative microscope characterization for optical measurements with sub-nm parametric uncertainties

Jing Qin, Bryan M. Barnes, Richard M. Silver, 2013, Optics & Photonics - NanoScience + Engineering.

Improving optical measurement uncertainty with combined multitool metrology using a Bayesian approach.

Hui Zhou, Nien Fan Zhang, Richard M Silver, 2012, Applied optics.

Phase sensitive parametric optical metrology: exploring the limits of three-dimensional optical metrology

Jing Qin, Bryan M. Barnes, Ronald G. Dixson, 2012, Advanced Lithography.

Nested uncertainties and hybrid metrology to improve measurement accuracy

Hui Zhou, Jing Qin, Bryan M. Barnes, 2011, Advanced Lithography.

Characterizing a scatterfield optical platform for semiconductor metrology

Bryan M. Barnes, Richard M. Silver, Yeung Joon Sohn, 2011 .

Improving optical measurement accuracy using multi-technique nested uncertainties

Hui Zhou, Bryan M. Barnes, Ronald G. Dixson, 2009, Advanced Lithography.

Optical critical dimension measurement of silicon grating targets using back focal plane scatterfield microscopy

Heather Patrick, Bryan M. Barnes, Ronald G. Dixson, 2008 .

Scatterfield microscopy for extending the limits of image-based optical metrology.

Egon Marx, Jay Jun, Ravikiran Attota, 2007, Applied optics.

Zero-order imaging of device-sized overlay targets using scatterfield microscopy

Bryan M. Barnes, Richard M. Silver, Pete Lipscomb, 2007, SPIE Advanced Lithography.

Köhler illumination for high-resolution optical metrology

Richard M. Silver, Lowell P. Howard, Yeung Joon Sohn, 2006, SPIE Advanced Lithography.

Koehler Illumination for High-Resolution Optical Metrology | NIST

L. Howard, R. Silver, B. Barnes, 2006 .

USE OF A BAYESIAN APPROACH TO IMPROVE UNCERTAINTY OF MODEL-BASED MEASUREMENTS BY HYBRID MULTI-TOOL METROLOGY

Hui Zhou, Bryan M. Barnes, Nien Fan Zhang, 2015 .

A Macro-Micro Motion System for a STM

Hui Zhou, James D. Gilsinn, Richard M. Silver, 2002 .

STM patterned nanowire measurements using photolithographically defined implants in Si(100)

R. Silver, Hyun-Soo Kim, Hyunsoo Kim, 2018, Scientific Reports.

Silicon epitaxy on H-terminated Si (100) surfaces at 250 °C.

Xinbin Cheng, G. Stan, Tongbao Li, 2016, Applied surface science.

Electron probe microanalysis of silicon and the role of the macrophage in proximal (capsule) and distant sites in augmentation mammaplasty patients.

R. Silver, W. Greene, R. Harley, 1995, Plastic and reconstructive surgery.

Properties of in-situ superconducting thin films of Y-Ba-Cu-O on Si, Al/sub 2/O/sub 3/, and SrTiO/sub 3/ substrates

E. Ogawa, R. Silver, A. D. Lozanne, 1989 .

Properties of Y-Ba-Cu-O Thin Films Grown in-Situ at Low Temperatures by Co-Evaporation and Plasma Oxidation

E. Ogawa, R. Silver, S. Pan, 1989 .

Atom‐by‐Atom Fabrication of Single and Few Dopant Quantum Devices

C. Richter, R. Silver, G. Bryant, 2019, Advanced Functional Materials.

Direct writing of submicron metallic features with a scanning tunneling microscope

R. Silver, E. Ehrichs, A. D. Lozanne, 1987 .

Atomic-scale control of tunneling in donor-based devices

R. Silver, S. Schmucker, Pradeep Namboodiri, 2020 .

Ambient and vacuum scanning tunneling spectroscopy of sulfur‐ and oxygen‐terminated gallium arsenide

J. Dagata, R. Silver, W. Tseng, 1994 .

Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

Hui Zhou, András E. Vladár, Bryan M. Barnes, 2015 .

Enhanced model for scanning tunneling microscope tip geometry measured with field ion microscopy

Carsten P. Jensen, Richard M. Silver, P. V. Rao, 2004 .

Damping mechanisms for precision applications in UHV environment | NIST

Richard M. Silver, R. Ryan Vallance, Bradley N. Damazo, 2006 .

Developing an uncertainty analysis for optical scatterometry

Heather Patrick, Richard M. Silver, Benjamin Bunday, 2009, Advanced Lithography.

Atomic-scale control of tunneling in donor-based devices

R. Silver, S. Schmucker, Pradeep Namboodiri, 2020, Communications Physics.

Atomic-scale Control of Tunnel Coupling.

Jr., R. Silver, N. Zimmerman, 2019, 1905.00132.

Low-Resistance, High-Yield Electrical Contacts to Atom Scale Si:P Devices Using Palladium Silicide.

J. Schumacher, R. Silver, S. Schmucker, 2019, Physical review applied.

Atom-by-Atom Construction of a Cyclic Artificial Molecule in Silicon.

R. Silver, S. Schmucker, Pradeep Namboodiri, 2018, Nano letters.

Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Hui Zhou, Nien Fan Zhang, Mark-Alexander Henn, 2015, Journal of micro/nanolithography, MEMS, and MOEMS : JM3.

Optimizing hybrid metrology: rigorous implementation of Bayesian and combined regression

Hui Zhou, Bryan M. Barnes, Nien Fan Zhang, 2015, Advanced Lithography.

Fourier domain optical tool normalization for quantitative parametric image reconstruction.

Hui Zhou, Jing Qin, Francois Goasmat, 2013, Applied optics.

Fundamental limits of optical critical dimension metrology: a simulation study

Egon Marx, Bryan M. Barnes, Benjamin Bunday, 2007, SPIE Advanced Lithography.

Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Mark-Alexander Henn, Hui Zhou, Bryan M Barnes, 2016, Light: Science & Applications.

Overlay metrology simulations: analytical and experimental validations

Richard M. Silver, Joel L. Seligson, Jorge M. Poplawski, 2003, SPIE Advanced Lithography.

Distributed force probe bending model of critical dimension atomic force microscopy bias

Ndubuisi G. Orji, Ronald G. Dixson, Richard M. Silver, 2013 .

In-situ formation of BSCCO thin films by plasma assisted thermal evaporation

E. Ogawa, R. Silver, S. Pan, 1991 .

Experimental realization of an extended Fermi-Hubbard model using a 2D lattice of dopant-based quantum dots

R. Silver, G. Bryant, E. Khatami, 2022, Nature Communications.

Development of ballistics identification—from image comparison to topography measurement in surface metrology

Wei Chu, Theodore V. Vorburger, M Ols, 2012 .

Enhanced Atomic Precision Fabrication by Adsorption of Phosphine into Engineered Dangling Bonds on H-Si Using Scanning Tunneling Microscopy and Density Functional Theory

R. Silver, Pradeep Namboodiri, R. Kashid, 2021 .

Selecting Valid Correlation Areas for Automated Bullet Identification System Based on Striation Detection

Wei Chu, Theodore V. Vorburger, John Song, 2011, Journal of research of the National Institute of Standards and Technology.

Applications of machine learning at the limits of form-dependent scattering for defect metrology

Bryan M. Barnes, Mark-Alexander Henn, Hui Zhou, 2019, Advanced Lithography.

Method to characterize overlay tool misalignments and distortions

James E. Potzick, Christopher J. Evans, Richard M. Silver, 1997, Advanced Lithography.

A macro-micro motion system for a scanning tunneling microscope

Hui Zhou, James D. Gilsinn, Bradley N. Damazo, 2002, Proceedings of the 5th Biannual World Automation Congress.

The limits of image-based optical metrology

Egon Marx, Heather Patrick, Bryan M. Barnes, 2006, SPIE Advanced Lithography.

Supplementing rigorous electromagnetic modeling with atomistic simulations for optics-based metrology

Bryan M. Barnes, Richard M. Silver, Mark-Alexander Henn, 2019, Optical Metrology.