K. Park

Conformal metal oxide coatings on nanotubes by direct low temperature metal-organic pyrolysis in supercritical carbon dioxide

G. Parsons, Joseph C. Spagnola, Qing Peng, 2008 .

Process integration of iALD TaN for advanced Cu interconnects

S. Gopinath, V. Lu, G. Dixit, 2011, 2011 IEEE International Interconnect Technology Conference.

Atomic layer deposition of conformal inorganic nanoscale coatings on three-dimensional natural fiber systems: effect of surface topology on film growth characteristics.

G. Parsons, J. Hinestroza, K. Park, 2007, Langmuir : the ACS journal of surfaces and colloids.

Atomic layer deposition of Ru onto organic monolayers: Shifting metal effective work function using monolayer structure

G. Parsons, K. Park, 2012 .

In situ auger electron spectroscopy study of atomic layer deposition: growth initiation and interface formation reactions during ruthenium ALD on Si-H, SiO2, and HfO2 surfaces.

G. Parsons, K. Park, S. Stewart, 2007, Langmuir : the ACS journal of surfaces and colloids.

Low temperature metal oxide film deposition and reaction kinetics in supercritical carbon dioxide

G. Parsons, Qing Peng, K. Park, 2008 .

Bulk and interface charge in low temperature silicon nitride for thin film transistors on plastic substrates

G. Parsons, K. Park, 2004 .