Sung-ki Park

发表

Self-patterned aluminium interconnects and ring electrodes for arrays of microcavity plasma devices encapsulated in Al2O3

J. Eden, K. Kim, Sung-ki Park, 2008 .

Tungsten-dual polymetal technology for low resistive gate electrode

M. Sung, Yong Soo Kim, Sung-ki Park, 2010 .

A novel three-dimensional dual control-gate with surrounding floating-gate (DC-SF) NAND flash cell

Sungki Park, Seiichi Aritome, Sung-Joo Hong, 2013 .

Low resistive tungsten dual poly-metal gates with multi-diffusion barrier metals in high performance memory devices

Yong Soo Kim, M. Sung, Sung-ki Park, 2012 .

Comparative study of DRAM cell patterning between ArF immersion and EUV lithography

Sunyoung Koo, Jun-Taek Park, Chang-Moon Lim, 2009, Advanced Lithography.

Cobalt Silicidation on Sub 100nm Hole Patterned Vertical Diode Formed by Silicon Epitaxial Growth and Its Electrical Properties

H. Kang, Sung-ki Park, Il Keun Han, 2008 .

Investigation of plasma-doped fin structure and characterization of dopants by atom probe tomography

C. Park, Sungmin Park, Sung-ki Park, 2012 .

Effects of CH 2 F 2 Addition on a High Aspect Ratio Contact Hole Etching in a C 4 F 6 / O 2 / Ar Plasma

Sung-ki Park, Chang-Koo Kim, Byung-Seok Lee, 2003 .

CD uniformity optimization at volume ramp up stage for new product introduction

Won-Kwang Ma, Greet Storms, Jin-Soo Kim, 2014, Advanced Lithography.

Overlay metrology for low-k1: challenges and solutions

Jeongsu Park, Eric Janda, Donggyu Yim, 2012, Advanced Lithography.

Challenges in high-aspect ratio contact (HARC) etching for DRAM capacitor formation

Sungki Park, Yongjin Kim, Noh-Jung Kwak, 2015, Advanced Lithography.

Patterning with spacer for expanding the resolution limit of current lithography tool

Sungki Park, Wooyung Jung, Choi-Dong Kim, 2006, SPIE Advanced Lithography.