S. Bentley

发表

Electron Mobility in Surface- and Buried-Channel Flatband $\hbox{In}_{0.53}\hbox{Ga}_{0.47}\hbox{As}$ MOSFETs With ALD $\hbox{Al}_{2}\hbox{O}_{3}$ Gate Dielectric

A. Asenov, M. Holland, P. McIntyre, 2011, IEEE Electron Device Letters.

Low damage fully self-aligned replacement gate process for fabricating deep sub-100 nm gate length GaAs metal-oxide-semiconductor field-effect transistors

M. Holland, I. Thayne, S. Thoms, 2010 .

Growth of strained InGaSb quantum wells for p-FET on Si: Defects, interfaces, and electrical properties

V. Tokranov, M. Yakimov, S. Oktyabrsky, 2014 .

Electrical properties related to growth defects in metamorphic GaSb films on Si

V. Tokranov, M. Yakimov, S. Oktyabrsky, 2017 .

GaSb on Si: Structural Defects and Their Effect on Surface Morphology and Electrical Properties

V. Tokranov, M. Yakimov, S. Oktyabrsky, 2014 .

Copper-plated 50 nm T-gate fabrication

I. Thayne, R. Oxland, S. Ferguson, 2010 .

Fabrication of 22nm T-gates for HEMT applications

I. Thayne, Xu Li, S. Bentley, 2008 .

Two methods of realising 10nm T-gate lithography

I. Thayne, Xu Li, S. Bentley, 2009 .

Admittance and subthreshold characteristics of atomic-layer-deposition Al2O3 on In0.53Ga0.47As in surface and buried channel flatband metal-oxide-semiconductor field effect transistors

M. Holland, P. McIntyre, I. Thayne, 2012 .

Electrical characteristics of gadolinium gallium oxide/gallium oxide insulators on GaAs and In0.53Ga0.47As in metal-oxide-semiconductor field effect transistors - admittance and subthreshold characteristics

M. Holland, I. Thayne, S. Bentley, 2011 .

Gadolinium gallium oxide/gallium oxide insulators on GaAs and In0.53Ga0.47As n+ MOS capacitors: The interface state model and beyond

M. Holland, I. Thayne, S. Bentley, 2011 .

Technology viable DC performance elements for Si/SiGe channel CMOS FinFTT

Jie Yang, Terence B. Hook, Andreas Knorr, 2016, 2016 IEEE International Electron Devices Meeting (IEDM).

CMP Challenges for Advanced Technology Nodes beyond Si

R. Patlolla, D. Canaperi, W. Kleemeier, 2017 .