Yicheng Li

Atomic level deposition to extend Moore’s law and beyond

K. Cao, Han-Bo-Ram Lee, Rong Chen, 2020, International Journal of Extreme Manufacturing.

Surface Acidity-Induced Inherently Selective Atomic Layer Deposition of Tantalum Oxide on Dielectrics

K. Cao, B. Shan, Rong Chen, 2022, Chemistry of Materials.

Advances in Atomic Layer Deposition

K. Cao, Yicheng Li, Rong Chen, 2022, Nanomanufacturing and Metrology.

Interface-mediated ferroelectricity in PMN-PT/PZT flexible bilayer via pulsed laser deposition

K. Cao, Yicheng Li, Rong Chen, 2023, Journal of Vacuum Science & Technology A.

Inherently Area-Selective Atomic Layer Deposition of Manganese Oxide through Electronegativity-Induced Adsorption

K. Cao, B. Shan, Rong Chen, 2021, Molecules.

Selectivity dependence of atomic layer deposited manganese oxide on the precursor ligands on platinum facets

K. Cao, B. Shan, Rong Chen, 2023, Journal of Vacuum Science & Technology A.

Highly dispersed Fe-decorated Ni nanoparticles prepared by atomic layer deposition for dry reforming of methane

K. Cao, B. Shan, Rong Chen, 2023, International Journal of Hydrogen Energy.

Self-aligned patterning of tantalum oxide on Cu/SiO2 through redox-coupled inherently selective atomic layer deposition

K. Cao, Rong Chen, Yicheng Li, 2023, Nature communications.