S. King

发表

Dielectric Barrier, Etch Stop, and Metal Capping Materials for State of the Art and beyond Metal Interconnects

S. King, 2015 .

Narrowing of the Boolchand intermediate phase window for amorphous hydrogenated silicon carbide

W. Lanford, S. King, L. Ross, 2018, Journal of Non-Crystalline Solids.

Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-k Dielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride

S. Banerjee, W. Lanford, Liyi Li, 2017 .

Review—Beyond the Highs and Lows: A Perspective on the Future of Dielectrics Research for Nanoelectronic Devices

J. F. Conley, M. Orlowski, Liudi Jiang, 2019, ECS Journal of Solid State Science and Technology.

Investigation of the impact of insulator material on the performance of dissimilar electrode metal-insulator-metal diodes

J. F. Conley, S. King, N. Alimardani, 2014 .

Thermal conductivity and sound velocity measurements of plasma enhanced chemical vapor deposited a-SiC:H thin films

Lauren R. Olasov, Donald B. Hondongwa, B. C. Daly, 2011 .

Ex Situ and in Situ Methods for Oxide and Carbon Removal from AlN and GaN Surfaces

J. Ku, R. Davis, R. Nemanich, 1995 .

Cleaning of GaN surfaces

Robert F. Davis, Sean W. King, Robert Nemanich, 1996 .

Full Characterization of the Mechanical Properties of 11-50 nm Ultrathin Films: Influence of Network Connectivity on the Poisson's Ratio.

Weilun Chao, Damiano Nardi, Marie Tripp, 2017, Nano letters.

A method to extract absorption coefficient of thin films from transmission spectra of the films on thick substrates

S. King, M. Milosevic, 2012 .

Validation of a correction procedure for removing the optical effects from transmission spectra of thin films on substrates

S. King, M. Milosevic, 2012 .

Spectroscopic method for measuring refractive index.

S. King, M. Milosevic, 2013, Applied optics.

Tunable plasticity in amorphous silicon carbide films.

R. Dauskardt, J. Bielefeld, S. King, 2013, ACS applied materials & interfaces.

Measurement of the vacuum-ultraviolet absorption spectrum of low-k dielectrics using X-ray reflectivity

Y. Nishi, S. King, Chih‐Hao Lee, 2018 .

X-ray photoelectron spectroscopy investigation of the valence band offset at beryllium oxide-diamond interfaces

S. Banerjee, S.K. Banerjee, M. Kuhn, 2020, Diamond and Related Materials.

Impact of VUV photons on SiO2 and organosilicate low-k dielectrics: General behavior, practical applications, and atomic models

E. T. Ryan, S. King, J. Shohet, 2019, Applied Physics Reviews.

Influence of topological constraints on ion damage resistance of amorphous hydrogenated silicon carbide

W. Lanford, M. Nastasi, Liyi Li, 2019, Acta Materialia.

Extrinsic time-dependent dielectric breakdown of low-k organosilicate thin films from vacuum-ultraviolet irradiation

Y. Nishi, S. King, J. Shohet, 2017 .

Thermodynamics of amorphous SiN(O)H dielectric films synthesized by plasma‐enhanced chemical vapor deposition

Min Niu, A. Navrotsky, S. King, 2018 .

Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

Y. Nishi, S. King, J. Shohet, 2016 .

Nanoscale chemical structure variations in nano-patterned and nano-porous low-k dielectrics: A comparative photothermal induced resonance and infrared spectroscopy investigation

Q. Hu, S. King, K. Kjoller, 2016 .

Role of CMOS Back-End Metals as Active Electrodes for Resistive Switching in ReRAM Cells

Yuhong Kang, M. Orlowski, S. King, 2017 .

Interface and layer periodicity effects on the thermal conductivity of copper-based nanomultilayers with tungsten, tantalum, and tantalum nitride diffusion barriers

F. La Mattina, S. King, P. Hopkins, 2020, Journal of Applied Physics.

Time-dependent dielectric breakdown measurements of porous organosilicate glass using mercury and solid metal probes

Y. Nishi, S. King, J. Shohet, 2014 .

Carbon‐Enriched Amorphous Hydrogenated Boron Carbide Films for Very‐Low‐k Interlayer Dielectrics

W. Lanford, S. King, P. Hopkins, 2017 .

Thermal conductivity of plasma deposited amorphous hydrogenated boron and carbon rich thin films

W. Lanford, S. King, S. Huxtable, 2019, Journal of Nuclear Materials.

Breaking network connectivity leads to ultralow thermal conductivities in fully dense amorphous solids

H. Fujiwara, S. King, P. Hopkins, 2016 .

Study of viscoplastic deformation in porous organosilicate thin films for ultra low-k applications

E. T. Ryan, C. Kim, S. King, 2013 .

Hydrogen desorption kinetics for aqueous hydrogen fluoride and remote hydrogen plasma processed silicon (001) surfaces

R. Davis, R. Nemanich, S. King, 2015 .

Valence band offset at the amorphous hydrogenated boron nitride-silicon (100) interface

M. Kuhn, J. Bielefeld, S. King, 2012 .

Combinatorial survey of fluorinated plasma etching in the silicon-oxygen-carbon-nitrogen-hydrogen system

W. Lanford, S. King, B. J. Nordell, 2016 .

Conquering the Low‐k Death Curve: Insulating Boron Carbide Dielectrics with Superior Mechanical Properties

W. Lanford, S. King, L. Ross, 2016 .

Moisture-assisted cracking and atomistic crack path meandering in oxidized hydrogenated amorphous silicon carbide films

R. Dauskardt, S. King, Y. Matsuda, 2013 .

Effects of vacuum-ultraviolet irradiation on copper penetration into low-k dielectrics under bias-temperature stress

Y. Nishi, S. King, J. Shohet, 2015 .

Hydrogen desorption kinetics and band bending for 6H–SiC(0 0 0 1) surfaces

R. Davis, R. Nemanich, S. King, 2009 .

Spin transport, magnetoresistance, and electrically detected magnetic resonance in amorphous hydrogenated silicon nitride

Michael J. Mutch, S. King, P. Lenahan, 2016 .

Boron and high-k dielectrics: Possible fourth etch stop colors for multipattern optical lithography processing

W. Lanford, S. King, B. J. Nordell, 2017 .

Defect-induced bandgap narrowing in low-k dielectrics

Sean W. King, Yoshio Nishi, J. L. Shohet, 2015 .

Plasma enhanced atomic layer deposition of SiNx:H and SiO2

Sean W. King, S. King, 2011 .

Influence of hydrogen content and network connectivity on the coefficient of thermal expansion and thermal stability for a-SiC:H thin films

W. Lanford, J. Bielefeld, S. King, 2014 .

Transmission fourier transform infra-red spectroscopy investigation of structure property relationships in low-k SiO x C y :H Dielectric thin films

S. King, Han Li, Jessica Xu, 2013 .

Demonstration of a reliable high-performance and yielding Air gap interconnect process

J. Bielefeld, S. King, H. Hiramatsu, 2010, 2010 IEEE International Interconnect Technology Conference.

Valence band discontinuity, surface reconstruction, and chemistry of (0001), (0001̄), and (11̄00) 2H–AlN/6H–SiC interfaces

Robert F. Davis, Sean W. King, Carsten Ronning, 1999 .

Valence and conduction band alignment at ScN interfaces with 3C-SiC (111) and 2H-GaN (0001)

R. Davis, R. Nemanich, S. King, 2014 .

Valence band offset and Schottky barrier at amorphous boron and boron carbide interfaces with silicon and copper

M. Kuhn, J. Bielefeld, S. King, 2013 .

Valence Band Offset at a-B:H and a-BP:H/Si Interfaces

M. Kuhn, S. King, M. French, 2012 .

Kinetics of Ga and In desorption from (7 × 7) Si(1 1 1) and (3 × 3) 6H-SiC(0 0 0 1) surfaces

R. Davis, R. Nemanich, S. King, 2008 .

X-ray photoelectron diffraction from (3×3) and (√3×√3)R 30° (0001)Si 6H–SiC surfaces

R. Davis, R. Nemanich, C. Ronning, 1998 .

Influence of network bond percolation on the thermal, mechanical, electrical and optical properties of high and low-k a-SiC:H thin films

Yusuke Matsuda, Lauren R. Olasov, Sean W. King, 2013 .

Density and atomic coordination dictate vibrational characteristics and thermal conductivity of amorphous silicon carbide

W. Lanford, S. King, P. Hopkins, 2022, PHYSICAL REVIEW MATERIALS.

The influence of hydrogen on the chemical, mechanical, optical/electronic, and electrical transport properties of amorphous hydrogenated boron carbide

W. Lanford, S. King, B. J. Nordell, 2015 .

Corrigendum to “Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy” [J. Non-Cryst. Solids 357 (2011) 3602–3615]

W. Lanford, J. Bielefeld, S. King, 2013 .

Fourier transform infrared spectroscopy investigation of chemical bonding in low-k a-SiC:H thin films

W. Lanford, J. Bielefeld, S. King, 2011 .

An Electron Paramagnetic Resonance Study of Defects in Interlayer Dielectrics

Patrick M. Lenahan, Sean W. King, S. King, 2011 .

Ultraviolet radiation effects on paramagnetic defects in low-κ dielectrics for ultralarge scale integrated circuit interconnects

Patrick M. Lenahan, Sean W. King, S. King, 2010 .

Bandgap measurements of low-k porous organosilicate dielectrics using vacuum ultraviolet irradiation

Y. Nishi, S. King, J. Shohet, 2014 .

Remote H2/N2 plasma processes for simultaneous preparation of low-k interlayer dielectric and interconnect copper surfaces

Fu Tang, Sean W. King, Robert Nemanich, 2012 .

Measurements of Schottky barrier at the low-k SiOC:H/Cu interface using vacuum ultraviolet photoemission spectroscopy

Sean W. King, Yoshio Nishi, J. L. Shohet, 2015 .

Acoustic Phonons and Mechanical Properties of Ultra-Thin Porous Low-k Films: A Surface Brillouin Scattering Study

S. King, A. Every, R. Sooryakumar, 2018, Journal of Electronic Materials.

X-ray photoelectron spectroscopy measurement of the Schottky barrier at the SiC(N)/Cu interface

Benjamin French, Marc French, Sean W. King, 2011 .

X-ray Photoelectron Spectroscopy Investigation of the Schottky Barrier at a-BN:H/Cu Interfaces

M. Kuhn, J. Bielefeld, S. King, 2011 .

Defect structure and electronic properties of SiOC:H films used for back end of line dielectrics

Patrick M. Lenahan, Sean W. King, J. Bielefeld, 2014 .

Reliability and performance limiting defects in low-к dielectrics for use as interlayer dielectrics

S. King, P. Lenahan, B. Bittel, 2010, 2010 IEEE International Reliability Physics Symposium.

Radiation induced leakage currents in dense and porous low-k dielectrics

R. J. Waskiewicz, Michael J. Mutch, S. King, 2016, 2016 IEEE International Integrated Reliability Workshop (IIRW).

Tailored amorphous silicon carbide barrier dielectrics by nitrogen and oxygen doping

Yusuke Matsuda, Sean W. King, Reinhold H. Dauskardt, 2013 .

Film Property Requirements for Hermetic Low-k a-SiOxCyNz:H Dielectric Barriers

Marc French, Sean W. King, David W. Gidley, 2012 .

Energetics of porous amorphous low-k SiOCH dielectric films

A. Navrotsky, S. King, J. J. Calvin, 2019 .

Observation of space charge limited current by Cu ion drift in porous low-k/Cu interconnects

Sean W. King, E. Todd Ryan, E. T. Ryan, 2010 .

Valence and conduction band offsets at amorphous hexagonal boron nitride interfaces with silicon network dielectrics

Anthony N. Caruso, Benjamin French, Justin Brockman, 2014 .

X-ray photoelectron spectroscopy investigation of the Schottky barrier at low-k a-SiO(C):H/Cu interfaces

Benjamin French, Marc French, Sean W. King, 2011 .

Thermodynamic Stability of Low‐k Amorphous SiOCH Dielectric Films

Di Wu, A. Navrotsky, S. King, 2016 .

Mechanical properties of high porosity low-k dielectric nano-films determined by Brillouin light scattering

Sean W. King, Ratnasingham Sooryakumar, David J. Michalak, 2013 .

Valence and conduction band offsets at low-k a-SiOxCy:H/a-SiCxNy:H interfaces

Benjamin French, Justin Brockman, Marc French, 2014 .

Defects and electronic transport in hydrogenated amorphous SiC films of interest for low dielectric constant back end of the line dielectric systems

Patrick M. Lenahan, Corey J. Cochrane, Sean W. King, 2013 .

Fracture properties of hydrogenated amorphous silicon carbide thin films

Yusuke Matsuda, Sean W. King, Reinhold H. Dauskardt, 2012 .

Detection of defect states in low-k dielectrics using reflection electron energy loss spectroscopy

Benjamin French, Sean W. King, S. King, 2013 .

Chemical Vapor Cleaning of 6H‐SiC Surfaces

R. Davis, R. Nemanich, S. King, 1999 .

Valence band discontinuity of the (0001) 2H-GaN / (111) 3C-SiC interface

Robert F. Davis, Sean W. King, Carsten Ronning, 1999 .

Molecular layer deposition using cyclic azasilanes, maleic anhydride, trimethylaluminum, and water

S. King, L. Ju, N. Strandwitz, 2017 .

Plasma Enhanced Atomic Layer Deposition of SiN:H Using N2 and Silane

S. King, 2010 .

Electrically detected magnetic resonance and near-zero field magnetoresistance in 28Si/28SiO2

D. Michalak, S. King, P. Lenahan, 2021, Journal of Applied Physics.

Observation of Radiation-Induced Leakage Current Defects in MOS Oxides With Multifrequency Electrically Detected Magnetic Resonance and Near-Zero-Field Magnetoresistance

J. P. Ashton, S. King, P. Lenahan, 2020, IEEE Transactions on Nuclear Science.

Defects in low-κ dielectrics and etch stop layers for use as interlayer dielectrics in ULSI

S. King, P. Lenahan, T. Pomorski, 2010, 2010 IEEE International Integrated Reliability Workshop Final Report.

Identifying Defects Responsible For Leakage Currents in Thin Dielectric Films

R. J. Waskiewicz, S. King, P. Lenahan, 2018, 2018 International Integrated Reliability Workshop (IIRW).

Preface: Materials, metrology, and modeling for a future beyond CMOS technology

G. A. Antonelli, S. King, Dan Herr, 2018 .

Cleaning of AlN and GaN surfaces

Robert F. Davis, Sean W. King, Michael D. Bremser, 1998 .

UV photoemission study of heteroepitaxial AlGaN films grown on 6H-SiC

Robert F. Davis, Sean W. King, Michael D. Bremser, 1996 .

Effects of 29Si and 1H on the near-zero field magnetoresistance response of Si/SiO2 interface states: Implications for oxide tunneling currents

D. Michalak, S. King, P. Lenahan, 2021, Applied Physics Letters.

Removal of fluorine from a Si (100) surface by a remote RF hydrogen plasma

J. Ku, R. Nemanich, S. King, 1995 .

Intrinsic stress fracture energy measurements for PECVD thin films in the SiOxCyNz: H system

Sean W. King, J. A. Gradner, S. King, 2009, Microelectron. Reliab..

Mechanical properties of hydrogenated amorphous silicon carbide thin films

R. Dauskardt, J. Bielefeld, S. King, 2010, 2010 IEEE International Interconnect Technology Conference.

Mass and bond density measurements for PECVD a-SiCx:H thin films using Fourier transform-infrared spectroscopy

Sean W. King, J. Bielefeld, William A. Lanford, 2011 .

Rigidity Percolation in Plasma Enhanced Chemical Vapor Deposited a-SiC:H Thin Films

Sean W. King, J. Bielefeld, S. King, 2010 .

Elastic modulus of low-k dielectric thin films measured by load-dependent contact-resonance atomic force microscopy

R. Cook, G. Stan, S. King, 2009 .

Simple bond energy approach for non-destructive measurements of the fracture toughness of brittle materials

G. A. Antonelli, S. King, 2007 .

Elastic properties of porous low-k dielectric nano-films

J. Bielefeld, S. King, R. Sooryakumar, 2011 .

Role of Nano-Porosity in Plasma Enhanced Chemical Vapor Deposition of Hermetic low-k a-SiOCN:H Dielectric Barrier Materials

S. King, D. Gidley, 2013 .

Dry Ex Situ Cleaning Processes for ( 0001 ) Si 6H‐SiC Surfaces

R. Davis, R. Nemanich, S. King, 1999 .

Impact of Embedment of Cu/TaO x /Ru on Its Device Performance

Sean W. King, Marius Orlowski, Mohammad Al-Mamun, 2017 .

Thermal conductivity and thermal boundary resistance of atomic layer deposited high-k dielectric aluminum oxide, hafnium oxide, and titanium oxide thin films on silicon

Patrick E. Hopkins, Sean W. King, S. King, 2018 .

Thermal Conductivity Measurement of Low-k Dielectric Films: Effect of Porosity and Density

Sean W. King, J. Bielefeld, M. A. Haque, 2014, Journal of Electronic Materials.

Noncontact optical metrologies for Young’s modulus measurements of nanoporous low-k dielectric thin films

Sean W. King, B. C. Daly, Ratnasingham Sooryakumar, 2013 .

Modeling and Simulation of Cu Diffusion in Porous Low-k Dielectrics

Sean W. King, Rizwan Ali, Marius K Orlowski, 2017 .

The Effect of Edge Compliance on the Contact between a Spherical Indenter and a High-Aspect-Ratio Rectangular Fin

G. Stan, S. King, E. Mays, 2018, Experimental Mechanics.

Negative electron affinity surfaces of aluminum nitride and diamond

R. Davis, R. Nemanich, S. King, 1996 .

Negative) Electron Affinity of AlN and AlGaN Alloys

J. Bernholc, R. Davis, R. Nemanich, 1995 .

Extraction of dipolar coupling constants from low-frequency electrically detected magnetic resonance and near-zero field magnetoresistance spectra via least squares fitting to models developed from the stochastic quantum Liouville equation

D. Michalak, S. King, P. Lenahan, 2021, Journal of Applied Physics.

X-ray photoelectron spectroscopy analysis of GaN/(0001)AlN and AlN/(0001)GaN growth mechanisms

R. Davis, R. Nemanich, S. King, 1999 .

Cu film thermal stability on plasma cleaned polycrystalline Ru

R. Nemanich, Xin Liu, S. King, 2012 .

Heat capacities, entropies, and Gibbs free energies of formation of low-k amorphous Si(O)CH dielectric films and implications for stability during processing

A. Navrotsky, S. King, J. J. Calvin, 2019, The Journal of Chemical Thermodynamics.

Defect chemistry and electronic transport in low-κ dielectrics studied with electrically detected magnetic resonance

Patrick M. Lenahan, Michael J. Mutch, Sean W. King, 2016 .

Complete Elemental Analysis of Low-k a-SiC:H Thin Films by Transmission FTIR Spectroscopy

S. King, M. Milosevic, 2014 .

Topological Constraint Theory Analysis of Rigidity Transition in Highly Coordinate Amorphous Hydrogenated Boron Carbide

W. Lanford, S. King, L. Ross, 2019, Front. Mater..

Microstructure-mechanical properties correlation in irradiated amorphous SiOC

W. Lanford, M. Nastasi, Liyi Li, 2018 .

Nanoscale mapping of contact stiffness and damping by contact resonance atomic force microscopy

Gheorghe Stan, Robert F Cook, R. Cook, 2012, Nanotechnology.

Gas source molecular beam epitaxy of scandium nitride on silicon carbide and gallium nitride surfaces

R. Davis, R. Nemanich, S. King, 2014 .

Desorption and sublimation kinetics for fluorinated aluminum nitride surfaces

R. Davis, R. Nemanich, S. King, 2014 .

Synthesis and optimization of low-pressure chemical vapor deposition-silicon nitride coatings deposited from SiHCl3 and NH3

W. Lanford, Liyi Li, S. King, 2019, Thin Solid Films.

Tuning the properties of a complex disordered material: Full factorial investigation of PECVD-grown amorphous hydrogenated boron carbide

W. Lanford, S. King, B. J. Nordell, 2016 .

Investigation of the Dielectric and Mechanical Properties for Magnetron Sputtered BCN Thin Films

K. Sundaram, S. King, L. Ross, 2015 .

Thermal stability of Ti, Pt, and Ru interfacial layers between seedless copper and a tantalum diffusion barrier

R. Nemanich, Xin Liu, S. King, 2013 .

Network structure of a-SiO:H layers fabricated by plasma-enhanced chemical vapor deposition: Comparison with a-SiC:H layers

W. Lanford, H. Fujiwara, S. King, 2016 .

Underlying role of mechanical rigidity and topological constraints in physical sputtering and reactive ion etching of amorphous materials

W. Lanford, S. King, B. J. Nordell, 2018 .

Nanoscale Chemical-Mechanical Characterization of Nanoelectronic Low-k Dielectric/Cu Interconnects

C. Prater, A. Dazzi, Q. Hu, 2016 .

Picosecond ultrasonic study of surface acoustic waves on titanium nitride nanostructures

B. C. Daly, Aine B. Connolly, G. A. Antonelli, 2015 .

Investigation of atomic layer deposited beryllium oxide material properties for high-k dielectric applications

S. Banerjee, W. Lanford, M. Kuhn, 2014 .

Atomic force microscopy for nanoscale mechanical property characterization

G. Stan, S. King, 2020 .

Probing limits of acoustic nanometrology using coherent extreme ultraviolet light

Erik H. Anderson, Sean W. King, Henry C. Kapteyn, 2013, Advanced Lithography.

Nuclear reaction analysis for H, Li, Be, B, C, N, O and F with an RBS check

S. Banerjee, N. Dudney, M. Ritala, 2016 .

Full characterization of ultrathin 5-nm low- k dielectric bilayers: Influence of dopants and surfaces on the mechanical properties

E. Anderson, W. Chao, M. Murnane, 2020, Physical Review Materials.

Mechanical property changes in porous low-k dielectric thin films during processing

G. Stan, J. Bielefeld, D. Michalak, 2014 .

Comprehensive Study of the Chemical, Physical, and Structural Evolution of Molecular Layer Deposited Alucone Films during Thermal Processing

W. Lanford, S. King, P. Hopkins, 2023, Chemistry of Materials.

Hydrogen effects on the thermal conductivity of delocalized vibrational modes in amorphous silicon nitride (a−SiNx:H)

G. A. Antonelli, S. King, A. Al-kukhun, 2021 .

Measurement of the band gap by reflection electron energy loss spectroscopy

S. King, B. French, M. Vos, 2016 .

Band diagram for low-k/Cu interconnects: The starting point for understanding back-end-of-line (BEOL) electrical reliability

Markus G. Kuhn, Xin Liu, Patrick M. Lenahan, 2016, Microelectron. Reliab..

Mechanical properties of low- and high-k dielectric thin films: A surface Brillouin light scattering study

S. King, A. Every, R. Sooryakumar, 2016 .

Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning.

Igor Levin, Gheorghe Stan, Alan Myers, 2015, Nano letters.

Detection of surface electronic defect states in low and high-k dielectrics using reflection electron energy loss spectroscopy

Benjamin French, Sean W. King, S. King, 2013 .

Research Updates: The three M's (materials, metrology, and modeling) together pave the path to future nanoelectronic technologies

Sean W. King, H. Akinaga, S. King, 2013 .

Intrinsic stress effect on fracture toughness of plasma enhanced chemical vapor deposited SiNx:H films

S. King, Guanghai Xu, J. Huening, 2010 .

Wet Chemical Processing of (0001)Si 6H‐SiC Hydrophobic and Hydrophilic Surfaces

R. Davis, R. Nemanich, S. King, 1999 .

Interfacial Defect Vibrations Enhance Thermal Transport in Amorphous Multilayers with Ultrahigh Thermal Boundary Conductance

W. Lanford, A. Henry, F. DeAngelis, 2018, Advanced materials.

Probing thermal conductivity of subsurface, amorphous layers in irradiated diamond

M. Goorsky, S. King, P. Hopkins, 2021 .

Resolving the Subsurface Structure and Elastic Modulus of Layered Films via Contact Resonance Atomic Force Microscopy.

C. Ciobanu, S. King, Gheorghe Stan, 2022, ACS applied materials & interfaces.

Band Alignment at Molybdenum Disulphide/Boron Nitride/Aluminum Oxide Interfaces

M. Kuhn, Yu‐Chuan Lin, A. Voevodin, 2016, Journal of Electronic Materials.

Atomic layer deposited lithium aluminum oxide: (In)dependency of film properties from pulsing sequence

T. Sajavaara, H. Fjellvåg, O. Nilsen, 2015 .

Analysis of Low-k Dielectric Thin Films on Thick Substrates by Transmission FTIR Spectroscopy

S. King, M. Milosevic, 2015 .

Hydrogen desorption from hydrogen fluoride and remote hydrogen plasma cleaned silicon carbide (0001) surfaces

R. Davis, R. Nemanich, Satoru Tanaka, 2015 .

Correction to: The Effect of Edge Compliance on the Contact between a Spherical Indenter and a High-Aspect-Ratio Rectangular Fin

S. King, E. Mays, H. Yoo, 2019 .

The Effect of Edge Compliance on the Contact between a Spherical Indenter and a High-Aspect-Ratio Rectangular Fin

S. King, E. Mays, H. Yoo, 2018, Experimental mechanics.

Toughening thin-film structures with ceramic-like amorphous silicon carbide films.

R. Dauskardt, J. Bielefeld, S. King, 2014, Small.

Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-k high-aspect ratio patterns

G. Stan, S. King, E. Mays, 2016, Nanotechnology.

Thermal Conductivity Enhancement in Ion-Irradiated Hydrogenated Amorphous Carbon Films.

Nanette N. Jarenwattananon, W. Lanford, S. King, 2021, Nano letters.

Effects of cesium ion implantation on the mechanical and electrical properties of porous SiCOH low-k dielectrics

S. King, J. Shohet, Q. Lin, 2017 .

Effects of cesium ion-implantation on mechanical and electrical properties of organosilicate low-k films

S. King, J. Shohet, Q. Lin, 2016 .

Relationships between chemical structure, mechanical properties and materials processing in nanopatterned organosilicate fins

C. Prater, G. Stan, Q. Hu, 2017, Beilstein journal of nanotechnology.

Cleaning of pyrolytic hexagonal boron nitride surfaces

R. Nemanich, S. King, R. Davis, 2015 .

Back-end-of-line a-SiOxCy:H dielectrics for resistive memory

S. King, J. Fan, J. Fan, 2018, AIP Advances.

Optimization of amorphous semiconductors and low-/high-k dielectrics through percolation and topological constraint theory

H. Fujiwara, S. King, B. J. Nordell, 2017 .

Photoemission investigation of the Schottky barrier at the Sc/3C‐SiC (111) interface

R. Nemanich, S. King, R. Davis, 2015 .

Dependence of (0001) GaN/AlN valence band discontinuity on growth temperature and surface reconstruction

R. Davis, R. Nemanich, C. Ronning, 1998 .

Erratum: Review—Investigation and Review of the Thermal, Mechanical, Electrical, Optical, and Structural Properties of Atomic Layer Deposited High-kDielectrics: Beryllium Oxide, Aluminum Oxide, Hafnium Oxide, and Aluminum Nitride [ECS J. Solid State Sci. Technol., 6, N189 (2017)]

S. Banerjee, W. Lanford, Liyi Li, 2018 .

Advances in metrology for the determination of Young's modulus for low-k dielectric thin films

Sean W. King, George A. Antonelli, Gheorghe Stan, 2012, Other Conferences.

Nanoscale Buckling of Ultrathin Low-k Dielectric Lines during Hard-Mask Patterning.

G. Stan, C. Ciobanu, S. King, 2015, Nano letters.

Raman analysis of electron-phonon interactions in GaN films

R. Davis, R. Nemanich, S. King, 1997 .

Tunable plasticity in amorphous silicon carbide films.

R. Dauskardt, J. Bielefeld, S. King, 2013, ACS applied materials & interfaces.

Publisher's Note: “Defect-induced bandgap narrowing in low-k dielectrics” [Appl. Phys. Lett. 107, 082903 (2015)]

Y. Nishi, S. King, J. Shohet, 2015 .