K. Yoshida

Thermally driven microactuator containing thermal isolation structure with polyimide and its application to microvalve

H. Kawada, H. Yoshida, M. Kamakura, 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

The methods of data collection and tool processing time estimation in lot processing

K. Yoshida, H. Hosoe, N. Knanamori, 2007, 2007 International Symposium on Semiconductor Manufacturing.