Qiliang Yan
发表
Qiliang Yan,
Laurent Depre,
Christopher Cork,
2006,
SPIE Advanced Lithography.
Qiliang Yan,
Hongbo Zhang,
Qian Ren,
2013,
Photomask Technology.
Qiliang Yan,
Yunqiang Zhang,
Yudhishthir Kandel,
2020,
Advanced Lithography.
Qiliang Yan,
Hongbo Zhang,
Lin Zhang,
2013,
Photomask Technology.
Lawrence S. Melvin,
Qiliang Yan,
Jianliang Li,
2007
.
Lawrence S. Melvin,
Qiliang Yan,
James P. Shiely,
2007,
SPIE Advanced Lithography.
Qiliang Yan,
James P. Shiely,
Lawrence S. Melvin,
2005,
Photomask Japan.
Lawrence S. Melvin,
Qiliang Yan,
Jianliang Li,
2007,
8th International Symposium on Quality Electronic Design (ISQED'07).
Qiliang Yan,
Ebo Croffie,
David Wei,
2015,
Advanced Lithography.
Qiliang Yan,
Peter De Bisschop,
Lawrence S. Melvin,
2012,
Advanced Lithography.
Lawrence S. Melvin,
Qiliang Yan,
James P. Shiely,
2005,
SPIE Advanced Lithography.
Qiliang Yan,
Lawrence S. Melvin,
Gregory Denbeaux,
2017,
Advanced Lithography.
Qiliang Yan,
Lawrence S. Melvin,
William F. Kielhorn,
2006
.
Qiliang Yan,
Kevin Lucas,
Yunqiang Zhang,
2008,
SPIE Advanced Lithography.
Lawrence S. Melvin,
Qiliang Yan,
Aram Kazarian,
2008,
SPIE Advanced Lithography.
Lawrence S. Melvin,
Qiliang Yan,
Jianliang Li,
2007,
SPIE Advanced Lithography.
Qiliang Yan,
Lawrence S. Melvin,
Jianliang Li,
2007,
European Mask and Lithography Conference.
Qiliang Yan,
James P. Shiely,
Zhijie Deng,
2007,
SPIE Photomask Technology.
Extreme ultraviolet mask multilayer material variation impact on horizontal to vertical pattern bias
Lawrence S. Melvin,
Qiliang Yan,
Artak Isoyan,
2018,
Advanced Lithography.
Qiliang Yan,
Lawrence S. Melvin,
Jianliang Li,
2008
.
Qiliang Yan,
Lawrence S. Melvin,
Thomas Schmoeller,
2009
.
Qiliang Yan,
Lawrence S. Melvin,
Jianliang Li,
2010
.
Qiliang Yan,
James P. Shiely,
Lawrence S. Melvin,
2005
.