P. Mayrhofer

发表

ScAlN MEMS Cantilevers for Vibrational Energy Harvesting Purposes

E. Wistrela, U. Schmid, A. Bittner, 2017, Journal of Microelectromechanical Systems.

AlScN thin film based surface acoustic wave devices with enhanced microfluidic performance

U. Schmid, Y. Fu, Jikui Luo, 2016 .

High performance AlScN thin film based surface acoustic wave devices with large electromechanical coupling coefficient

U. Schmid, Jikui Luo, Wenbo Wang, 2014 .

Impact of sputter deposition parameters on the microstructural and piezoelectric properties of Cr x Al 1-x N thin films

U. Schmid, M. Schneider, P. Mayrhofer, 2018 .

Fabrication and characterisation of ScAlN -based piezoelectric MEMS cantilevers

U. Schmid, P. Mayrhofer, M. Kucera, 2015, 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).

Circular test structure for the determination of piezoelectric constants of ScxAl1−xN thin films applying Laser Doppler Vibrometry and FEM simulations☆

U. Schmid, P. Mayrhofer, A. Bittner, 2015, Sensors and actuators. A, Physical.

Microstructure and piezoelectric response of YxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2015 .

The impact of argon admixture on the c-axis oriented growth of direct current magnetron sputtered ScxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2014 .

Impedance spectroscopy of Al/AlN/n-Si metal-insulator-semiconductor (MIS) structures

U. Schmid, P. Mayrhofer, A. Bittner, 2019, Journal of Applied Physics.

Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading

U. Schmid, P. Mayrhofer, A. Bittner, 2016 .

Fast method for the calculation of surface bending on circular multilayered piezoelectric structures

U. Schmid, B. Jakoby, P. Mayrhofer, 2016, 2016 IEEE SENSORS.

Properties of ScxAl1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading

U. Schmid, P. Mayrhofer, A. Bittner, 2015, Microsystem Technologies.

High temperature stability of ScxAl1-xN (x=0.27) thin films

Ulrich Schmid, Achim Bittner, P. M. Mayrhofer, 2015, Microtechnologies for the New Millennium.

Influence of c-axis orientation and scandium concentration on infrared active modes of magnetron sputtered ScxAl1−xN thin films

U. Schmid, P. Mayrhofer, A. Bittner, 2013 .

Precise Determination of d33 and d31 from Piezoelectric Deflection Measurements and 2D FEM Simulations Applied to ScxAl1-xN☆

U. Schmid, M. Schneider, P. Mayrhofer, 2016 .

EUROSENSORS 2014, the XXVIII edition of the conference series Circular Patterned Test Structures for Precise Determination of Piezoelectric Thin Film Constants: Application to ScxAl1-xN

P. Mayrhofer, A. Bittner, H. Euchner, 2014 .