T. Tsuchiya
发表
Toshiyuki Tsuchiya,
Gen Hashiguchi,
Nobuyo Fujiwara,
2009
.
T. Tsuchiya,
2008
.
Guang Meng,
Toshiyuki Tsuchiya,
Osamu Tabata,
2011
.
Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films
O. Tabata,
T. Tsuchiya,
Y. Taga,
1998
.
T. Tsuchiya,
J. Sakata,
Atsuko Inoue,
1999
.
T. Tsuchiya,
T. Ikehara,
2016,
Microsystems & nanoengineering.
Fatigue characteristics of polycrystalline silicon thin-film membrane and its dependence on humidity
O. Tabata,
Y. Takeuchi,
T. Tsuchiya,
2013
.
O. Tabata,
T. Tsuchiya,
2006
.
O. Tabata,
F. van Keulen,
T. Tsuchiya,
2015,
Journal of Microelectromechanical Systems.
N. Chiba,
T. Tsuchiya,
M. Hirata,
2005
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2011
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2014
.
O. Tabata,
M. Wong,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
T. Tsuchiya,
Y. Hirai,
Yunyi Shu,
2020,
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL).
T. Tsuchiya,
Kazutaka Obitani,
Kazutaka Araya,
2020,
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
T. Tsuchiya,
Haijun Zhang,
2020,
Applied optics.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2007
.
H. Funabashi,
T. Tsuchiya,
H. Funabashi,
2004,
17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2019,
Electronics and Communications in Japan.
T. Tsuchiya,
Y. Taga,
J. Sakata,
1997
.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2014
.
O. Tabata,
S. Sedky,
T. Tsuchiya,
2014
.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2017,
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems (MEMS).
T. Tsuchiya,
Y. Hirai,
Yuan Xia,
2021,
Materials Science and Engineering: A.
O. Tabata,
T. Tsuchiya,
K. Miyamoto,
2007
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2009
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2010,
Journal of Microelectromechanical Systems.
M. Shiraishi,
T. Tsuchiya,
R. Ohshima,
2020,
Scientific Reports.
T. Tsuchiya,
Y. Hirai,
Yuanling Xia,
2020
.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
H. Yamada,
2010
.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2019,
Sensors and Actuators A: Physical.
O. Tabata,
Wenlei Zhang,
T. Tsuchiya,
2017
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2014,
2014 International Conference on Optical MEMS and Nanophotonics.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
T. Tsuchiya,
2002
.
O. Tabata,
Kei Iida,
T. Tsuchiya,
2020,
bioRxiv.
Shulan Wang,
T. Tsuchiya,
A. Ishida,
2002
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2015
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2010
.
Y. Takao,
T. Tsuchiya,
Fumiya Tachibana,
2021
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2017
.
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2016
.
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2015
.
O. Tabata,
T. Tsuchiya,
T. Ikehara,
2010
.
T. Tsuchiya,
Peidong Xue,
Y. Hirai,
2022,
International Journal of Fatigue.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2019,
Japanese Journal of Applied Physics.
O. Tabata,
Y. Takeuchi,
T. Tsuchiya,
2012
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2010
.
K. Sato,
Y. Saotome,
K. Takashima,
2005,
Journal of Microelectromechanical Systems.
T. Tsuchiya,
2005,
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05..
K. Sato,
Y. Saotome,
K. Takashima,
2003,
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE.
M. Shikida,
T. Tsuchiya,
J. Sakata,
2001
.
M. Shikida,
T. Tsuchiya,
J. Amano,
2001
.
T. Tsuchiya,
Y. Hirai,
K. Tsujimoto,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2016
.
W. Peukert,
T. Tsuchiya,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2012
.
O. Tabata,
S. Sedky,
T. Tsuchiya,
2015
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2022,
Japanese Journal of Applied Physics.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2009,
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference.
Y. Takao,
T. Tsuchiya,
Kazuma Emoto,
2018
.
O. Tabata,
T. Tsuchiya,
K. Sugano,
2009
.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2007,
Journal of Microelectromechanical Systems.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2007,
2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS).
Kazutoshi Kobayashi,
Masaharu Komori,
Toshiyuki Tsuchiya,
2008
.
K. Sugano,
O. Tabata,
T. Tsuchiya,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Osamu Tabata,
Toshiyuki Tsuchiya,
Zhipeng Ma,
2016
.
O. Tabata,
T. Tsuchiya,
M. Iwamoto,
2019,
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII).
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2008
.
Toshiyuki Tsuchiya,
Tsuyoshi Ikehara,
T. Tsuchiya,
2009
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2013
.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2012
.
O. Tabata,
T. Tsuchiya,
Weiyuan Sun,
2008
.
Mixing Speed- and Temperature-Controlled Microreactor for Gold Nanoparticle Synthesis (Japanese Titl
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2010
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2017
.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2018,
Int. J. Autom. Technol..
O. Tabata,
T. Tsuchiya,
W. Yoshikawa,
2006,
19th IEEE International Conference on Micro Electro Mechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2018,
Sensors and Materials.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2018,
Applied Sciences.
O. Tabata,
T. Tsuchiya,
A. Taniyama,
2016,
Journal of Microelectromechanical Systems.
O. Tabata,
T. Tsuchiya,
Y. Hirai,
2015
.
T. Ikehara,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
K. Sugano,
T. Tsuchiya,
T. Tsuchiya,
2012,
Journal of Microelectromechanical Systems.
K. Sato,
K. Takashima,
T. Tsuchiya,
2011,
2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.
Toshiyuki Tsuchiya,
Tsuyoshi Ikehara,
T. Tsuchiya,
2008
.
David T. Read,
Toshiyuki Tsuchiya,
Ioannis Chasiotis,
2000
.
Yoshinori Takao,
Toshiyuki Tsuchiya,
Y. Takao,
2017
.
Akira Ishida,
Toshiyuki Tsuchiya,
Osamu Tabata,
2008
.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2022,
bioRxiv.
S. Konishi,
T. Tsuchiya,
2017
.
O. Tabata,
T. Tsuchiya,
A. Banerjee,
2017,
2017 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK).
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2013,
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII).
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2017,
2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS).
O. Tabata,
T. Tsuchiya,
T. Tanemura,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2015
.
O. Tabata,
K. Mawatari,
T. Kitamori,
2019,
Advanced Materials Technologies.
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Koji Sugano,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
T. Tsuchiya,
Y. Hirai,
K. Sugano,
2011,
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.
Masahiro Fujita,
Ryo Sato,
Toshiyuki Tsuchiya,
2010,
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems.
T. Kitamura,
T. Tsuchiya,
T. Sumigawa,
2012
.
Toshiyuki Tsuchiya,
T. Tsuchiya,
2007
.
O. Tabata,
Zhipeng Ma,
T. Tsuchiya,
2017
.
Young-Joo Kim,
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
2015,
10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
T. Tsuchiya,
J. Hirotani,
Yuki Akura,
2023,
Journal of Vacuum Science & Technology B.
Toshiyuki Tsuchiya,
Koji Sugano,
Osamu Tabata,
2008
.
O. Tabata,
T. Tsuchiya,
K. Nakamura,
2016
.
T. Tsuchiya,
2005
.
Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
T. Tsuchiya,
T. Tsuchiya,
Y. Taga,
1997,
Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots.
Yoshikazu Hirai,
Toshiyuki Tsuchiya,
Osamu Tabata,
2016
.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2020
.
K. Kamei,
Y. Hirai,
T. Tsuchiya,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
O. Tabata,
T. Tsuchiya,
K. Kamei,
2018,
2018 IEEE Micro Electro Mechanical Systems (MEMS).
Hiroshi Sugiyama,
Toshiyuki Tsuchiya,
Koji Sugano,
2011,
2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems.
T. Tsuchiya,
Y. Hirai,
A. Uesugi,
2015,
2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
T. Tsuchiya,
K. Kawai,
2020,
Micro & Nano Letters.
O. Tabata,
T. Tsuchiya,
K. Kamei,
2020
.
Y. Hirai,
T. Tsuchiya,
S. Park,
2015,
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS).
H. Sugimura,
T. Tsuchiya,
Y. Hirai,
2013,
2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS).
O. Tabata,
Do-Nyun Kim,
Zhipeng Ma,
2018,
Small.
Toshiyuki Tsuchiya,
Hirofumi Funabashi,
Yasuyuki Kageyama,
2001
.
T. Tsuchiya,
K. Sugano,
O. Tabata,
2008,
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems.
Shuichi Yamashita,
Toshiyuki Tsuchiya,
Osamu Tabata,
2012
.
O. Tabata,
T. Tsuchiya,
A. Banerjee,
2017
.
Toshiyuki Tsuchiya,
T. Tsuchiya,
2017,
2017 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK).
Toshiyuki Tsuchiya,
Yoshikazu Hirai,
Osamu Tabata,
2015
.