Hyungjun Kim

发表

Initial Stage Growth during Plasma-Enhanced Atomic Layer Deposition of Cobalt†

Han-Bo-Ram Lee, Y. Park, S. Baik, 2012 .

Very high frequency plasma reactant for atomic layer deposition

C. M. Yoon, I. Oh, Han-Bo-Ram Lee, 2016 .

Growth characteristics and electrical properties of SiO2 thin films prepared using plasma-enhanced atomic layer deposition and chemical vapor deposition with an aminosilane precursor

I. Oh, J. Myoung, Han-Bo-Ram Lee, 2016, Journal of Materials Science.

Applications of atomic layer deposition to nanofabrication and emerging nanodevices

Han-Bo-Ram Lee, Hyungjun Kim, W. Maeng, 2009 .

Growth of cubic-TaN thin films by plasma-enhanced atomic layer deposition

A. Kellock, Hyungjun Kim, S. Rossnagel, 2002 .

Highly conductive and flexible fiber for textile electronics obtained by extremely low-temperature atomic layer deposition of Pt

Han-Bo-Ram Lee, Soo‐Hyun Kim, Taeyoon Lee, 2016 .

Atomic layer deposition ZnO:N flexible thin film transistors and the effects of bending on device properties

N. Lee, Y. Seol, D. Y. Kim, 2011 .

haracterization of HfO x N y thin film formation by in-situ plasma nhanced atomic layer deposition using NH 3 and N 2 plasmas oung

I. Oh, E. N. Cho, Hyungjun Kim, 2015 .

Atomic layer deposition of Y2O3 and yttrium-doped HfO2 using a newly synthesized Y(iPrCp)2(N-iPr-amd) precursor for a high permittivity gate dielectric

Min Kyu Kim, I. Oh, Hyungjun Kim, 2014 .

Atomic-scale characterization of plasma-induced damage in plasma-enhanced atomic layer deposition

I. Oh, Z. Lee, Hyungjun Kim, 2017 .

Ru nanodot synthesis using CO2 supercritical fluid deposition

Han-Bo-Ram Lee, Hyungjun Kim, Do-young Kim, 2013 .

Uniform, large-area self-limiting layer synthesis of tungsten diselenide

S. Kim, G. Ryu, Z. Lee, 2016 .

Synthesis of wafer-scale uniform molybdenum disulfide films with control over the layer number using a gas phase sulfur precursor.

Il-Kwon Oh, Jong-Hyun Ahn, Gyeong Hee Ryu, 2014, Nanoscale.

Atomic layer deposition for nonconventional nanomaterials and their applications

Hyungjun Kim, Taewook Nam, 2019, Journal of Materials Research.

Recovery Improvement for Large-Area Tungsten Diselenide Gas Sensors.

Sangyoon Lee, Hyungjun Kim, Jusang Park, 2018, ACS applied materials & interfaces.

High-Performance Gas Sensor Using a Large-Area WS2 xSe2-2 x Alloy for Low-Power Operation Wearable Applications.

Sangyoon Lee, Z. Lee, Hyungjun Kim, 2018, ACS applied materials & interfaces.

Bi-layer high-k dielectrics of Al2O3/ZrO2 to reduce damage to MoS2 channel layers during atomic layer deposition

Sunhee Lee, I. Oh, Jongseo Park, 2018, 2D Materials.

Hydrogen barrier performance of sputtered La2O3 films for InGaZnO thin-film transistor

I. Oh, Hyungjun Kim, W. Kim, 2019, Journal of Materials Science.

Hydrogen Barriers Based on Chemical Trapping Using Chemically Modulated Al2O3 Grown by Atomic Layer Deposition for InGaZnO Thin-Film Transistors.

Hyun Jae Kim, I. Oh, Hyungjun Kim, 2021, ACS applied materials & interfaces.

Enhanced Light Stability of InGaZnO Thin-Film Transistors by Atomic-Layer-Deposited Y2O3 with Ozone.

I. Oh, J. Myoung, Hyungjun Kim, 2018, ACS applied materials & interfaces.

The Effects of UV Exposure on Plasma-Enhanced Atomic Layer Deposition ZnO Thin Film Transistor

Jin-seong Park, D. Y. Kim, Hyungjun Kim, 2010 .

ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

Hyungjun Kim, S. Lim, Soon-Ju Kwon, 2008 .

High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO

Hyungjun Kim, Jin-seong Park, Hyungjun Kim, 2007 .

UV–Visible Spectroscopic Analysis of Electrical Properties in Alkali Metal‐Doped Amorphous Zinc Tin Oxide Thin‐Film Transistors

S. Park, Hyungjun Kim, Kyongjun Kim, 2013, Advanced materials.

Highly Flexible Hybrid CMOS Inverter Based on Si Nanomembrane and Molybdenum Disulfide.

Jong-Hyun Ahn, I. Oh, H. Jang, 2016, Small.

Rate performance enhancement of lithium-ion battery using precise thickness-controllable-carbon-coated titanium dioxide nanowire array electrode via atomic layer deposition

Jong-Hyun Ahn, Soo‐Hyun Kim, Seong Dae Kim, 2020 .

Reaction Mechanism of Area-Selective Atomic Layer Deposition for Al2O3 Nanopatterns.

Byung Chul Yeo, C. M. Yoon, S. Han, 2017, ACS applied materials & interfaces.

The formation of sub-10 nm nanohole array on block copolymer thin films on gold surface using surface neutralization based on O2 plasma treatment and self-assembled monolayer

I. Hwang, D. Y. Kim, Hyungjun Kim, 2010 .

Simultaneous improvement of the dielectric constant and leakage currents of ZrO2 dielectrics by incorporating a highly valent Ta5+ element

David Thompson, I. Oh, Hyungjun Kim, 2018 .

Programming and Erasing Operations of Nitride-Nitride-Oxynitride Stacked Thin Film Transistor Device

J. Yi, D. Y. Kim, Hyungjun Kim, 2011 .

Surface Energy Change of Atomic-Scale Metal Oxide Thin Films by Phase Transformation.

S. Bent, I. Oh, Han-Bo-Ram Lee, 2020, ACS nano.

Formation of Ni silicide from atomic layer deposited Ni

Soo Hyeon Kim, Han-Bo-Ram Lee, Hyungjun Kim, 2016 .

Coupled self-assembled monolayer for enhancement of Cu diffusion barrier and adhesion properties

C. Mahata, Young‐Chang Joo, Jungmok Seo, 2014 .

Effects of Cl-Based Ligand Structures on Atomic Layer Deposited HfO2

I. Oh, Han-Bo-Ram Lee, Y. Shin, 2016 .

Atomic layer deposition of Y-stabilized ZrO2 for advanced DRAM capacitors

C. Mahata, I. Oh, Han-Bo-Ram Lee, 2017 .

Area-selective chemical vapor deposition of Co for Cu capping layer

Han-Bo-Ram Lee, Hyungjun Kim, Jukka T. Tanskanen, 2016 .

Atomic layer deposition of CeO2/HfO2 gate dielectrics on Ge substrate

Min Kyu Kim, David Thompson, I. Oh, 2014 .

The effect of La2O3-incorporation in HfO2 dielectrics on Ge substrate by atomic layer deposition

Min Kyu Kim, David Thompson, I. Oh, 2013 .

Electrical and Optical Properties of Low Pressure Chemical Vapor Deposited Al-Doped ZnO Transparent Conductive Oxide for Thin Film Solar Cell

J. Yi, D. Y. Kim, Hyungjun Kim, 2011 .

Self-textured transparent conductive oxide film improves efficiency of solar cells

D. Y. Kim, Hyungjun Kim, Do Young Kim, 2010 .

The formation of a dielectric SiNxCy sealing layer using an atomic layer deposition technique

Soo‐Hyun Kim, Hyungjun Kim, Do-young Kim, 2015 .

Growth of highly conformal ruthenium-oxide thin films with enhanced nucleation by atomic layer deposition

Min Kyu Kim, Soo‐Hyun Kim, Hyungjun Kim, 2014 .

MoS2 doping by atomic layer deposition of high-k dielectrics using alcohol as process oxidants

Seung Gi Seo, I. Oh, Hyungjun Kim, 2021, Applied Surface Science.

Optical Reflection from Unforbidden Diffraction of Block Copolymer Templated Gyroid Films.

Seungwoo Lee, Hyungjun Kim, D. Ryu, 2021, ACS macro letters.

Low-temperature, high-growth-rate ALD of SiO2 using aminodisilane precursor

C. M. Yoon, Jong-Hyun Ahn, Hyungjun Kim, 2019, Applied Surface Science.

Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization

Soo‐Hyun Kim, Hyungjun Kim, Donghyun Kim, 2022, Rare Metals.

Effects of Ar Addition to O2 Plasma on Plasma-Enhanced Atomic Layer Deposition of Oxide Thin Films.

C. M. Yoon, I. Oh, Se‐Hun Kwon, 2018, ACS applied materials & interfaces.

Lowering contact resistance by SWCNT–Al bilayer electrodes in solution processable metal-oxide thin film transistor

I. Oh, J. Myoung, H. Baik, 2015 .

Synthesis of two-dimensional MoS2/graphene heterostructure by atomic layer deposition using MoF6 precursor

Sunhee Lee, G. Ryu, Jong-Hyun Ahn, 2019, Applied Surface Science.

Highly Uniform Atomic Layer-Deposited MoS2@3D-Ni-Foam: A Novel Approach To Prepare an Electrode for Supercapacitors.

J. Shim, Jaeyeong Heo, Soo‐Hyun Kim, 2017, ACS applied materials & interfaces.

Photocatalytic effect of thermal atomic layer deposition of TiO2 on stainless steel

Hyungjun Kim, W. Choi, Do Young Kim, 2011 .

High efficiency n-Si/p-Cu2O core-shell nanowires photodiode prepared by atomic layer deposition of Cu2O on well-ordered Si nanowires array

Han-Bo-Ram Lee, Soo‐Hyun Kim, Jae-Hoon Kim, 2016, Electronic Materials Letters.

The Effects of Ultraviolet Exposure on the Device Characteristics of Atomic Layer Deposited-ZnO:N Thin Film Transistors

Hyungjun Kim, Taewook Nam, S. Lim, 2011 .

Growth characteristics and properties of Ga-doped ZnO (GZO) thin films grown by thermal and plasma-enhanced atomic layer deposition

Hyun Jae Kim, Hyungjun Kim, C. Lee, 2014 .

Structural and electrical properties of Ge-doped ZrO2 thin films grown by atomic layer deposition for high-k dielectrics

I. Oh, Hyungjun Kim, Wontae Noh, 2018, Journal of Materials Science.

Hydrogen plasma-enhanced atomic layer deposition of hydrogenated amorphous carbon thin films

Soo‐Hyun Kim, Hyungjun Kim, Jeong‐Gyu Song, 2018, Surface and Coatings Technology.

Fabrication of single-phase SnS film by H2 annealing of amorphous SnSx prepared by atomic layer deposition

Soo‐Hyun Kim, B. Shin, Hyungjun Kim, 2017 .

Growth characteristics and properties of indium oxide and indium-doped zinc oxide by atomic layer deposition

Hyungjun Kim, Taewook Nam, Jusang Park, 2015 .

Significant Enhancement of the Dielectric Constant through the Doping of CeO2 into HfO2 by Atomic Layer Deposition

Min Kyu Kim, David Thompson, I. Oh, 2014 .

Atomic layer deposition of Ru thin films using a Ru(0) metallorganic precursor and O2

Min Kyu Kim, Soo‐Hyun Kim, Hyungjun Kim, 2013 .

Growth characteristics and electrical properties of Ta2O5 grown by thermal and O3-based atomic layer deposition on TiN substrates for metal–insulator–metal capacitor applications

Min Kyu Kim, Taeyoon Lee, Hyungjun Kim, 2013 .

Low temperature atomic layer deposited Al-doped ZnO thin films and associated semiconducting properties

Jin-seong Park, K. Chung, Hyungjun Kim, 2012 .

Growth Characteristics and Film Properties of Cerium Dioxide Prepared by Plasma-Enhanced Atomic Layer Deposition

Min Kyu Kim, David Thompson, Hyungjun Kim, 2011 .

Nitride mediated epitaxy of CoSi2 through self-interlayer-formation of plasma-enhanced atomic layer deposition Co

Han-Bo-Ram Lee, J. Son, H. Kim, 2007 .

ZnO homojunction core–shell nanorods ultraviolet photo-detecting diodes prepared by atomic layer deposition

J. Myoung, Soo‐Hyun Kim, Hyungjun Kim, 2014 .

Electronic Structure of Cerium Oxide Gate Dielectric Grown by Plasma-Enhanced Atomic Layer Deposition

Min Kyu Kim, Hyungjun Kim, W. Maeng, 2011 .

Growth mechanism and electrical properties of tungsten films deposited by plasma-enhanced atomic layer deposition with chloride and metal organic precursors

Seung Gi Seo, I. Oh, Hyungjun Kim, 2021 .

Molecular oxidation of surface –CH3 during atomic layer deposition of Al2O3 with H2O, H2O2, and O3: A theoretical study

Han-Bo-Ram Lee, Hyungjun Kim, Bonggeun Shong, 2018, Applied Surface Science.

Alkali earth metal dopants for high performance and aqueous-derived ZnO TFT

Youn Sang Kim, S. Park, Hyungjun Kim, 2013 .

Development of RuS2 for near-infrared photodetector by atomic layer deposition and post-sulfurization

Soo‐Hyun Kim, Hyungjun Kim, Donghyun Kim, 2022, Rare Metals.

2D Transition Metal Dichalcogenide Heterostructures for p‐ and n‐Type Photovoltaic Self‐Powered Gas Sensor

Sangyoon Lee, S. Lee, Z. Lee, 2020, Advanced Functional Materials.

Comparative study of the growth characteristics and electrical properties of atomic-layer-deposited HfO2 films obtained from metal halide and amide precursors

Byung Chul Yeo, I. Oh, Han-Bo-Ram Lee, 2018 .

Growth mechanism of Co thin films formed by plasma-enhanced atomic layer deposition using NH3 as plasma reactant

I. Oh, Han-Bo-Ram Lee, Hyungjun Kim, 2017 .

Plasma-enhanced atomic layer deposition of tantalum thin films: the growth and film properties

Hyungjun Kim, S. Rossnagel, 2003 .

Surface-Localized Sealing of Porous Ultralow-k Dielectric Films with Ultrathin (<2 nm) Polymer Coating.

S. J. Yoon, Seong Jun Yoon, B. Cho, 2017, ACS nano.

Room temperature ferroelectric property of BiMnO3 thin film with double SrTiO3 buffer layers on Pt/Ti/SiO2/Si substrate

J. Son, Hyungjun Kim, C. S. Park, 2010 .

Atomic layer deposition of HfO2 on graphene through controlled ion beam treatment

I. Oh, G. Yeom, Hyungjun Kim, 2016 .

Atomic layer deposition of transition metals for silicide contact formation: Growth characteristics and silicidation

Hyungjun Kim, 2013 .

Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer deposition

J. Myoung, Hyungjun Kim, W. Maeng, 2010 .

ROBUST TANX DIFFUSION BARRIER FOR CU-INTERCONNNECT TECHNOLOGY WITH SUBNANOMETER THICKNESS BY METAL-ORGANIC PLASMA-ENHANCED ATOMIC LAYER DEPOSITION

A. Kellock, Dae-gyu Park, Hyungjun Kim, 2005 .

Growth mechanism and diffusion barrier property of plasma-enhanced atomic layer deposition Ti–Si–N thin films

Jin-seong Park, Hyungjun Kim, Sang-Won Kang, 2006 .

Thickness-dependent electrochemical response of plasma enhanced atomic layer deposited WS2 anodes in Na-ion battery

Taeseup Song, Jaeyeong Heo, Soo‐Hyun Kim, 2019, Electrochimica Acta.

Atomic layer deposition of 1D and 2D nickel nanostructures on graphite

Hyungjun Kim, H. Moon, Bonggeun Shong, 2017, Nanotechnology.

In-Situ Doping during ZnO Atomic Layer Deposition

Hyungjun Kim, Sung Kyun Lee, S. Lim, 2008 .

Ionic Liquid-Mediated Route to Atomic Layer Deposition of Tin(II) Oxide via a C-C Bond Cleavage Ligand Modification Mechanism.

S. Bent, Hyungjun Kim, Seunggi Seo, 2022, Journal of the American Chemical Society.

Atomic Layer Deposition of Ni Thin Films and Application to Area-Selective Deposition

Seunghun Hong, Hyungjun Kim, W. Kim, 2011 .

Atomic Layer Deposition of Ruthenium and Ruthenium-oxide ThinFilms by Using a Ru(EtCp)$_{2}$ Precursor and Oxygen Gas

Sang-Joon Park, Hyungjun Kim, Do-young Kim, 2009 .

Phase-controlled growth of cobalt oxide thin films by atomic layer deposition

Soo‐Hyun Kim, J. Bae, Hyungjun Kim, 2018 .

Low-temperature Atomic Layer Deposition of TiO 2 , Al 2 O 3 , and ZnO Thin Films

Min Kyu Kim, Hyungjun Kim, W. Kim, 2011 .

Photocatalytic activities of TiO2 thin films prepared on Galvanized Iron substrate by plasma-enhanced atomic layer deposition

C. Park, Hyungjun Kim, W. Choi, 2010 .

Plasma enhanced atomic layer deposition of magnesium oxide as a passivation layer for enhanced photoluminescence of ZnO nanowires

J. Myoung, Y. Jang, Kwang-Seok Kim, 2014 .

Formation of Vertically Aligned Cobalt Silicide Nanowire Arrays Through a Solid-State Reaction

Ja Hoon Koo, Seulah Lee, Taeyoon Lee, 2013, IEEE Transactions on Nanotechnology.

Cobalt titanium nitride amorphous metal alloys by atomic layer deposition

Soo‐Hyun Kim, Se‐Hun Kwon, Hyungjun Kim, 2018 .

Atomic layer deposition of metal and nitride thin films: Current research efforts and applications for semiconductor device processing

Hyungjun Kim, Hyungjun Kim, 2003 .

Layer-modulated synthesis of uniform tungsten disulfide nanosheet using gas-phase precursors.

J. Myoung, Soo‐Hyun Kim, Hyungjun Kim, 2015, Nanoscale.

Layer-controlled, wafer-scale, and conformal synthesis of tungsten disulfide nanosheets using atomic layer deposition.

J. Myoung, Soo‐Hyun Kim, Hyungjun Kim, 2013, ACS nano.

Growth characteristics of graphene synthesized via chemical vapor deposition using carbon tetrabromide precursor

Soo‐Hyun Kim, Hyungjun Kim, Hanearl Jung, 2015 .

Out-of-plane piezoresponse of monolayer MoS2 on plastic substrates enabled by highly uniform and layer-controllable CVD

Chang Kyu Jeong, J. Son, Hyungjun Kim, 2019, Applied Surface Science.

A composite layer of atomic-layer-deposited Al2O3 and graphene for flexible moisture barrier

Jong-Hyun Ahn, I. Oh, S. Cho, 2017 .

Low-temperature synthesis of 2D MoS2 on a plastic substrate for a flexible gas sensor.

Gyeong Hee Ryu, Hyungjun Kim, Zonghoon Lee, 2018, Nanoscale.

Diffusion barrier properties of transition metal thin films grown by plasma-enhanced atomic-layer deposition

Hyungjun Kim, Stephen M. Rossnagel, Christian Lavoie, 2002 .

The application of atomic layer deposition for metallization of 65 nm and beyond

Hyungjun Kim, Hyungjun Kim, 2006 .

High-Performance Ink-Synthesized Cu-Gate Thin-Film Transistor with Diffusion Barrier Formation

I. Oh, Hyungjun Kim, W. Maeng, 2018, Metals and Materials International.

Effects of TaN Diffusion Barrier on Cu-Gate ZnO:N Thin-Film Transistors

I. Oh, Hyungjun Kim, W. Maeng, 2016, IEEE Electron Device Letters.

Synthesis and Application of AgBiS2 and Ag2S Nanoinks for the Production of IR Photodetectors

Hyungjun Kim, Jusang Park, Donghyun Kim, 2021, ACS omega.

Improved interface quality of atomic-layer-deposited ZrO2 metal-insulator-metal capacitors with Ru bottom electrodes

I. Oh, Z. Lee, D. Thompson, 2020 .

Characterization of wafer-scale MoS2 and WSe2 2D films by spectroscopic ellipsometry

J. Mun, Sang-Woo Kang, Hyungjun Kim, 2017 .

Characteristics and applications of plasma enhanced-atomic layer deposition

Hyungjun Kim, Hyungjun Kim, 2011 .

Group IV Transition Metal (M = Zr, Hf) Precursors for High-κ Metal Oxide Thin Films.

Soo‐Hyun Kim, B. Park, Hyungjun Kim, 2021, Inorganic Chemistry.

Comparative study on atomic layer deposition of HfO2via substitution of ligand structure with cyclopentadiene

Soo‐Hyun Kim, Sungmin Park, Tae-Hyeon Seong, 2020 .

Nucleation and Growth of the HfO2 Dielectric Layer for Graphene-Based Devices

Jong-Hyun Ahn, Hyungjun Kim, Zonghoon Lee, 2015 .

Reaction Mechanisms of Non-hydrolytic Atomic Layer Deposition of Al2O3 with a Series of Alcohol Oxidants

I. Oh, Miso Kim, Hyungjun Kim, 2021, The Journal of Physical Chemistry C.

The Study of Sputtered SiGe Thin Film Growth for Photo-detector Application

S. Han, Hyungjun Kim, Do Young Kim, 2012 .

Improved Sensitivity in Schottky Contacted Two-Dimensional MoS2 Gas Sensor.

H. Lee, Sangmin Kang, Hyungjun Kim, 2019, ACS applied materials & interfaces.

Nitrogen-doped ZnO/n-Si core–shell nanowire photodiode prepared by atomic layer deposition

Soo‐Hyun Kim, Hyungjun Kim, C. Lee, 2015 .

Effects of O2 plasma treatment on moisture barrier properties of SiO2 grown by plasma-enhanced atomic layer deposition

I. Oh, Hyungjun Kim, Seunggi Seo, 2019, Ceramics International.

Improvement of Gas-Sensing Performance of Large-Area Tungsten Disulfide Nanosheets by Surface Functionalization.

Jahyun Koo, Jongbaeg Kim, Taeyoon Lee, 2016, ACS nano.

The properties of plasma-enhanced atomic layer deposition (ALD) ZnO thin films and comparison with thermal ALD

Hyungjun Kim, Do Young Kim, Hyemin Kang, 2011 .

Micropatternable Double-Faced ZnO Nanoflowers for Flexible Gas Sensor.

Hyun Jae Kim, J. Myoung, Hyungjun Kim, 2017, ACS applied materials & interfaces.

Phase-controlled synthesis of SnOx thin films by atomic layer deposition and post-treatment

Sangyoon Lee, Hyungjun Kim, W. Kim, 2019, Applied Surface Science.

Back End of the Line

Hyungjun Kim, Soo-Hyun Kim, Soo‐Hyun Kim, 2014 .

Catalytic chemical vapor deposition of large-area uniform two-dimensional molybdenum disulfide using sodium chloride.

I. Oh, Z. Lee, Hyungjun Kim, 2017, Nanotechnology.

High-Performance Flexible ZnO Nanorod UV/Gas Dual Sensors Using Ag Nanoparticle Templates.

J. Myoung, Hyungjun Kim, Yoann Porte, 2018, ACS applied materials & interfaces.

Synthesis of few-layered graphene nanoballs with copper cores using solid carbon source.

Ja Hoon Koo, Seulah Lee, Taeyoon Lee, 2013, ACS Applied Materials and Interfaces.

Fabrication of rough Al doped ZnO films deposited by low pressure chemical vapor deposition for high efficiency thin film solar cells

Ilgu Yun, Hyungjun Kim, I. Yun, 2010 .

Real-time detection of chlorine gas using Ni/Si shell/core nanowires

Hyungjun Kim, B. Lee, Hyungwoo Lee, 2015, Nanoscale Research Letters.

Hydrophobicity of Rare Earth Oxides Grown by Atomic Layer Deposition

I. Oh, Z. Lee, Hyungjun Kim, 2015 .

Interface Defect Engineering of a Large‐Scale CVD‐Grown MoS2 Monolayer via Residual Sodium at the SiO2/Si Substrate

Yong Soo Kim, Sang-Wook Han, Hyungjun Kim, 2021, Advanced Materials Interfaces.

Low Pressure Chemical Vapor Deposition of Aluminum-Doped Zinc Oxide for Transparent Conducting Electrodes

Min Kyu Kim, Hyungjun Kim, Hyungjun Kim, 2011 .

The electrical properties of low pressure chemical vapor deposition Ga doped ZnO thin films depending on chemical bonding configuration

Hyungjun Kim, Hyungjun Kim, Hanearl Jung, 2014 .

Atomic‐Layer‐Deposition‐Based 2D Transition Metal Chalcogenides: Synthesis, Modulation, and Applications

Sangyoon Lee, Hyungjun Kim, Jusang Park, 2021, Advanced materials.

Self textured transparent conductive oxide film for efficiency improvement in solar cell

Junsin Yi, Do Young Kim, Hyungjun Kim, 2010, OPTO.

Atomic layer deposition of a uniform thin film on two-dimensional transition metal dichalcogenides

Hyungjun Kim, Taewook Nam, Seunggi Seo, 2020 .

Self-Limiting Layer Synthesis of Transition Metal Dichalcogenides

Yong Ju Park, G. Ryu, Jong-Hyun Ahn, 2016, Scientific Reports.

Atomic Layer Deposition ZnO:N Thin Film Transistor: The Effects of N Concentration on the Device Properties

Jin-seong Park, Hyungjun Kim, S. Lim, 2010 .

Thermally stable ohmic contacts to n‐type GaAs. VIII. Sputter‐deposited InAs contacts

W. H. Price, S. Wright, D. L. Tulipe, 1990 .

Hydrogen-mediated quenching of strain-induced surface roughening during gas-source molecular beam epitaxy of fully-coherent Si0.7Ge0.3 layers on Si(001)

D. Cahill, T. Spila, P. Desjardins, 2002 .

Wafer-scale, conformal and direct growth of MoS2 thin films by atomic layer deposition

Soo‐Hyun Kim, Hyungjun Kim, Seungmin Yeo, 2016 .

In situ surface cleaning on a Ge substrate using TMA and MgCp2 for HfO2-based gate oxides

David Thompson, I. Oh, Z. Lee, 2015 .

High Quality Area-Selective Atomic Layer Deposition Co Using Ammonia Gas as a Reactant

Seunghun Hong, I. Hwang, Hyungjun Kim, 2010 .

Area Selective Atomic Layer Deposition of Cobalt Thin Films

Hyungjun Kim, Han‐Bo‐Ram Lee, 2008 .

Comparison of hydrogen sulfide gas and sulfur powder for synthesis of molybdenum disulfide nanosheets

Soo‐Hyun Kim, Sang-Wook Han, Hyungjun Kim, 2016 .

Vapor Deposition Techniques for Synthesis of Two-Dimensional Transition Metal Dichalcogenides

Hyungjun Kim, Jusang Park, Kyunam Park, 2015 .

Direct imprinting of MoS2 flakes on a patterned gate for nanosheet transistors

S. Min, Young Tack Lee, S. Im, 2013 .

In-situ synchrotron X-ray scattering study of thin film growth by atomic layer deposition.

S. Rhee, Y. Park, S. Baik, 2011, Journal of nanoscience and nanotechnology.

Low-temperature direct synthesis of high quality WS2 thin films by plasma-enhanced atomic layer deposition for energy related applications

Soo‐Hyun Kim, J. Bae, J. Han, 2018, Applied Surface Science.

Highly-conformal p-type copper(I) oxide (Cu2O) thin films by atomic layer deposition using a fluorine-free amino-alkoxide precursor

Soo‐Hyun Kim, Hyungjun Kim, Jin-Ha Hwang, 2015 .

High efficiency n-ZnO/p-Si core-shell nanowire photodiode based on well-ordered Si nanowire array with smooth surface

Woo Lee, J. Myoung, Soo‐Hyun Kim, 2014 .

Plasma-enhanced atomic layer deposition of Co using Co(MeCp)2 precursor

Hyungjun Kim, Do-young Kim, Jusang Park, 2013 .

Atomic Layer Deposition of Co Using N2/H2 Plasma as a Reactant

Soo‐Hyun Kim, Hyungjun Kim, Do-young Kim, 2011 .

Moisture barrier properties of low-temperature atomic layer deposited Al2O3 using various oxidants

S. Cho, Hyungjun Kim, Bonggeun Shong, 2019, Ceramics International.

Supercritical Fluid Deposition of SiO2 Thin Films: Growth Characteristics and Film Properties

I. Hwang, Hyungjun Kim, Jae Min Kim, 2011 .

n-ZnO:N/p-Si nanowire photodiode prepared by atomic layer deposition

Hyemin Kang, Hyungjun Kim, Kwang-H Lee, 2012 .

Review of plasma-enhanced atomic layer deposition: Technical enabler of nanoscale device fabrication

Hyungjun Kim, I. Oh, Hyungjun Kim, 2014 .

Electrical property improvements of high-k gate oxide by in situ nitrogen incorporation during atomic layer deposition

Hyungjun Kim, W. Maeng, Soon-Ju Kwon, 2007 .

Water-Erasable Memory Device for Security Applications Prepared by the Atomic Layer Deposition of GeO2

C. M. Yoon, I. Oh, J. Myoung, 2018 .

Plasma-Enhanced Atomic Layer Deposition of Cobalt Using Cyclopentadienyl Isopropyl Acetamidinato-Cobalt as a Precursor

Hyungjun Kim, J. Gatineau, C. Dussarrat, 2010 .

Textile-based high-performance hydrogen evolution of low-temperature atomic layer deposition of cobalt sulfide.

Hyungjun Kim, Hoonkyung Lee, Jusang Park, 2019, Nanoscale.

Controllable synthesis of molybdenum tungsten disulfide alloy for vertically composition-controlled multilayer

G. Ryu, J. Myoung, Z. Lee, 2015, Nature Communications.

Synthesis of a Hybrid Nanostructure of ZnO-Decorated MoS2 by Atomic Layer Deposition.

S. Bent, I. Oh, Hyungjun Kim, 2020, ACS nano.

2D MoS2 Charge Injection Memory Transistors Utilizing Hetero‐Stack SiO2/HfO2 Dielectrics and Oxide Interface Traps

Kwanpyo Kim, S. Im, Sangyoon Lee, 2021, Advanced Electronic Materials.

Static and Dynamic Performance of Complementary Inverters Based on Nanosheet α-MoTe2 p-Channel and MoS2 n-Channel Transistors.

S. Jun, I. Oh, P. Jeon, 2016, ACS nano.

Optical and electrical properties of 2 wt.% Al2O3-doped ZnO films and characteristics of Al-doped ZnO thin-film transistors with ultra-thin gate insulators

N. Duy, J. Yi, H. Choi, 2010 .

Photocurrent Enhancement of PtSe2 Photodetectors by Using Au Nanorods

J. Nam, Hyungjun Kim, Jusang Park, 2021, Photonics.

The Impact of an Ultrathin Y2O3 Layer on GeO2 Passivation in Ge MOS Gate Stacks

C. M. Yoon, B. Cho, Hyun‐Yong Yu, 2017, IEEE Transactions on Electron Devices.

Comparative study on growth characteristics and electrical properties of ZrO2 films grown using pulsed plasma-enhanced chemical vapor deposition and plasma-enhanced atomic layer deposition for oxide thin film transistors

I. Oh, J. Myoung, Soo‐Hyun Kim, 2017 .

The impact of atomic layer deposited SiO2 passivation for high-k Ta1−xZrxO on the InP substrate

Young Woon Kim, C. M. Yoon, C. Mahata, 2015 .

Plasma-Enhanced Atomic Layer Deposition of Ni

C. Park, Hyungjun Kim, W. Kim, 2010 .

Effect of Al2O3 Deposition on Performance of Top-Gated Monolayer MoS2-Based Field Effect Transistor.

S. Kim, G. Ryu, I. Oh, 2016, ACS applied materials & interfaces.

Film Properties of Al Thin Films Depending on Process Parameters and Film Thickness Grown by Sputter

C. M. Yoon, I. Oh, Hyungjun Kim, 2016 .

The Surface Morphology of ZnO Grown by Metal Organic Chemical Vapor Deposition for an Application of Solar Cell

Hyungjun Kim, Do-young Kim, Hyemin Kang, 2010 .

Spontaneous formation of vertical magnetic-metal-nanorod arrays during plasma-enhanced atomic layer deposition.

C. Park, J. Son, Hyungjun Kim, 2008, Small.

Growth Mechanism and Electronic Structure of Zn3P2 on the Ga-Rich GaAs(001) Surface

H. Atwater, S. Rozeveld, Hyungjun Kim, 2014 .

Atomic layer deposition for nanoscale contact applications

Hyungjun Kim, Jaehong Yoon, Han‐Bo‐Ram Lee, 2011, 2011 IEEE International Interconnect Technology Conference.

Investigation of atomic layer deposition of magnesium oxide on a CoFeB layer for three-dimensional magnetic tunneling junctions

Y. Jang, Hyungjun Kim, Jusang Park, 2014 .

Cobalt and nickel atomic layer depositions for contact applications

S. Baik, Hyungjun Kim, W. Kim, 2009, 2009 IEEE International Interconnect Technology Conference.

Uniform color coating of multilayered TiO2/Al2O3 films by atomic layer deposition

Hyungjun Kim, W. Kim, Han‐Bo‐Ram Lee, 2016, Journal of Coatings Technology and Research.

Degradation of the Deposition Blocking Layer During Area-Selective Plasma-Enhanced Atomic Layer Deposition of Cobalt

I. Hwang, Hyungjun Kim, W. Kim, 2010 .

Plasma-enhanced atomic layer deposition of Co on metal surfaces

Hyungjun Kim, Jaehong Yoon, Han‐Bo‐Ram Lee, 2015 .

Silicide formation of atomic layer deposition Co using Ti and Ru capping layer

C. Park, Hyungjun Kim, Jaehong Yoon, 2012 .

Atomic layer deposition of B2O3/SiO2 thin films and their application in an efficient diffusion doping process

Min Kyu Kim, David Thompson, I. Oh, 2014 .

Characterization of HfOxNy thin film formation by in-situ plasma enhanced atomic layer deposition using NH3 and N2 plasmas

I. Oh, I. Yun, E. N. Cho, 2015 .

High performance transparent thin film transistor with atomic layer deposition ZnO based active channel layer

Do Young Kim, Hyungjun Kim, S. J. Lim, 2010, OPTO.

Dysprosium Incorporation for Phase Stabilization of Atomic-Layer-Deposited HfO2 Thin Films

I. Oh, Hyungjun Kim, Hong-Sub Lee, 2023, Chemistry of Materials.

Fabrication of transferable Al(2)O(3) nanosheet by atomic layer deposition for graphene FET.

I. Oh, Soo‐Hyun Kim, Taeyoon Lee, 2014, ACS applied materials & interfaces.

Cu-Al alloy formation by thermal annealing of Cu/Al multilayer films deposited by cyclic metal organic chemical vapor deposition

N. Lee, Hyungjun Kim, Jaehong Yoon, 2013, Metals and Materials International.

Highly Uniform Atomic Layer-Deposited MoS2@3D-Ni-Foam: A Novel Approach To Prepare an Electrode for Supercapacitors.

J. Shim, Jaeyeong Heo, Soo‐Hyun Kim, 2017, ACS applied materials & interfaces.

High-Performance Gas Sensor Using a Large-Area WS2 xSe2-2 x Alloy for Low-Power Operation Wearable Applications.

Sangyoon Lee, Hyungjun Kim, Jusang Park, 2018, ACS applied materials & interfaces.

UV–Visible Spectroscopic Analysis of Electrical Properties in Alkali Metal‐Doped Amorphous Zinc Tin Oxide Thin‐Film Transistors

S. Park, Hyungjun Kim, Kyongjun Kim, 2013, Advanced materials.

Synthesis of few-layered graphene nanoballs with copper cores using solid carbon source.

Ja Hoon Koo, Seulah Lee, Taeyoon Lee, 2013, ACS applied materials & interfaces.