S. Dew

发表

Modeling 3D effects of substrate topography on step coverage and film morphology of thin metal films

R. Joshi, T. Smy, S. Dew, 2002 .

Study of Development Processes for ZEP-520 as a High-Resolution Positive and Negative Tone Electron Beam Lithography Resist

M. A. Mohammad, S. Dew, K. Koshelev, 2012 .

Nanopatterning of PMMA on insulating surfaces with various anticharging schemes using 30 keV electron beam lithography

S. Dew, M. Stepanova, M. Muhammad, 2011 .

Nanofabrication : techniques and principles

Steven K. Dew, S. Dew, M. Stepanova, 2012 .

Simulation of Temperature Cycling Effects on Electromigration Behavior Under Pulsed Current Stress

J. W. Haslett, Michael J. Brett, Xiang Gui, 1998 .

Investigation of thermal flux to the substrate during sputter deposition of aluminum

S. Dew, S. Ekpe, 2002 .

Energy Deposition at the Substrate in a Magnetron Sputtering System

S. Dew, S. Ekpe, 2008 .

Theoretical and experimental determination of the energy flux during magnetron sputter deposition onto an unbiased substrate

S. Dew, S. Ekpe, 2003 .

Three-dimensional simulation of impurity diffusion in thin-film diffusion barriers

M. Brett, S. Dew, X. Gui, 1994 .

Surface Enhanced Raman Spectroscopy Detection of Biomolecules Using EBL Fabricated Nanostructured Substrates

S. Dew, R. Peters, M. Stepanova, 2015, Journal of visualized experiments : JoVE.

Simulation of Electroless Deposition of Cu Thin Films for Very Large Scale Integration Metallization

Tom J. Smy, Michael J. Brett, Steven K. Dew, 1997 .

Ballistic simulation of optical coatings deposited over topography

Michael J. Brett, R. N. Tait, Tom J. Smy, 1990, Optics & Photonics.

Thin film microstructure and process simulation using SIMBAD

M. Brett, T. Smy, S. Dew, 1996 .

Comprehensive computer model for magnetron sputtering. I. Gas heating and rarefaction

S. Dew, F. Jiménez, 2012 .

Effect of process conditions on the microstructural formation of dc reactively sputter deposited AlN

S. Dew, S. Ekpe, F. Jiménez, 2010 .

3D numerical simulation of gas heating effects in a magnetron sputter deposition system

S. Dew, S. Ekpe, 2006 .

Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering system

S. Dew, S. Ekpe, F. Jiménez, 2006 .

Deposition rate model of magnetron sputtered particles

S. Dew, S. Ekpe, L. W. Bezuidenhout, 2005 .

Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor

S. Dew, S. Ekpe, 2004 .

Bombardment and gas rarefaction effects on the properties of sputtered Ti thin films

M. Brett, T. Smy, S. Dew, 1994 .

Calculation of binding free energy of short double stranded oligonucleotides using MM/3D-RISM-KH approach

A. Kovalenko, S. Dew, Nikolay Blinov, 2015 .

Copper nanopattern on SiO2 from sputter etching a Cu∕SiO2 interface

I. P. Soshnikov, S. Dew, M. Stepanova, 2005 .

DC magnetron sputtering of high Tc superconducting thin films

R. R. Parsons, S. Dew, B. Sullivan, 1987 .

Simulation of uniformity and lifetime effects in collimated sputtering

M. Brett, T. Smy, S. Dew, 1996 .

Programmed self-assembly of microscale components using biomolecular recognition through the avidin–biotin interaction

S. Dew, M. Stepanova, Jason Ng, 2014 .

Simulation of elevated temperature aluminum metallization using SIMBAD

M. Brett, T. Smy, S. Dew, 1992 .

Trends of Nanoclusters' Growth by Physical Vapor Deposition Studied by Atomistic Simulation

S. Dew, M. Stepanova, A. Bhuiyan, 2009 .

Explanation of spurious features in tungsten deposition using an atomic momentum model

M. Brett, T. Smy, S. Dew, 1995 .

SIMULATION OF THE EFFECT OF BULK VACANCY DIFFUSION ON THE SHAPE OF SPUTTERED FILMS DEPOSITED ONTO TRENCHES AND VIAS

M. Brett, T. Smy, S. Dew, 1995 .

Simulation and Experimental Analysis of Refractory Metal and Aluminum Deposition Over High Aspect Ratio VLSI Topography

M. Brett, T. Smy, S. Dew, 1995 .

Simulation and experimental analysis of planarization of refractory metals using a multi-step sputter/sputter etch process

M. Brett, T. Smy, S. Dew, 1994 .

Thin film microstructure simulation of RF bias planarized metal interconnects using a ballistic deposition model

M. Brett, T. Smy, S. Dew, 1991, 1991 Proceedings Eighth International IEEE VLSI Multilevel Interconnection Conference.

Modeling bias sputter planarization of metal films using a ballistic deposition simulation

M. Brett, T. Smy, S. Dew, 1991 .

Step Coverage, Uniformity and Composition Studies Using Integrated Vapour Transport and Film-Deposition Models

M. Brett, T. Smy, S. Dew, 1994 .

Experimental study and computer simulation of collimated sputtering of titanium thin films over topographical features

M. Brett, T. Smy, S. Dew, 1993 .

Erratum to “Self-shadowing and surface diffusion effects in obliquely deposited thin films” [Thin solid Films 339 (1999) 88–94]☆

M. Brett, K. Robbie, D. Vick, 1999 .

The effects of collimation on intrinsic stress in sputter-deposited metallic thin films

M. Brett, T. Smy, S. Dew, 1994 .

Simulation of the spatial distribution and molecular weight of polymethylmethacrylate fragments in electron beam lithography exposures

S. Dew, M. Stepanova, M. Aktary, 2006 .

Study of multilayer systems in electron beam lithography

S. Dew, R. Peters, T. Fito, 2013 .

Systematic study of the interdependence of exposure and development conditions and kinetic modelling for optimizing low-energy electron beam nanolithography

M. A. Mohammad, S. Dew, T. Fito, 2010 .

The Interdependence of Exposure and Development Conditions when Optimizing Low-Energy EBL for Nano-Scale Resolution

M. A. Mohammad, S. Dew, T. Fito, 2010 .

SOS Simulation of Sputtered Nanoripples

S. Dew, M. Stepanova, 2003 .

Simulation of sputter deposition at high pressures

M. Brett, T. Smy, S. Dew, 1997 .

Kinetic simulation of metal chemical-vapor deposition on high aspect ratio features in modern very-large-scale-integrated processing

M. Brett, T. Smy, S. Dew, 2000 .

Surface-enhanced Raman spectroscopy detection of protein-ligand binding using D-glucose and glucose binding protein on nanostructured plasmonic substrates

S. Dew, R. Peters, M. Stepanova, 2017 .

Controlled Self-Assembly of Nanocrystalline Arrays Studied by 3D Kinetic Monte Carlo Modeling

S. Dew, M. Stepanova, A. Bhuiyan, 2011 .

Kinetic Monte Carlo Simulation of Metallic Nanoislands Grown by Physical Vapor Deposition

S. Dew, M. Stepanova, A. Bhuiyan, 2011 .

Spatial survey of a magnetron plasma sputtering system using a Langmuir probe

S. Dew, R. Burrell, D. Field, 2002 .

Comparison between ZEP and PMMA resists for nanoscale electron beam lithography experimentally and by numerical modeling

K. Westra, M. A. Mohammad, S. Dew, 2011 .

Application of EBL fabricated nanostructured substrates for surface enhanced Raman spectroscopy detection of protein A in aqueous solution

S. Dew, R. Peters, M. Stepanova, 2013 .

Fundamentals of Electron Beam Exposure and Development

Mohammad Ali Mohammad, Steven K. Dew, Mustafa Muhammad, 2012 .

Diazonium Chemistry for the Bio-Functionalization of Glassy Nanostring Resonator Arrays

Wei Zheng, Yong Cao, Stephane Evoy, 2015, Sensors.

Fabrication of sub-10nm silicon carbon nitride resonators using a hydrogen silsesquioxane mask patterned by electron beam lithography

Mohammad Ali Mohammad, Stephane Evoy, Steven K. Dew, 2011 .

Nanomachining and clamping point optimization of silicon carbon nitride resonators using low voltage electron beam lithography and cold development

Mohammad Ali Mohammad, Stephane Evoy, Steven K. Dew, 2010 .

Directions in Nanofabrication

S. Dew, M. Stepanova, 2012 .

Study of the interaction of polymethylmethacrylate fragments with methyl isobutyl ketone and isopropyl alcohol

M. A. Mohammad, S. Dew, M. Stepanova, 2012 .

Simulation of electron beam lithography of nanostructures

Steven K. Dew, Kirill Koshelev, Kamlesh Alti, 2010 .

Interdependence of optimum exposure dose regimes and the kinetics of resist dissolution for electron beam nanolithography of polymethylmethacrylate

M. A. Mohammad, S. Dew, T. Fito, 2010 .

A simulation study of copper reflow characteristics in vias

M. Brett, T. Smy, S. Dew, 1999 .

Self-organized metal networks at ion-etched Cu∕Si and Ag∕Si interfaces

S. Dew, M. Stepanova, D. Karpuzov, 2005 .

Simulation and analysis of electromigration failure distributions

Michael J. Brett, Tom J. Smy, Steven K. Dew, 1994 .

Discrete-path transport theory of physical sputtering

S. Dew, M. Stepanova, 2002 .

Titanium sputter deposition at low pressures and long throw distances

Michael J. Brett, Steven K. Dew, M. Brett, 1996 .

Transient 3D heat flow analysis for integrated circuit devices using the transmission line matrix method on a quad tree mesh

D. J. Walkey, Tom J. Smy, S. K. Dew, 2001 .

SML resist processing for high-aspect-ratio and high-sensitivity electron beam lithography

M. A. Mohammad, S. Dew, M. Stepanova, 2013, Nanoscale Research Letters.

Self-shadowing and surface diffusion effects in obliquely deposited thin films

Kevin Robbie, Tom J. Smy, Michael J. Brett, 1999 .

Comprehensive computer model for magnetron sputtering. II. Charged particle transport

S. Dew, F. Jiménez, D. Field, 2014 .

Sheath structure of an electronegative plasma with cold positive ions

M. Brett, S. Dew, M. Li, 2000 .

Theoretical and practical aspects of collimated sputtering

S. Dew, 1994 .

WSiX thin films for resistors

M. Brett, C. Backhouse, S. Dew, 1997 .

Effects and loss of lead in doped Bi‐Sr‐Ca‐Cu‐O films

R. R. Parsons, S. Dew, P. Mulhern, 1989 .

Effects of electron distribution functions on the floating potential of particles in the plasma: thin plasma sheaths

M. Brett, S. Dew, M. Li, 1999 .

Fabrication of thin films with highly porous microstructures

Kevin Robbie, Tom J. Smy, Michael J. Brett, 1995 .

Simulation of the microstructure of chemical vapor deposited refractory thin films

Tom J. Smy, Michael J. Brett, Steven K. Dew, 1992 .

Nodular defect growth and structure in vapor deposited films

M. Brett, T. Smy, S. Dew, 1995 .

Nodular defect growth in thin films

Tom J. Smy, Michael J. Brett, Steven K. Dew, 1992 .

Estimates of differential sputtering yields for deposition applications

S. Dew, M. Stepanova, 2001 .

CHARACTERIZATION OF Al + SECONDARY ION EMISSION PRODUCED BY Ne + AND Ar + BOMBARDMENT OF ALUMINIUM SURFACE

S. Dew, S. Belykh, C. Pagura, 2004 .

Effect of magnetic field strength on deposition rate and energy flux in a dc magnetron sputtering system

S. Dew, S. Ekpe, F. Jiménez, 2009 .

Anisotropic energies of sputtered atoms under oblique ion incidence

S. Dew, M. Stepanova, 2004 .

High-transmission solid-immersion apertured optical probes for near-field scanning optical microscopy

S. E. Irvine, S. Dew, A. Dechant, 2005 .

TLM TREATMENT OF A GENERAL DIFFUSION FLUX BOUNDARY CONDITION

M. Brett, S. Dew, X. Gui, 1996 .

Grain‐boundary diffusion modeling and efficiency evaluation of thin‐film diffusion barriers considering microstructure effects

M. Brett, T. Smy, S. Dew, 1995 .

LETTER TO THE EDITOR. A GENERAL EXPRESSION OF BOUNDARY CONDITIONS IN TLM DIFFUSION MODELLING

M. Brett, S. Dew, X. Gui, 1996 .

Transmission‐line‐matrix modeling of grain‐boundary diffusion in thin films

Michael J. Brett, Xiang Gui, Donard de Cogan, 1993 .

Effects of lead on the formation of the 2223 phase in BiSrCaCuO films

R. R. Parsons, S. Dew, P. Mulhern, 1989 .

Developer-free direct patterning of PMMA/ZEP 520A by low voltage electron beam lithography

M. A. Mohammad, S. Dew, David Ai Zhi Zheng, 2011 .

Nanoscale resist morphologies of dense gratings using electron-beam lithography

K. Westra, M. A. Mohammad, A. Kovalenko, 2007 .

Ion beam sputtering nanopatterning of thin metal films: the synergism of kinetic self-organization and coarsening

S. Dew, M. Stepanova, 2009, Journal of physics. Condensed matter : an Institute of Physics journal.

Self-organized Cu nanowires on glass and Si substrates from sputter etching Cu/substrate interfaces

S. Dew, M. Stepanova, 2006 .

Simulation of three‐dimensional refractory metal step coverage over contact cuts and vias

M. Brett, T. Smy, S. Dew, 1996 .

Properties of titanium and aluminum thin films deposited by collimated sputtering

M. Brett, T. Smy, S. Dew, 1993 .