D. Maier-Schneider

A new analytical solution for the load-deflection of square membranes

J. Maibach, D. Maier-Schneider, E. Obermeier, 1995 .

Elastic properties and microstructure of LPCVD polysilicon films

D. Maier-Schneider, E. Obermeier, A. Köprülülü, 1996 .

Variations in Young's modulus and intrinsic stress of LPCVD-polysilicon due to high-temperature annealing

J. Maibach, D. Maier-Schneider, E. Obermeier, 1995 .

Computer-aided characterization of the elastic properties of thin films

J. Maibach, D. Maier-Schneider, E. Obermeier, 1992 .